[Scan]
initial_time=2016-01-18T21:39:31
final_time=2016-01-18T21:39:53
ip_count=19
run=1024
dataset=8
scan=624
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.16941E-1
ql1_imon=1.37314E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.9612E-9
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=1.46055E-10
ql4_vset=
ql4_vmon=-9.14242E0
ql4_imon=-1.19996E-10
mult1=-1.18282E-8
mult2=-2.96235E-9
rf_tmon=-3.05242E-3
rf_agc=3.57218E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.79044E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.28329E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19987E1
lens5a_imon=2.00324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.04883E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53833E1
cs_ef1b_imon=3.17188E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02289E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04511E1
cs_ea1_imon=1.09174E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38846E0
lens1_imon=2.78331E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64809E1
os_ef1alow_imon=2.9761E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03868E1
cs_ea2_imon=1.37687E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84349E1
cs_ef1a_imon=3.04305E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.26965E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11435E1
os_restr1_imon=4.28546E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15268E1
os_ea1_imon=2.40479E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.07457E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24256E0
cs_ionrep_imon=9.5127E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01724E1
cs_anode1_imon=1.96916E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.2765E-8
tplens_vset=1.4E-1
tplens_vmon=1.67261E0
tplens_imon=-1.51967E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26773E1
iondef3_imon=1.49634E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26968E1
iondef2_imon=1.56734E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98201E-4
ql6_vset=1.0E-1
ql6_vmon=9.47475E-2
ql6_imon=4.0687E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3049E0
ionrepsh_imon=8.67296E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33773E1
lens5b_imon=2.17348E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74741E1
cs_ef2b_imon=3.13918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50593E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00512E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.17266E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06688E0
os_ef2alow_imon=-2.4282E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93964E-1
os_ef2bup_imon=-5.07885E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1113E1
os_restr2_imon=3.41087E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.28096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01802E1
cs_anode2_imon=2.08944E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.1009E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67716E1
iondef4_imon=1.09613E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.90844E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.53605E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13598E0
cs_ionaccel_imon=-9.3746E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47452E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.83964E-6
window_vset=0.0E0
window_vmon=2.55497E-1
window_imon=-8.20692E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.3922E-4
mask2_vset=0.0E0
mask2_vmon=-1.86565E1
mask2_imon=-7.00031E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.28738E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.56597E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.03164E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50648E0
defgridb_imon=6.21862E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.42822E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07952E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63846E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31838E1
cs_fil1_imon=7.6493E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.66032E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66321E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.28683E-2
os_fil2_imon=-2.39927E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03144E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.9623E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3077E-1
cs_fil2_imon=-2.02951E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15568E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22269E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19815E-1
res40_imon=-2.36204E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16822E-1	-7.98249E-1	-9.13186E0	-9.14257E0	4.26769E-3	9.4986E-2	2.73514E1	-3.26915E1	-3.26283E1	2.69298E1	1.19991E-7	2.51498E-3	2.51498E-3	6.3131E-3	3.00251E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16703E-1	-7.98178E-1	-9.13186E0	-9.14237E0	4.17233E-3	9.49383E-2	2.72976E1	-3.26372E1	-3.26435E1	2.67764E1	1.19945E-7	2.52008E-3	2.52008E-3	6.32679E-3	2.99435E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16822E-1	-7.98535E-1	-9.13196E0	-9.14235E0	4.673E-3	9.50575E-2	2.7318E1	-3.26557E1	-3.26355E1	2.67159E1					
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16751E-1	-7.98392E-1	-9.13181E0	-9.14266E0	4.43459E-3	9.50098E-2	2.73069E1	-3.26482E1	-3.26128E1	2.69133E1	1.20099E-7	2.51823E-3	2.51823E-3	6.3074E-3	3.00532E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16798E-1	-7.98082E-1	-9.1321E0	-9.14245E0	4.673E-3	9.51529E-2	2.73341E1	-3.26457E1	-3.2626E1	2.67769E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16631E-1	-7.98202E-1	-9.13198E0	-9.14245E0	4.62532E-3	9.49383E-2	2.73027E1	-3.26705E1	-3.26386E1	2.68959E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16822E-1	-7.97892E-1	-9.13205E0	-9.14223E0	4.86374E-3	9.50098E-2	2.72973E1	-3.26633E1	-3.26392E1	2.68142E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.03545E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.16727E-1	-7.98106E-1	-9.13181E0	-9.14221E0	4.81606E-3	9.50098E-2	2.73286E1	-3.26322E1	-3.26159E1	2.67685E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.16631E-1	-7.9813E-1	-9.13181E0	-9.14221E0	4.60148E-3	9.48429E-2	2.72917E1	-3.26635E1	-3.25751E1	2.69423E1	1.19831E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.0223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16774E-1	-7.98082E-1	-9.132E0	-9.14211E0	4.79221E-3	9.49621E-2	2.72648E1	-3.26458E1	-3.26536E1	2.67619E1	1.19785E-7	2.52918E-3	2.52918E-3	6.32483E-3	3.04256E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16774E-1	-7.97987E-1	-9.13196E0	-9.14252E0	4.79221E-3	9.49621E-2	2.73168E1	-3.26563E1	-3.2636E1	2.68612E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.03976E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16703E-1	-7.97915E-1	-9.13193E0	-9.14261E0	4.50611E-3	9.50813E-2	2.73293E1	-3.26779E1	-3.26154E1	2.66871E1	1.19926E-7	2.51911E-3	2.51911E-3	6.33508E-3	3.01703E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16369E-1	-7.97868E-1	-9.13169E0	-9.14259E0	4.57764E-3	9.5129E-2	2.73357E1	-3.26561E1	-3.25996E1	2.68929E1	1.198E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
1.7E1	0.0E0	1.0E0	6.87E2	4.7E2	-2.09518E0	-8.16655E-1	-7.97939E-1	-9.13181E0	-9.14288E0	4.50611E-3	9.51767E-2	2.7337E1	-3.2649E1	-3.2616E1	2.66839E1	1.19749E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.01738E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16607E-1	-7.98225E-1	-9.13162E0	-9.14276E0	4.57764E-3	9.48429E-2	2.73712E1	-3.26873E1	-3.26104E1	2.69896E1	1.20226E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.16846E-1	-7.98106E-1	-9.13167E0	-9.1429E0	4.14848E-3	9.5129E-2	2.73321E1	-3.26476E1	-3.2629E1	2.68695E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16822E-1	-7.98202E-1	-9.13162E0	-9.14268E0	4.31538E-3	9.47237E-2	2.73099E1	-3.26711E1	-3.26128E1	2.68304E1	1.19653E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16607E-1	-7.98082E-1	-9.13191E0	-9.14252E0	4.43459E-3	9.46522E-2	2.73269E1	-3.2688E1	-3.26024E1	2.68227E1	1.19653E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.17204E-1	-7.9813E-1	-9.13217E0	-9.14261E0	4.48227E-3	9.47237E-2	2.73243E1	-3.26819E1	-3.26356E1	2.68863E1	1.19902E-7	2.50989E-3	2.50989E-3	6.32356E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16941E-1	-7.98225E-1	-9.13181E0	-9.14242E0	4.50611E-3	9.47475E-2	2.73051E1	-3.26968E1	-3.26773E1	2.67716E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.98665E-1
