[Scan]
initial_time=2016-01-18T21:42:48
final_time=2016-01-18T21:43:08
ip_count=19
run=1024
dataset=8
scan=631
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.0874E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=1.37618E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=1.97953E-9
ql3_vset=
ql3_vmon=-9.13193E0
ql3_imon=1.26827E-10
ql4_vset=
ql4_vmon=-9.14252E0
ql4_imon=-1.70934E-10
mult1=-1.06284E-8
mult2=-2.68735E-9
rf_tmon=-3.76865E-3
rf_agc=3.44241E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.68146E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63429E0
bslens_imon=2.43681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=2.00578E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05169E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=3.16506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04303E1
cs_ea1_imon=1.09661E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36595E0
lens1_imon=2.81173E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03522E1
cs_ea2_imon=1.3623E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.04505E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.25632E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.29202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15161E1
os_ea1_imon=2.40161E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23888E0
cs_ionrep_imon=9.40879E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=1.97035E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.25881E-8
tplens_vset=1.4E-1
tplens_vmon=1.70512E0
tplens_imon=-1.87592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26854E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26315E1
iondef2_imon=1.55408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98133E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.02441E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=8.38499E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.17377E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50084E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.3456E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.18553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.40905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23018E2
cs_ionfoca_imon=6.28919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.08207E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72904E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68818E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.89181E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.49044E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-8.96807E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.68399E-1
window_imon=-7.38233E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.32153E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.65821E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.33234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=6.2148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33289E1
os_fil1_imon=9.43297E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08212E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63668E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31857E1
cs_fil1_imon=8.09788E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.89385E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65894E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1184E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.14799E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.53866E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22131E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.90837E-1
res40_imon=-2.38164E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16917E-1	-7.98297E-1	-9.13198E0	-9.14257E0	4.8399E-3	9.52005E-2	2.73155E1	-3.26579E1	-3.26144E1	2.68348E1	1.19913E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00302E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16798E-1	-7.98297E-1	-9.13188E0	-9.1424E0	4.55379E-3	9.50575E-2	2.7312E1	-3.26628E1	-3.26585E1	2.68357E1	1.1969E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.02621E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-8.1718E-1	-7.98059E-1	-9.13184E0	-9.14221E0	4.55379E-3	9.53197E-2	2.73416E1	-3.26486E1	-3.26191E1	2.68312E1	1.20316E-7	2.51384E-3	2.51384E-3	6.34164E-3	3.01065E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16989E-1	-7.98345E-1	-9.13181E0	-9.1423E0	4.45843E-3	9.52005E-2	2.73243E1	-3.26669E1	-3.26458E1	2.67926E1	1.20092E-7	2.51919E-3	2.51919E-3	6.3074E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.17013E-1	-7.98464E-1	-9.13191E0	-9.14242E0	4.3869E-3	9.49383E-2	2.73293E1	-3.26673E1	-3.25942E1	2.68632E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16917E-1	-7.98154E-1	-9.13239E0	-9.14204E0	4.3869E-3	9.5129E-2	2.73075E1	-3.26759E1	-3.26404E1	2.68484E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.17108E-1	-7.97939E-1	-9.13191E0	-9.14228E0	4.24385E-3	9.48668E-2	2.73111E1	-3.2647E1	-3.25978E1	2.68532E1	1.19705E-7	2.51007E-3	2.51007E-3	6.33486E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16965E-1	-7.98035E-1	-9.13167E0	-9.14264E0	4.91142E-3	9.46045E-2	2.73316E1	-3.2606E1	-3.26065E1	2.68532E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.96671E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16846E-1	-7.98249E-1	-9.13179E0	-9.14233E0	4.50611E-3	9.49383E-2	2.73192E1	-3.2626E1	-3.26058E1	2.68184E1	1.19595E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.96634E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16751E-1	-7.98368E-1	-9.13196E0	-9.1424E0	4.74453E-3	9.49144E-2	2.72925E1	-3.26368E1	-3.2644E1	2.68635E1	1.20084E-7	2.51248E-3	2.51248E-3	6.32418E-3	2.94616E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.17037E-1	-7.98106E-1	-9.13177E0	-9.14247E0	4.79221E-3	9.51052E-2	2.73175E1	-3.26726E1	-3.26408E1	2.6819E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.96671E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.16846E-1	-7.98106E-1	-9.13174E0	-9.14242E0	4.43459E-3	9.48191E-2	2.73327E1	-3.26446E1	-3.26194E1	2.67872E1	1.20209E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.97901E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16607E-1	-7.98392E-1	-9.13169E0	-9.14221E0	4.673E-3	9.51529E-2	2.73171E1	-3.26735E1	-3.262E1	2.68538E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.1656E-1	-7.98321E-1	-9.13188E0	-9.14221E0	4.8399E-3	9.49383E-2	2.73454E1	-3.26609E1	-3.26482E1	2.67692E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16774E-1	-7.98249E-1	-9.13196E0	-9.14221E0	4.41074E-3	9.48191E-2	2.73514E1	-3.2629E1	-3.26128E1	2.68893E1	1.19925E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.00676E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16894E-1	-7.98059E-1	-9.13179E0	-9.14221E0	4.43459E-3	9.50098E-2	2.73252E1	-3.26803E1	-3.26048E1	2.68574E1	1.19697E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16917E-1	-7.98464E-1	-9.13186E0	-9.14252E0	4.95911E-3	9.50336E-2	2.72961E1	-3.26687E1	-3.26639E1	2.68827E1	1.20106E-7	2.51203E-3	2.51203E-3	6.35059E-3	3.01995E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16607E-1	-7.98202E-1	-9.13167E0	-9.14252E0	4.76837E-3	9.51767E-2	2.73333E1	-3.26633E1	-3.25852E1	2.68166E1	1.20043E-7	2.51716E-3	2.51716E-3	6.3074E-3	3.00693E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16727E-1	-7.98082E-1	-9.132E0	-9.14249E0	4.95911E-3	9.49383E-2	2.73202E1	-3.26573E1	-3.2648E1	2.67868E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16607E-1	-7.98345E-1	-9.13193E0	-9.14252E0	4.86374E-3	9.51529E-2	2.72904E1	-3.26315E1	-3.26854E1	2.68818E1	1.198E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
