[Scan]
initial_time=2016-01-18T21:45:05
final_time=2016-01-18T21:45:25
ip_count=19
run=1024
dataset=8
scan=636
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08715E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.37613E-8
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=2.01464E-9
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=1.35136E-10
ql4_vset=
ql4_vmon=-9.14228E0
ql4_imon=-1.68371E-10
mult1=-9.91312E-9
mult2=-2.73698E-9
rf_tmon=-4.40329E-3
rf_agc=3.46305E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.69252E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70339E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19364E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04855E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=3.15893E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02363E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=1.09733E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40801E0
lens1_imon=2.72881E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03774E1
cs_ea2_imon=1.35473E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.0537E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.25607E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15366E1
os_ea1_imon=2.41134E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=9.63591E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01509E1
cs_anode1_imon=1.95917E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.25576E-8
tplens_vset=1.4E-1
tplens_vmon=1.63903E0
tplens_imon=-3.9668E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26201E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26343E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.00286E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30317E0
ionrepsh_imon=8.60489E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50144E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00753E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.37804E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16645E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1137E1
os_restr2_imon=3.41518E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.28919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.09504E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.11175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68302E1
iondef4_imon=1.10251E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.91496E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.48499E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-8.67976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.86083E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-6.73362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.32874E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.73752E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.32513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47976E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.43772E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07629E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63409E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31841E1
cs_fil1_imon=7.63537E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.15504E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65929E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1184E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.24744E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.25111E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14823E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22086E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.61404E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.16512E-1	-7.9782E-1	-9.132E0	-9.14266E0	4.29153E-3	9.50098E-2	2.73358E1	-3.26655E1	-3.26384E1	2.68441E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01347E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09356E0	-8.16798E-1	-7.98106E-1	-9.13198E0	-9.14271E0	4.31538E-3	9.5129E-2	2.73357E1	-3.26549E1	-3.26182E1	2.68412E1	1.19841E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.00348E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16488E-1	-7.97963E-1	-9.13196E0	-9.14233E0	4.41074E-3	9.48906E-2	2.7348E1	-3.26868E1	-3.26254E1	2.68493E1	1.19978E-7	2.51915E-3	2.51915E-3	6.34099E-3	2.99879E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16464E-1	-7.97915E-1	-9.13208E0	-9.1424E0	4.43459E-3	9.48668E-2	2.73641E1	-3.26697E1	-3.26325E1	2.67836E1	1.1974E-7	2.51287E-3	2.51287E-3	6.31798E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16703E-1	-7.97653E-1	-9.13184E0	-9.1424E0	4.17233E-3	9.47475E-2	2.73339E1	-3.26634E1	-3.26229E1	2.68202E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.1656E-1	-7.97749E-1	-9.13181E0	-9.14233E0	4.19617E-3	9.50098E-2	2.72968E1	-3.26484E1	-3.26189E1	2.6837E1	1.19819E-7	2.51581E-3	2.51581E-3	6.30182E-3	3.02277E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16488E-1	-7.9782E-1	-9.1321E0	-9.14257E0	4.17233E-3	9.49621E-2	2.73087E1	-3.26873E1	-3.26458E1	2.68916E1	1.20209E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.16417E-1	-7.97725E-1	-9.13217E0	-9.14247E0	4.24385E-3	9.47237E-2	2.73128E1	-3.26372E1	-3.26484E1	2.68262E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16393E-1	-7.98202E-1	-9.13217E0	-9.14245E0	4.43459E-3	9.47475E-2	2.73123E1	-3.26338E1	-3.26272E1	2.68148E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16798E-1	-7.9782E-1	-9.13191E0	-9.1424E0	4.22001E-3	9.50098E-2	2.72919E1	-3.26759E1	-3.26188E1	2.68563E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.16441E-1	-7.9813E-1	-9.13205E0	-9.14254E0	4.43459E-3	9.50098E-2	2.73255E1	-3.26579E1	-3.26278E1	2.68442E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16774E-1	-7.98154E-1	-9.13188E0	-9.14252E0	4.52995E-3	9.48906E-2	2.73198E1	-3.2662E1	-3.26018E1	2.68274E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.99E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16774E-1	-7.9813E-1	-9.13174E0	-9.14252E0	4.673E-3	9.51052E-2	2.73417E1	-3.27041E1	-3.26188E1	2.68401E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3514E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16655E-1	-7.98345E-1	-9.13188E0	-9.1424E0	4.72069E-3	9.52005E-2	2.73399E1	-3.26603E1	-3.26212E1	2.67845E1	1.20311E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.9892E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16751E-1	-7.98297E-1	-9.13203E0	-9.14233E0	4.86374E-3	9.4986E-2	2.73117E1	-3.26645E1	-3.26368E1	2.6849E1	1.19757E-7	2.51116E-3	2.51116E-3	6.28006E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.16751E-1	-7.98249E-1	-9.13172E0	-9.14266E0	4.55379E-3	9.48668E-2	2.73165E1	-3.26554E1	-3.26344E1	2.68229E1	1.19705E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9952E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16941E-1	-7.97844E-1	-9.13181E0	-9.14237E0	4.64916E-3	9.5129E-2	2.73293E1	-3.26608E1	-3.26396E1	2.68294E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02922E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16607E-1	-7.98035E-1	-9.13196E0	-9.14218E0	4.64916E-3	9.4986E-2	2.73099E1	-3.26362E1	-3.2608E1	2.68623E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16846E-1	-7.98035E-1	-9.13179E0	-9.14202E0	4.673E-3	9.49621E-2	2.73299E1	-3.26526E1	-3.26225E1	2.67938E1	1.20363E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16464E-1	-7.97796E-1	-9.13169E0	-9.14228E0	4.31538E-3	9.48906E-2	2.73381E1	-3.26343E1	-3.26201E1	2.68302E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
