[Scan]
initial_time=2016-01-18T21:43:15
final_time=2016-01-18T21:43:35
ip_count=19
run=1024
dataset=8
scan=632
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08862E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=1.37468E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=1.9852E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=1.42908E-10
ql4_vset=
ql4_vmon=-9.14228E0
ql4_imon=-1.45769E-10
mult1=-1.00693E-8
mult2=-2.92873E-9
rf_tmon=-5.50568E-3
rf_agc=3.2426E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.66988E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64726E0
bslens_imon=2.52985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1922E1
lens5a_imon=1.97317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12443E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53836E1
cs_ef1b_imon=3.16441E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.0226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04408E1
cs_ea1_imon=1.10278E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40937E0
lens1_imon=2.90047E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64739E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03665E1
cs_ea2_imon=1.36671E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84351E1
cs_ef1a_imon=3.04727E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.25602E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11479E1
os_restr1_imon=4.28307E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1515E1
os_ea1_imon=2.40369E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62856E1
os_ef1bup_imon=3.07608E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22215E0
cs_ionrep_imon=9.2908E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93506E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01952E1
cs_anode1_imon=1.96753E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.25873E-8
tplens_vset=1.4E-1
tplens_vmon=1.70133E0
tplens_imon=-3.78932E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26289E1
iondef3_imon=1.51233E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2696E1
iondef2_imon=1.56736E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98383E-4
ql6_vset=1.0E-1
ql6_vmon=9.46999E-2
ql6_imon=3.96849E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29515E0
ionrepsh_imon=8.65813E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33358E1
lens5b_imon=2.1641E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74713E1
cs_ef2b_imon=3.13971E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4973E0
os_ea2_imon=-6.74677E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00705E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.17302E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07452E0
os_ef2alow_imon=-2.45455E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10731E-1
os_ef2bup_imon=-5.12301E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11223E1
os_restr2_imon=3.41591E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.28131E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01778E1
cs_anode2_imon=2.08692E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73176E1
iondef1_imon=1.10578E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68337E1
iondef4_imon=1.10599E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.95794E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.4909E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12702E0
cs_ionaccel_imon=-8.2653E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47466E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56536E1
einzel_imon=7.82632E-6
window_vset=0.0E0
window_vmon=2.43795E-1
window_imon=-7.74134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39144E-4
mask2_vset=0.0E0
mask2_vmon=-1.86294E1
mask2_imon=-5.9449E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.70351E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.5954E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.59869E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42123E0
defgridb_imon=6.3371E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33262E1
os_fil1_imon=9.41416E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63562E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31866E1
cs_fil1_imon=7.94771E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.85019E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65902E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20174E-2
os_fil2_imon=-2.50032E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0781E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.11447E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31669E-1
cs_fil2_imon=-2.15102E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51047E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22196E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.97901E-1
chamber_ion_pmon=1.19544E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.08038E-1
res40_imon=-2.34976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16751E-1	-7.98059E-1	-9.13219E0	-9.14233E0	4.98295E-3	9.5129E-2	2.73315E1	-3.26386E1	-3.26092E1	2.69055E1	1.19775E-7	2.51952E-3	2.51952E-3	6.3074E-3	3.00522E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16679E-1	-7.98202E-1	-9.13177E0	-9.1424E0	4.81606E-3	9.48191E-2	2.73303E1	-3.26579E1	-3.26176E1	2.68064E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.1656E-1	-7.98178E-1	-9.13167E0	-9.14257E0	4.74453E-3	9.48191E-2	2.73155E1	-3.26642E1	-3.26422E1	2.68447E1	1.20226E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01609E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.1687E-1	-7.98035E-1	-9.13193E0	-9.14259E0	4.79221E-3	9.50575E-2	2.73263E1	-3.26573E1	-3.26596E1	2.67992E1	1.1979E-7	2.51919E-3	2.51919E-3	6.29157E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16822E-1	-7.9813E-1	-9.13198E0	-9.14254E0	4.64916E-3	9.51529E-2	2.73159E1	-3.26621E1	-3.26338E1	2.6825E1	1.20069E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.03976E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.16846E-1	-7.98035E-1	-9.13224E0	-9.14245E0	4.86374E-3	9.49383E-2	2.73195E1	-3.26801E1	-3.26543E1	2.68448E1	1.19953E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.16798E-1	-7.98225E-1	-9.13172E0	-9.14252E0	4.55379E-3	9.47475E-2	2.73145E1	-3.26502E1	-3.26236E1	2.68453E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.16798E-1	-7.97987E-1	-9.13181E0	-9.14245E0	4.76837E-3	9.48191E-2	2.73093E1	-3.26194E1	-3.26086E1	2.68394E1	1.19953E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16679E-1	-7.98035E-1	-9.13184E0	-9.14252E0	4.52995E-3	9.50813E-2	2.73181E1	-3.26284E1	-3.26054E1	2.67938E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.16703E-1	-7.98011E-1	-9.13196E0	-9.14268E0	4.673E-3	9.47952E-2	2.72916E1	-3.26327E1	-3.26303E1	2.68154E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01738E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.16584E-1	-7.98202E-1	-9.13181E0	-9.14257E0	4.76837E-3	9.47952E-2	2.73339E1	-3.26609E1	-3.26026E1	2.68677E1	1.19978E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.01742E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16679E-1	-7.98035E-1	-9.13196E0	-9.14223E0	4.48227E-3	9.4676E-2	2.72949E1	-3.26428E1	-3.26374E1	2.68172E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16631E-1	-7.98035E-1	-9.13191E0	-9.14254E0	4.86374E-3	9.47952E-2	2.73434E1	-3.26803E1	-3.26089E1	2.68394E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16679E-1	-7.98082E-1	-9.13177E0	-9.14226E0	4.3869E-3	9.49383E-2	2.7352E1	-3.26609E1	-3.2608E1	2.6852E1	1.19902E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.99941E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16488E-1	-7.98082E-1	-9.132E0	-9.14249E0	4.22001E-3	9.47237E-2	2.73315E1	-3.26506E1	-3.26284E1	2.68364E1	1.19965E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01871E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16488E-1	-7.97796E-1	-9.13157E0	-9.14245E0	4.43459E-3	9.50575E-2	2.73225E1	-3.26573E1	-3.26549E1	2.68364E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16703E-1	-7.97915E-1	-9.13188E0	-9.14252E0	4.22001E-3	9.48191E-2	2.73446E1	-3.26596E1	-3.26054E1	2.67879E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16822E-1	-7.97868E-1	-9.13193E0	-9.14226E0	4.55379E-3	9.4676E-2	2.73075E1	-3.2638E1	-3.26663E1	2.68683E1	1.19851E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.97647E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16798E-1	-7.98178E-1	-9.13205E0	-9.14245E0	4.57764E-3	9.46522E-2	2.72998E1	-3.26272E1	-3.26272E1	2.68298E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16512E-1	-7.97915E-1	-9.13165E0	-9.14228E0	4.52995E-3	9.46999E-2	2.73176E1	-3.2696E1	-3.26289E1	2.68337E1	1.19544E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.97901E-1
