[Scan]
initial_time=2016-01-18T21:38:00
final_time=2016-01-18T21:38:22
ip_count=19
run=1024
dataset=8
scan=621
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.38132E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=2.00868E-9
ql3_vset=
ql3_vmon=-9.1321E0
ql3_imon=1.50132E-10
ql4_vset=
ql4_vmon=-9.14252E0
ql4_imon=-1.63794E-10
mult1=-1.07879E-8
mult2=-2.56491E-9
rf_tmon=-3.38287E-3
rf_agc=3.49378E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.66134E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=2.01335E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53971E1
cs_ef1b_imon=3.16866E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02344E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04598E1
cs_ea1_imon=1.09697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39179E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0345E1
cs_ea2_imon=1.3468E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.04685E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.26819E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.28409E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15107E1
os_ea1_imon=2.40197E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22086E0
cs_ionrep_imon=9.47729E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93496E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=1.96026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.27934E-8
tplens_vset=1.4E-1
tplens_vmon=1.63302E0
tplens_imon=-3.02951E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2653E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26176E1
iondef2_imon=1.55913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98252E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=4.02168E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=8.50395E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.16656E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49243E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2085E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.42058E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.09589E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69878E1
iondef4_imon=1.11513E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.91816E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.54043E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-7.74273E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47536E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.52181E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39351E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.68202E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.54286E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.31432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3324E1
os_fil1_imon=9.42799E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08056E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63989E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31826E1
cs_fil1_imon=7.37108E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.03023E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66497E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09261E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.00491E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22253E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.80025E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16512E-1	-7.97772E-1	-9.13193E0	-9.14278E0	4.95911E-3	9.50575E-2	2.7308E1	-3.26325E1	-3.26467E1	2.67074E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9926E-1
2.0E0	3.7E1	1.0E0	3.16E2	1.6E2	-2.09449E0	-8.16607E-1	-7.97677E-1	-9.13188E0	-9.14271E0	5.17368E-3	9.50336E-2	2.73431E1	-3.26303E1	-3.26303E1	2.6699E1	1.20106E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.98156E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-8.16512E-1	-7.9782E-1	-9.13215E0	-9.14235E0	4.93526E-3	9.51529E-2	2.73555E1	-3.26776E1	-3.26208E1	2.69223E1	1.19779E-7	2.51376E-3	2.51376E-3	6.32644E-3	3.0012E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09356E0	-8.16774E-1	-7.98154E-1	-9.13193E0	-9.14249E0	4.79221E-3	9.50575E-2	2.73069E1	-3.26461E1	-3.26124E1	2.6828E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09255E0	-8.16727E-1	-7.98249E-1	-9.13203E0	-9.14249E0	4.52995E-3	9.49144E-2	2.73466E1	-3.26524E1	-3.26218E1	2.67966E1	1.20209E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.16727E-1	-7.98178E-1	-9.13196E0	-9.14245E0	4.81606E-3	9.50575E-2	2.73429E1	-3.26723E1	-3.2617E1	2.68779E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16703E-1	-7.98225E-1	-9.13193E0	-9.14249E0	4.673E-3	9.49383E-2	2.7301E1	-3.26502E1	-3.2649E1	2.67559E1	1.20017E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.16965E-1	-7.98059E-1	-9.13167E0	-9.14249E0	4.93526E-3	9.52482E-2	2.72997E1	-3.26729E1	-3.26134E1	2.6804E1	1.19697E-7	2.52707E-3	2.52707E-3	6.29128E-3	2.98156E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16751E-1	-7.98106E-1	-9.1316E0	-9.14259E0	4.93526E-3	9.49383E-2	2.73165E1	-3.26494E1	-3.26302E1	2.69259E1	1.19861E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0934E0	-8.16488E-1	-7.98059E-1	-9.13198E0	-9.14257E0	4.76837E-3	9.49383E-2	2.73303E1	-3.26747E1	-3.26014E1	2.67613E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09286E0	-8.16798E-1	-7.97796E-1	-9.13181E0	-9.14257E0	4.88758E-3	9.51767E-2	2.73057E1	-3.2644E1	-3.26482E1	2.69253E1	1.19757E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16798E-1	-7.98011E-1	-9.13208E0	-9.14247E0	4.81606E-3	9.53674E-2	2.73117E1	-3.26404E1	-3.25942E1	2.67265E1	1.20278E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.16965E-1	-7.97796E-1	-9.13181E0	-9.14228E0	4.76837E-3	9.5439E-2	2.73399E1	-3.26838E1	-3.25841E1	2.69031E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3514E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.17013E-1	-7.98345E-1	-9.13179E0	-9.14276E0	4.64916E-3	9.50336E-2	2.73321E1	-3.26308E1	-3.26188E1	2.67677E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99175E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16774E-1	-7.98416E-1	-9.13167E0	-9.14247E0	4.81606E-3	9.48429E-2	2.73153E1	-3.26621E1	-3.26356E1	2.70833E1	1.19861E-7	2.51225E-3	2.51225E-3	6.34037E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-8.16512E-1	-7.98535E-1	-9.13181E0	-9.14221E0	5.10216E-3	9.51052E-2	2.73267E1	-3.26585E1	-3.26488E1	2.70381E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00041E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09317E0	-8.16226E-1	-7.98249E-1	-9.13191E0	-9.14254E0	4.91142E-3	9.48429E-2	2.73488E1	-3.26828E1	-3.26191E1	2.68356E1	1.20028E-7	2.51886E-3	2.51886E-3	6.3074E-3	3.01485E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.16393E-1	-7.98106E-1	-9.13174E0	-9.14276E0	4.86374E-3	9.4676E-2	2.7337E1	-3.26396E1	-3.2629E1	2.67984E1	1.20154E-7	2.51498E-3	2.51498E-3	6.33021E-3	2.97823E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16464E-1	-7.9813E-1	-9.13181E0	-9.14254E0	4.50611E-3	9.46283E-2	2.73193E1	-3.26679E1	-3.25971E1	2.67385E1	1.198E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16655E-1	-7.97987E-1	-9.1321E0	-9.14252E0	4.8399E-3	9.52244E-2	2.73075E1	-3.26176E1	-3.2653E1	2.69878E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.98665E-1
