[Scan]
initial_time=2016-01-18T21:34:28
final_time=2016-01-18T21:34:50
ip_count=19
run=1024
dataset=8
scan=614
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.36778E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.9801E-9
ql3_vset=
ql3_vmon=-9.1321E0
ql3_imon=1.57964E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=-1.18506E-10
mult1=-9.51118E-9
mult2=-2.64094E-9
rf_tmon=-4.362E-3
rf_agc=3.38931E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.71887E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6773E0
bslens_imon=2.53119E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19115E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.04971E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=3.1615E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02368E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04594E1
cs_ea1_imon=1.07281E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38009E0
lens1_imon=2.76409E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64805E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.35438E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=3.04403E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.26812E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.115E1
os_restr1_imon=4.27531E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14645E1
os_ea1_imon=2.39863E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08713E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26079E0
cs_ionrep_imon=9.43145E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.9367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=1.96358E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.26538E-8
tplens_vset=1.4E-1
tplens_vmon=1.66635E0
tplens_imon=-1.07253E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2639E1
iondef3_imon=1.51602E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26502E1
iondef2_imon=1.5487E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.47714E-2
ql6_imon=4.0449E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2828E0
ionrepsh_imon=8.59716E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3371E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.13022E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52035E0
os_ea2_imon=-7.50351E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.0072E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06498E0
os_ef2alow_imon=-2.44947E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89122E-1
os_ef2bup_imon=-5.11499E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11054E1
os_restr2_imon=3.41588E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01856E1
cs_anode2_imon=2.08382E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73316E1
iondef1_imon=1.11417E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68099E1
iondef4_imon=1.10797E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.93672E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.52535E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14404E0
cs_ionaccel_imon=-9.5859E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47515E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.55914E-1
window_imon=-7.95253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.3932E-4
mask2_vset=0.0E0
mask2_vmon=-1.86529E1
mask2_imon=-5.86738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.22059E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.50449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.33183E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2267E0
defgridb_imon=5.92396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33264E1
os_fil1_imon=9.40509E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07578E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64051E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31805E1
cs_fil1_imon=7.51331E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.51158E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66683E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.22757E-2
os_fil2_imon=-2.4375E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.05606E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32274E-1
cs_fil2_imon=-2.38537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24627E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2228E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.74266E-1
res40_imon=-2.446E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16774E-1	-7.98345E-1	-9.13179E0	-9.14288E0	4.43459E-3	9.46999E-2	2.73098E1	-3.26649E1	-3.26331E1	2.6768E1	1.19991E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.00348E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.16846E-1	-7.98297E-1	-9.13181E0	-9.14261E0	4.45843E-3	9.48906E-2	2.7351E1	-3.26817E1	-3.26352E1	2.70479E1	1.20069E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16822E-1	-7.9813E-1	-9.13172E0	-9.14288E0	4.48227E-3	9.48429E-2	2.73488E1	-3.26626E1	-3.26319E1	2.68749E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16917E-1	-7.98011E-1	-9.13191E0	-9.14273E0	4.62532E-3	9.50575E-2	2.73135E1	-3.26482E1	-3.26398E1	2.67379E1	1.19851E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.16941E-1	-7.9813E-1	-9.13222E0	-9.14245E0	4.69685E-3	9.48429E-2	2.73369E1	-3.26494E1	-3.26302E1	2.69367E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16703E-1	-7.98059E-1	-9.13208E0	-9.14268E0	4.60148E-3	9.50813E-2	2.73225E1	-3.26518E1	-3.26092E1	2.67283E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16846E-1	-7.98368E-1	-9.13198E0	-9.14271E0	4.72069E-3	9.4986E-2	2.73165E1	-3.26639E1	-3.26146E1	2.68124E1	1.20084E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16965E-1	-7.98464E-1	-9.13181E0	-9.14273E0	4.41074E-3	9.51052E-2	2.72952E1	-3.26399E1	-3.26028E1	2.69565E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16941E-1	-7.98368E-1	-9.13196E0	-9.14268E0	4.62532E-3	9.53436E-2	2.73326E1	-3.26878E1	-3.26035E1	2.67889E1	1.1969E-7	2.51709E-3	2.51709E-3	6.30212E-3	2.99845E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16822E-1	-7.98035E-1	-9.1321E0	-9.14261E0	4.72069E-3	9.49383E-2	2.72931E1	-3.26392E1	-3.26549E1	2.66839E1	1.20316E-7	2.51725E-3	2.51725E-3	6.33021E-3	2.9971E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16965E-1	-7.98345E-1	-9.1321E0	-9.14261E0	4.60148E-3	9.49144E-2	2.73411E1	-3.26855E1	-3.26368E1	2.67271E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.17394E-1	-7.98345E-1	-9.13234E0	-9.14235E0	4.57764E-3	9.49621E-2	2.73142E1	-3.26733E1	-3.26243E1	2.66835E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17084E-1	-7.98035E-1	-9.13203E0	-9.14235E0	4.62532E-3	9.4986E-2	2.73248E1	-3.2666E1	-3.26295E1	2.69599E1	1.19782E-7	2.51886E-3	2.51886E-3	6.3074E-3	3.00247E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.17084E-1	-7.97963E-1	-9.13205E0	-9.14254E0	4.86374E-3	9.52959E-2	2.73724E1	-3.26681E1	-3.26284E1	2.68094E1	1.19851E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.99941E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.17084E-1	-7.98249E-1	-9.13212E0	-9.14264E0	4.41074E-3	9.50813E-2	2.73319E1	-3.2659E1	-3.26101E1	2.68848E1	1.20017E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.1706E-1	-7.98249E-1	-9.13208E0	-9.14247E0	4.50611E-3	9.51529E-2	2.73473E1	-3.26403E1	-3.25306E1	2.67316E1	1.20161E-7	2.52364E-3	2.52364E-3	6.31251E-3	3.02586E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17037E-1	-7.98202E-1	-9.13231E0	-9.14249E0	4.86374E-3	9.48429E-2	2.7308E1	-3.26349E1	-3.26124E1	2.69356E1	1.20019E-7	2.52621E-3	2.52621E-3	6.3074E-3	3.01892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.1687E-1	-7.98368E-1	-9.13217E0	-9.14235E0	4.79221E-3	9.50098E-2	2.73364E1	-3.26514E1	-3.26508E1	2.6813E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16679E-1	-7.98225E-1	-9.13224E0	-9.14237E0	4.57764E-3	9.50098E-2	2.73375E1	-3.26744E1	-3.26172E1	2.68088E1	1.19941E-7	2.51603E-3	2.51603E-3	6.3074E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16703E-1	-7.98106E-1	-9.1321E0	-9.14223E0	4.95911E-3	9.47714E-2	2.73316E1	-3.26502E1	-3.2639E1	2.68099E1	1.20017E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01347E-1
