[Scan]
initial_time=2016-01-18T21:33:18
final_time=2016-01-18T21:33:45
ip_count=19
run=1024
dataset=8
scan=612
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08812E-4
ql1_vset=
ql1_vmon=-8.16917E-1
ql1_imon=1.37508E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.94978E-9
ql3_vset=
ql3_vmon=-9.1321E0
ql3_imon=1.88446E-10
ql4_vset=
ql4_vmon=-9.1429E0
ql4_imon=-1.40083E-10
mult1=-9.90231E-9
mult2=-2.74552E-9
rf_tmon=-5.55289E-3
rf_agc=3.34589E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.68732E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67455E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19484E1
lens5a_imon=2.02669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.0497E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54091E1
cs_ef1b_imon=3.16398E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02334E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=1.09445E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37436E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0351E1
cs_ea2_imon=1.3522E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=3.03676E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.26898E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.28193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1524E1
os_ea1_imon=2.38322E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63317E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=9.53857E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=1.95845E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.27721E-8
tplens_vset=1.4E-1
tplens_vmon=1.65105E0
tplens_imon=-1.87592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26232E1
iondef3_imon=1.52128E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2664E1
iondef2_imon=1.56021E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98032E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.00937E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=8.47511E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34024E1
lens5b_imon=2.15755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49904E0
os_ea2_imon=-5.91347E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00673E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.30235E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16044E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.41265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.10707E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67506E1
iondef4_imon=1.10395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.89317E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.55936E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-9.83303E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.90408E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-7.63461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.82622E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.84207E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3354E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.42696E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07942E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64011E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31798E1
cs_fil1_imon=7.26897E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.62356E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66162E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07971E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.05389E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.52665E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22242E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=3.00097E-1
chamber_ion_pmon=1.20192E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.68012E-1
res40_imon=-2.30956E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.17108E-1	-7.98082E-1	-9.1316E0	-9.14245E0	4.41074E-3	9.50098E-2	2.73283E1	-3.26654E1	-3.26179E1	2.6807E1	1.19549E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.97963E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16941E-1	-7.97963E-1	-9.1315E0	-9.14257E0	4.50611E-3	9.52005E-2	2.73382E1	-3.26327E1	-3.26278E1	2.68256E1	1.19891E-7	2.51182E-3	2.51182E-3	6.31269E-3	2.98842E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16894E-1	-7.97963E-1	-9.13153E0	-9.14242E0	4.72069E-3	9.46999E-2	2.73022E1	-3.26648E1	-3.26347E1	2.67792E1	1.19978E-7	2.51581E-3	2.51581E-3	6.28511E-3	2.99083E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.1687E-1	-7.98154E-1	-9.13136E0	-9.14285E0	4.31538E-3	9.47952E-2	2.73099E1	-3.26362E1	-3.26386E1	2.69668E1	1.1979E-7	2.51498E-3	2.51498E-3	6.32858E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.17108E-1	-7.98273E-1	-9.13181E0	-9.14257E0	4.48227E-3	9.49383E-2	2.73243E1	-3.2611E1	-3.26362E1	2.68328E1	1.19601E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16917E-1	-7.98154E-1	-9.13167E0	-9.14276E0	4.31538E-3	9.5439E-2	2.73311E1	-3.26644E1	-3.26001E1	2.67298E1	1.2026E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.1687E-1	-7.98106E-1	-9.13167E0	-9.14283E0	4.3869E-3	9.48668E-2	2.73171E1	-3.26543E1	-3.26152E1	2.6794E1	1.20174E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16679E-1	-7.97892E-1	-9.13167E0	-9.14266E0	4.48227E-3	9.48668E-2	2.73057E1	-3.26675E1	-3.26122E1	2.68166E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.97445E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16631E-1	-7.97892E-1	-9.13181E0	-9.14266E0	4.45843E-3	9.48668E-2	2.72915E1	-3.26372E1	-3.26018E1	2.67644E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.98222E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16679E-1	-7.97725E-1	-9.132E0	-9.14259E0	4.60148E-3	9.4986E-2	2.73598E1	-3.27059E1	-3.25816E1	2.66767E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.99175E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16655E-1	-7.98059E-1	-9.13219E0	-9.14247E0	4.74453E-3	9.50098E-2	2.73183E1	-3.26476E1	-3.26188E1	2.6658E1	1.19965E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16512E-1	-7.98297E-1	-9.13172E0	-9.14266E0	4.81606E-3	9.49144E-2	2.73134E1	-3.26679E1	-3.26408E1	2.69084E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16631E-1	-7.9813E-1	-9.13234E0	-9.14252E0	4.91142E-3	9.48191E-2	2.73228E1	-3.2648E1	-3.26248E1	2.68924E1	1.19705E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16751E-1	-7.97987E-1	-9.13208E0	-9.14261E0	4.72069E-3	9.53197E-2	2.73265E1	-3.26642E1	-3.26498E1	2.68036E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.97963E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.16441E-1	-7.97844E-1	-9.13191E0	-9.14261E0	4.74453E-3	9.51529E-2	2.72978E1	-3.26327E1	-3.26444E1	2.67523E1	1.20363E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16751E-1	-7.97987E-1	-9.13181E0	-9.14233E0	4.673E-3	9.49621E-2	2.73363E1	-3.27444E1	-3.26524E1	2.69217E1	1.19925E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.0041E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16631E-1	-7.98154E-1	-9.13169E0	-9.14297E0	4.62532E-3	9.52482E-2	2.73369E1	-3.26729E1	-3.26266E1	2.67205E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16631E-1	-7.9813E-1	-9.132E0	-9.14292E0	4.43459E-3	9.54151E-2	2.73552E1	-3.26667E1	-3.26278E1	2.68334E1	1.20069E-7	2.51826E-3	2.51826E-3	6.33486E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16822E-1	-7.98583E-1	-9.13219E0	-9.14288E0	4.33922E-3	9.53436E-2	2.73493E1	-3.26602E1	-3.25918E1	2.69171E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16917E-1	-7.98249E-1	-9.1321E0	-9.1429E0	4.673E-3	9.4986E-2	2.73057E1	-3.2664E1	-3.26232E1	2.67506E1	1.20192E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.00097E-1
