[Scan]
initial_time=2016-01-18T21:39:01
final_time=2016-01-18T21:39:23
ip_count=19
run=1024
dataset=8
scan=623
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08716E-4
ql1_vset=
ql1_vmon=-8.16846E-1
ql1_imon=1.37256E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.9819E-9
ql3_vset=
ql3_vmon=-9.13205E0
ql3_imon=1.60861E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-1.35124E-10
mult1=-9.94508E-9
mult2=-2.78448E-9
rf_tmon=-3.65324E-3
rf_agc=3.42408E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.69476E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19647E1
lens5a_imon=2.00209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1244E2
lens4a_imon=2.05153E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5387E1
cs_ef1b_imon=3.16462E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04817E1
cs_ea1_imon=1.10662E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37138E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64736E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.33703E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84446E1
cs_ef1a_imon=3.0482E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.2689E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11338E1
os_restr1_imon=4.28087E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14851E1
os_ea1_imon=2.39815E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6367E1
os_ef1bup_imon=3.08886E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20373E0
cs_ionrep_imon=9.55129E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01966E1
cs_anode1_imon=1.9535E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.27331E-8
tplens_vset=1.4E-1
tplens_vmon=1.66031E0
tplens_imon=-1.85626E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25942E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2641E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98236E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.03136E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29044E0
ionrepsh_imon=8.5107E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33487E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13856E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51047E0
os_ea2_imon=-8.65193E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00686E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.16775E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06556E0
os_ef2alow_imon=-2.42862E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14028E-1
os_ef2bup_imon=-5.18797E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11245E1
os_restr2_imon=3.41623E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01873E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73321E1
iondef1_imon=1.11369E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68569E1
iondef4_imon=1.10067E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.90587E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.53898E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15621E0
cs_ionaccel_imon=-9.02986E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02013E2
cs_ionfocb_imon=1.47626E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5637E1
einzel_imon=7.85813E-6
window_vset=0.0E0
window_vmon=2.55334E-1
window_imon=-7.01421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.3922E-4
mask2_vset=0.0E0
mask2_vmon=-1.86471E1
mask2_imon=-6.84045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.91962E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.68437E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.13387E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64474E0
defgridb_imon=6.36228E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.42739E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0847E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63803E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31841E1
cs_fil1_imon=7.12524E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02472E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66255E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26895E-2
os_fil2_imon=-2.47805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.07081E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31025E-1
cs_fil2_imon=-2.25795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70384E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2219E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88746E-1
res40_imon=-2.34522E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.1687E-1	-7.98225E-1	-9.13196E0	-9.14247E0	4.76837E-3	9.49144E-2	2.73417E1	-3.26484E1	-3.26006E1	2.68484E1	1.19697E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.99175E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16631E-1	-7.98249E-1	-9.13177E0	-9.14245E0	4.43459E-3	9.51767E-2	2.73063E1	-3.26591E1	-3.26248E1	2.68286E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09286E0	-8.16751E-1	-7.98249E-1	-9.13196E0	-9.14233E0	5.00679E-3	9.52482E-2	2.73568E1	-3.26675E1	-3.2629E1	2.68226E1	1.19925E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99083E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09348E0	-8.16751E-1	-7.98154E-1	-9.13179E0	-9.1424E0	4.62532E-3	9.53436E-2	2.73317E1	-3.26637E1	-3.26498E1	2.68528E1	1.19902E-7	2.50989E-3	2.50989E-3	6.33977E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16917E-1	-7.98368E-1	-9.13165E0	-9.14273E0	4.52995E-3	9.50575E-2	2.7357E1	-3.26655E1	-3.26272E1	2.68172E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-8.16703E-1	-7.98059E-1	-9.13188E0	-9.14266E0	4.74453E-3	9.55105E-2	2.73284E1	-3.26291E1	-3.26278E1	2.68677E1	1.20055E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-8.16822E-1	-7.98035E-1	-9.13184E0	-9.14271E0	4.69685E-3	9.53197E-2	2.73039E1	-3.26514E1	-3.26213E1	2.68346E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09356E0	-8.1718E-1	-7.98368E-1	-9.13184E0	-9.14268E0	4.86374E-3	9.54628E-2	2.73393E1	-3.26693E1	-3.26182E1	2.68545E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.17418E-1	-7.98416E-1	-9.13186E0	-9.14254E0	4.48227E-3	9.52244E-2	2.73328E1	-3.26384E1	-3.26284E1	2.67781E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09333E0	-8.17108E-1	-7.98059E-1	-9.13205E0	-9.14221E0	4.52995E-3	9.5582E-2	2.73816E1	-3.26982E1	-3.2596E1	2.68544E1	1.20106E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.0148E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.1687E-1	-7.98106E-1	-9.13205E0	-9.14249E0	4.86374E-3	9.50575E-2	2.73305E1	-3.26608E1	-3.26213E1	2.68754E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0934E0	-8.16917E-1	-7.98416E-1	-9.13157E0	-9.14259E0	4.45843E-3	9.50336E-2	2.73033E1	-3.26603E1	-3.2611E1	2.68004E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.16584E-1	-7.98321E-1	-9.13174E0	-9.14245E0	4.62532E-3	9.53674E-2	2.72886E1	-3.26638E1	-3.26266E1	2.6843E1	1.19697E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.96634E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.1656E-1	-7.9844E-1	-9.13174E0	-9.14283E0	4.33922E-3	9.50336E-2	2.73027E1	-3.26506E1	-3.26026E1	2.68695E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.95129E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16917E-1	-7.9813E-1	-9.13165E0	-9.14271E0	4.24385E-3	9.51052E-2	2.73105E1	-3.2641E1	-3.26404E1	2.67758E1	1.19851E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.96634E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-8.16655E-1	-7.98154E-1	-9.13177E0	-9.14245E0	4.52995E-3	9.4986E-2	2.73273E1	-3.26609E1	-3.26236E1	2.6953E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.95899E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.16941E-1	-7.98273E-1	-9.13181E0	-9.14259E0	4.36306E-3	9.49383E-2	2.73363E1	-3.26302E1	-3.26182E1	2.67193E1	1.19766E-7	2.5147E-3	2.5147E-3	6.32978E-3	2.9671E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.16917E-1	-7.98297E-1	-9.13198E0	-9.14257E0	4.22001E-3	9.5129E-2	2.73219E1	-3.26374E1	-3.26008E1	2.68617E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.98665E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16774E-1	-7.98106E-1	-9.13212E0	-9.14283E0	4.17233E-3	9.54151E-2	2.73428E1	-3.26926E1	-3.26028E1	2.67648E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16846E-1	-7.9813E-1	-9.13205E0	-9.14283E0	4.14848E-3	9.50575E-2	2.73321E1	-3.2641E1	-3.25942E1	2.68569E1	1.19902E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.99686E-1
