[Scan]
initial_time=2016-01-18T21:41:52
final_time=2016-01-18T21:42:12
ip_count=19
run=1024
dataset=8
scan=629
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.37743E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.95218E-9
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=1.52302E-10
ql4_vset=
ql4_vmon=-9.14252E0
ql4_imon=-1.54746E-10
mult1=-9.14471E-9
mult2=-3.56401E-9
rf_tmon=-8.08428E-3
rf_agc=2.79292E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.80427E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6428E0
bslens_imon=2.3337E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20105E1
lens5a_imon=2.00962E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05155E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53954E1
cs_ef1b_imon=3.16628E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02279E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04896E1
cs_ea1_imon=1.09799E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3897E0
lens1_imon=2.8369E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64802E1
os_ef1alow_imon=2.99038E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0377E1
cs_ea2_imon=1.33967E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84332E1
cs_ef1a_imon=3.04427E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.26981E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11267E1
os_restr1_imon=4.27296E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14828E1
os_ea1_imon=2.40299E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6338E1
os_ef1bup_imon=3.07833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24904E0
cs_ionrep_imon=9.38948E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.9353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=1.95892E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.27829E-8
tplens_vset=1.4E-1
tplens_vmon=1.67694E0
tplens_imon=-2.26363E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25375E1
iondef3_imon=1.50642E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27776E1
iondef2_imon=1.56592E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.9803E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.02318E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27352E0
ionrepsh_imon=8.62917E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33774E1
lens5b_imon=2.17564E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74626E1
cs_ef2b_imon=3.12811E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50064E0
os_ea2_imon=-5.05509E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71233E1
cs_ef2a_imon=3.17377E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.39467E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11355E-1
os_ef2bup_imon=-5.13424E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11136E1
os_restr2_imon=3.41591E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.27614E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01927E1
cs_anode2_imon=2.08318E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74479E1
iondef1_imon=1.09946E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66376E1
iondef4_imon=1.10711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.94633E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.52561E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16507E0
cs_ionaccel_imon=-8.48986E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47391E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5648E1
einzel_imon=7.84129E-6
window_vset=0.0E0
window_vmon=2.68122E-1
window_imon=-6.99282E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39151E-4
mask2_vset=0.0E0
mask2_vmon=-1.86438E1
mask2_imon=-6.43144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.77704E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.89553E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.28854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48935E0
defgridb_imon=6.12788E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.43225E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07972E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63978E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31864E1
cs_fil1_imon=8.15979E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.39484E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66245E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.27755E-2
os_fil2_imon=-2.43795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09057E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.07311E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29114E-1
cs_fil2_imon=-2.23211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22212E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.53031E-3
foreline_cvt_pmon=2.53031E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72909E-1
res40_imon=-2.37596E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=546
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16512E-1	-7.98178E-1	-9.132E0	-9.1424E0	4.31538E-3	9.48906E-2	2.7357E1	-3.26736E1	-3.26094E1	2.68033E1	1.19809E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01871E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16727E-1	-7.98202E-1	-9.13208E0	-9.14249E0	4.52995E-3	9.49383E-2	2.73255E1	-3.26747E1	-3.26158E1	2.68611E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32087E-3	2.99047E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16798E-1	-7.98273E-1	-9.13184E0	-9.14264E0	4.64916E-3	9.50336E-2	2.73437E1	-3.26657E1	-3.25958E1	2.68144E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99175E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16536E-1	-7.98178E-1	-9.13184E0	-9.1424E0	4.69685E-3	9.48429E-2	2.73423E1	-3.26708E1	-3.26396E1	2.69205E1	1.19967E-7	2.51345E-3	2.51345E-3	6.33297E-3	2.98937E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16584E-1	-7.97677E-1	-9.13172E0	-9.14247E0	4.48227E-3	9.51529E-2	2.73255E1	-3.26521E1	-3.2633E1	2.66722E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.1687E-1	-7.98106E-1	-9.13186E0	-9.14249E0	4.86374E-3	9.50098E-2	2.72791E1	-3.26402E1	-3.26319E1	2.69169E1	1.19883E-7	2.51838E-3	2.51838E-3	6.31879E-3	2.99981E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16727E-1	-7.98082E-1	-9.13179E0	-9.14226E0	4.62532E-3	9.46999E-2	2.73105E1	-3.26452E1	-3.26068E1	2.67914E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16607E-1	-7.98011E-1	-9.13198E0	-9.14252E0	4.64916E-3	9.52482E-2	2.73069E1	-3.26325E1	-3.25912E1	2.68337E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02922E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16655E-1	-7.98011E-1	-9.13186E0	-9.14285E0	4.64916E-3	9.51529E-2	2.73116E1	-3.26667E1	-3.26071E1	2.68106E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.98665E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16512E-1	-7.98082E-1	-9.1321E0	-9.14276E0	4.57764E-3	9.53674E-2	2.7297E1	-3.26596E1	-3.26353E1	2.68592E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.99E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16584E-1	-7.98011E-1	-9.13179E0	-9.1424E0	4.3869E-3	9.53674E-2	2.73419E1	-3.26466E1	-3.25904E1	2.66866E1	1.19831E-7	2.51265E-3	2.51265E-3	6.31779E-3	2.98276E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16774E-1	-7.97892E-1	-9.13219E0	-9.1429E0	4.52995E-3	9.52959E-2	2.72931E1	-3.26284E1	-3.26422E1	2.68827E1	1.2006E-7	2.51527E-3	2.51527E-3	6.31321E-3	2.98985E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16774E-1	-7.98321E-1	-9.13205E0	-9.14242E0	4.62532E-3	9.51767E-2	2.73153E1	-3.26651E1	-3.26404E1	2.67854E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16751E-1	-7.98059E-1	-9.13162E0	-9.14266E0	4.72069E-3	9.52721E-2	2.73106E1	-3.2664E1	-3.26132E1	2.66737E1	1.20122E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01347E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.16846E-1	-7.98345E-1	-9.13186E0	-9.14261E0	4.60148E-3	9.52721E-2	2.72786E1	-3.2662E1	-3.26419E1	2.66448E1	1.19913E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09325E0	-8.16798E-1	-7.98559E-1	-9.13186E0	-9.14264E0	4.31538E-3	9.49144E-2	2.73454E1	-3.26747E1	-3.26044E1	2.6658E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.99E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.16584E-1	-7.98273E-1	-9.13172E0	-9.14252E0	4.79221E-3	9.50098E-2	2.73159E1	-3.26729E1	-3.26422E1	2.67806E1	1.19965E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.16369E-1	-7.98512E-1	-9.13184E0	-9.14273E0	4.48227E-3	9.50575E-2	2.73139E1	-3.26638E1	-3.26366E1	2.70178E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16536E-1	-7.98488E-1	-9.13229E0	-9.14237E0	4.57764E-3	9.4986E-2	2.73225E1	-3.26693E1	-3.26206E1	2.68812E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16536E-1	-7.98321E-1	-9.13203E0	-9.14252E0	4.48227E-3	9.4986E-2	2.74479E1	-3.27776E1	-3.25375E1	2.66376E1	1.20106E-7	2.53031E-3	2.53031E-3	6.32356E-3	3.0071E-1
