[Scan]
initial_time=2016-01-18T21:50:40
final_time=2016-01-18T21:51:00
ip_count=19
run=1024
dataset=9
scan=642
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08744E-4
ql1_vset=
ql1_vmon=-7.56288E-1
ql1_imon=1.39196E-8
ql2_vset=
ql2_vmon=-7.34806E-1
ql2_imon=1.97262E-9
ql3_vset=
ql3_vmon=-9.19509E0
ql3_imon=9.57608E-11
ql4_vset=
ql4_vmon=-9.19056E0
ql4_imon=-1.32596E-10
mult1=-9.77126E-9
mult2=-2.69582E-9
rf_tmon=-4.3502E-3
rf_agc=3.37456E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.69313E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65871E0
bslens_imon=2.60183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19523E1
lens5a_imon=1.99272E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05192E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54029E1
cs_ef1b_imon=2.79202E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.0207E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04755E1
cs_ea1_imon=2.50143E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3597E0
lens1_imon=2.59815E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64858E1
os_ef1alow_imon=2.97466E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.50385E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84438E1
cs_ef1a_imon=2.92788E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.27744E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11373E1
os_restr1_imon=4.26735E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14896E1
os_ea1_imon=2.39051E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63417E1
os_ef1bup_imon=3.07608E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25087E0
cs_ionrep_imon=1.2012E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93563E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0199E1
cs_anode1_imon=2.99225E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.27779E-8
tplens_vset=1.4E-1
tplens_vmon=1.64755E0
tplens_imon=-3.5859E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25847E1
iondef3_imon=1.5145E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26319E1
iondef2_imon=1.55564E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98166E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=3.97154E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33107E0
ionrepsh_imon=1.80063E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33413E1
lens5b_imon=2.15764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7462E1
cs_ef2b_imon=3.12399E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52451E0
os_ea2_imon=-8.87497E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00546E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71364E1
cs_ef2a_imon=3.15543E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06329E0
os_ef2alow_imon=-2.51818E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85157E-1
os_ef2bup_imon=-5.21658E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11229E1
os_restr2_imon=3.40768E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.26365E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.25234E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73287E1
iondef1_imon=1.09689E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67656E1
iondef4_imon=1.08915E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.88505E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.58453E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.88568E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47357E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.75521E-6
window_vset=0.0E0
window_vmon=2.68745E-1
window_imon=-8.82669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-7.1051E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.36567E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.55394E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.16366E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41274E0
defgridb_imon=5.96994E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.42975E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06974E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64288E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30919E1
cs_fil1_imon=1.00483E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63214E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65624E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.81763E-2
os_fil2_imon=-2.67498E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96582E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75266E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37047E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.93146E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22413E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33188E-3
inlet_lpb_pmon=3.00766E-1
chamber_ion_pmon=1.20036E-7
chamber_cvt_pmon=2.5208E-3
foreline_cvt_pmon=2.5208E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.86206E-1
res40_imon=-2.51818E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=190
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-7.5655E-1	-7.34687E-1	-9.19497E0	-9.1898E0	4.81606E-3	9.48906E-2	2.73405E1	-3.26789E1	-3.2602E1	2.68482E1	1.19819E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00942E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.56431E-1	-7.34854E-1	-9.19497E0	-9.18982E0	4.86374E-3	9.49383E-2	2.73287E1	-3.26661E1	-3.26667E1	2.68412E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-7.56502E-1	-7.34925E-1	-9.19507E0	-9.1902E0	5.126E-3	9.50813E-2	2.73428E1	-3.26803E1	-3.26325E1	2.68851E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02659E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-7.56311E-1	-7.34925E-1	-9.19523E0	-9.19001E0	4.76837E-3	9.52005E-2	2.7344E1	-3.26537E1	-3.2639E1	2.68574E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-7.5624E-1	-7.35211E-1	-9.19511E0	-9.18994E0	4.26769E-3	9.50336E-2	2.7332E1	-3.26872E1	-3.2645E1	2.68082E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-7.56097E-1	-7.35211E-1	-9.19526E0	-9.19006E0	4.17233E-3	9.4986E-2	2.72919E1	-3.26747E1	-3.26344E1	2.68112E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-7.56025E-1	-7.34925E-1	-9.19492E0	-9.18977E0	4.60148E-3	9.49144E-2	2.73263E1	-3.26673E1	-3.26278E1	2.6831E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-7.56216E-1	-7.34949E-1	-9.19502E0	-9.18996E0	4.57764E-3	9.51052E-2	2.73099E1	-3.26609E1	-3.2608E1	2.684E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-7.56168E-1	-7.34544E-1	-9.19507E0	-9.19006E0	4.45843E-3	9.51767E-2	2.73069E1	-3.26807E1	-3.26242E1	2.68707E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-7.56121E-1	-7.34806E-1	-9.19499E0	-9.18987E0	4.52995E-3	9.48191E-2	2.72937E1	-3.265E1	-3.26344E1	2.6801E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.99E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-7.56311E-1	-7.34997E-1	-9.19514E0	-9.1902E0	4.19617E-3	9.47475E-2	2.73261E1	-3.26957E1	-3.2605E1	2.68767E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.97704E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-7.56383E-1	-7.34878E-1	-9.19509E0	-9.18992E0	4.33922E-3	9.49621E-2	2.73147E1	-3.2632E1	-3.25966E1	2.67944E1	1.19809E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-7.56192E-1	-7.34806E-1	-9.19518E0	-9.18989E0	4.3869E-3	9.47475E-2	2.73243E1	-3.26543E1	-3.26549E1	2.6843E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-7.56359E-1	-7.34973E-1	-9.19511E0	-9.19008E0	4.3869E-3	9.51767E-2	2.73411E1	-3.26596E1	-3.26449E1	2.68477E1	1.20174E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01871E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.56311E-1	-7.34663E-1	-9.19487E0	-9.18987E0	4.69685E-3	9.52244E-2	2.73255E1	-3.26573E1	-3.26062E1	2.68489E1	1.19902E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-7.56264E-1	-7.34687E-1	-9.19485E0	-9.18999E0	4.88758E-3	9.52005E-2	2.73078E1	-3.26629E1	-3.26073E1	2.6849E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-7.56478E-1	-7.35021E-1	-9.19502E0	-9.18996E0	4.55379E-3	9.52959E-2	2.73311E1	-3.26701E1	-3.26507E1	2.68218E1	1.1986E-7	2.51723E-3	2.51723E-3	6.30239E-3	2.99577E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-7.56288E-1	-7.35021E-1	-9.19518E0	-9.18999E0	4.52995E-3	9.50336E-2	2.72833E1	-3.26095E1	-3.26431E1	2.68053E1	1.1995E-7	2.51758E-3	2.51758E-3	6.3074E-3	2.9871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-7.56526E-1	-7.34687E-1	-9.19502E0	-9.18996E0	4.69685E-3	9.47952E-2	2.73297E1	-3.26326E1	-3.26543E1	2.68647E1	1.2033E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-7.56288E-1	-7.34806E-1	-9.19509E0	-9.19056E0	4.88758E-3	9.4986E-2	2.73287E1	-3.26319E1	-3.25847E1	2.67656E1	1.20036E-7	2.5208E-3	2.5208E-3	6.33188E-3	3.00766E-1
