[Scan]
initial_time=2016-01-18T21:40:57
final_time=2016-01-18T21:41:17
ip_count=19
run=1024
dataset=8
scan=627
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08743E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.37545E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=1.97611E-9
ql3_vset=
ql3_vmon=-9.13193E0
ql3_imon=1.73104E-10
ql4_vset=
ql4_vmon=-9.1428E0
ql4_imon=-1.36995E-10
mult1=-1.00173E-8
mult2=-1.81637E-9
rf_tmon=-9.25294E-3
rf_agc=2.98248E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.67335E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.5702E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19334E1
lens5a_imon=2.0065E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=3.15389E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04573E1
cs_ea1_imon=1.09301E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39239E0
lens1_imon=2.81894E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03582E1
cs_ea2_imon=1.34824E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.05082E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.27003E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.28337E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14873E1
os_ea1_imon=2.40125E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21004E0
cs_ionrep_imon=9.58183E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=1.97179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.27176E-8
tplens_vset=1.4E-1
tplens_vmon=1.66967E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26837E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25467E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.00423E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27012E0
ionrepsh_imon=8.70943E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33507E1
lens5b_imon=2.16837E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50865E0
os_ea2_imon=-7.93225E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.16939E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.20249E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11099E1
os_restr2_imon=3.41626E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7209E1
iondef1_imon=1.10995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6777E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.9168E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.53624E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-8.10312E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.57027E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93666E3
defgrida_imon=6.65821E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.35397E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4948E0
defgridb_imon=6.2869E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.42534E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07672E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63803E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31845E1
cs_fil1_imon=7.85161E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.0229E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66476E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.22158E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.91211E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22234E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31827E-3
inlet_lpb_pmon=2.99732E-1
chamber_ion_pmon=1.19985E-7
chamber_cvt_pmon=2.51755E-3
foreline_cvt_pmon=2.51755E-3
chamber_tmon=1.40053E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.45186E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.17013E-1	-7.98225E-1	-9.13198E0	-9.14273E0	4.55379E-3	9.5439E-2	2.73269E1	-3.26555E1	-3.2652E1	2.66808E1	1.198E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0148E-1
2.0E0	2.0E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16751E-1	-7.98392E-1	-9.1321E0	-9.14252E0	4.69685E-3	9.49383E-2	2.73087E1	-3.26188E1	-3.2605E1	2.69391E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02659E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-8.17013E-1	-7.9782E-1	-9.13205E0	-9.14278E0	4.31538E-3	9.50336E-2	2.73375E1	-3.26603E1	-3.25797E1	2.67968E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16798E-1	-7.97677E-1	-9.13198E0	-9.14268E0	4.41074E-3	9.49383E-2	2.73299E1	-3.26632E1	-3.25883E1	2.67229E1	1.198E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16631E-1	-7.97868E-1	-9.13205E0	-9.14252E0	4.50611E-3	9.49383E-2	2.73279E1	-3.26428E1	-3.26302E1	2.69127E1	1.198E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16822E-1	-7.97987E-1	-9.13227E0	-9.1429E0	4.55379E-3	9.48906E-2	2.73063E1	-3.26596E1	-3.26124E1	2.67653E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16751E-1	-7.97915E-1	-9.13196E0	-9.14271E0	4.62532E-3	9.53197E-2	2.73189E1	-3.26657E1	-3.26362E1	2.69259E1	1.19705E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16655E-1	-7.97915E-1	-9.13196E0	-9.14278E0	4.36306E-3	9.51529E-2	2.73099E1	-3.2653E1	-3.26224E1	2.67824E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16607E-1	-7.9813E-1	-9.13181E0	-9.1428E0	4.26769E-3	9.47714E-2	2.73201E1	-3.26687E1	-3.25984E1	2.68274E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-8.16965E-1	-7.97796E-1	-9.13196E0	-9.14323E0	4.31538E-3	9.47714E-2	2.72949E1	-3.26254E1	-3.26416E1	2.67932E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00824E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16631E-1	-7.97987E-1	-9.13177E0	-9.14297E0	4.48227E-3	9.4986E-2	2.73502E1	-3.2644E1	-3.26218E1	2.68538E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.16631E-1	-7.9844E-1	-9.13196E0	-9.14254E0	4.72069E-3	9.5129E-2	2.73249E1	-3.26759E1	-3.26242E1	2.67896E1	1.19607E-7	2.51136E-3	2.51136E-3	6.32418E-3	3.00144E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16631E-1	-7.97892E-1	-9.13203E0	-9.1429E0	4.62532E-3	9.50813E-2	2.73051E1	-3.26797E1	-3.26248E1	2.69133E1	1.19595E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.9892E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16894E-1	-7.9813E-1	-9.13203E0	-9.1428E0	4.3869E-3	9.50336E-2	2.73659E1	-3.26697E1	-3.26461E1	2.67607E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16941E-1	-7.97915E-1	-9.13203E0	-9.14257E0	4.33922E-3	9.53197E-2	2.73225E1	-3.26813E1	-3.26254E1	2.68977E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.17013E-1	-7.97844E-1	-9.13188E0	-9.14242E0	4.48227E-3	9.51529E-2	2.73279E1	-3.26434E1	-3.2617E1	2.67235E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.98222E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.17084E-1	-7.97772E-1	-9.132E0	-9.14285E0	4.41074E-3	9.50098E-2	2.73297E1	-3.26554E1	-3.26398E1	2.67734E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.1706E-1	-7.98011E-1	-9.13208E0	-9.14264E0	4.48227E-3	9.49621E-2	2.73196E1	-3.26474E1	-3.26463E1	2.69599E1	1.19713E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.01742E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16727E-1	-7.98082E-1	-9.13229E0	-9.14264E0	4.50611E-3	9.50336E-2	2.73171E1	-3.26476E1	-3.2602E1	2.67385E1	1.19841E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16703E-1	-7.98345E-1	-9.13193E0	-9.1428E0	4.36306E-3	9.49144E-2	2.7209E1	-3.25467E1	-3.26837E1	2.6777E1	1.19985E-7	2.51755E-3	2.51755E-3	6.31827E-3	2.99732E-1
