[Scan]
initial_time=2016-01-18T21:51:07
final_time=2016-01-18T21:51:27
ip_count=19
run=1024
dataset=9
scan=643
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-7.56574E-1
ql1_imon=1.40386E-8
ql2_vset=
ql2_vmon=-7.34639E-1
ql2_imon=1.96755E-9
ql3_vset=
ql3_vmon=-9.19521E0
ql3_imon=1.15037E-10
ql4_vset=
ql4_vmon=-9.1902E0
ql4_imon=-1.28531E-10
mult1=-9.88011E-9
mult2=-2.71379E-9
rf_tmon=-4.4053E-3
rf_agc=3.33712E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.7465E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64871E0
bslens_imon=2.35029E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19604E1
lens5a_imon=1.99821E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54139E1
cs_ef1b_imon=2.79061E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.01984E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04519E1
cs_ea1_imon=2.50255E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36174E0
lens1_imon=2.73602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.96504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03378E1
cs_ea2_imon=1.49027E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.91927E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.25389E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.26679E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.39656E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.18818E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.96072E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.25007E-8
tplens_vset=1.4E-1
tplens_vmon=1.67448E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2678E1
iondef3_imon=1.48595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98043E-4
ql6_vset=1.0E-1
ql6_vmon=9.47475E-2
ql6_imon=4.02598E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=1.78876E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.1525E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48702E0
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11304E1
os_restr2_imon=3.40184E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73216E1
iondef1_imon=1.09986E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.91133E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.46326E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=2.55184E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.17012E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.16073E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.42246E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.576E0
defgridb_imon=5.98769E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.42432E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07371E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63481E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=1.00312E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63753E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64712E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6283E-2
os_fil2_imon=-2.76808E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.30782E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.37668E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22087E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29237E-3
inlet_lpb_pmon=3.00054E-1
chamber_ion_pmon=1.1986E-7
chamber_cvt_pmon=2.52123E-3
foreline_cvt_pmon=2.52123E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.76421E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-7.56431E-1	-7.34687E-1	-9.19523E0	-9.18975E0	4.81606E-3	9.49144E-2	2.7308E1	-3.26396E1	-3.26077E1	2.68679E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-7.56359E-1	-7.34925E-1	-9.19516E0	-9.18999E0	4.50611E-3	9.50336E-2	2.73634E1	-3.26561E1	-3.2605E1	2.68232E1	1.20142E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-7.56359E-1	-7.34782E-1	-9.19476E0	-9.18989E0	4.62532E-3	9.50098E-2	2.73252E1	-3.26467E1	-3.26579E1	2.68296E1	1.19925E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.00144E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-7.56359E-1	-7.34854E-1	-9.19502E0	-9.19008E0	4.69685E-3	9.49144E-2	2.73243E1	-3.26603E1	-3.26512E1	2.68244E1	1.198E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-7.56383E-1	-7.34472E-1	-9.19511E0	-9.19015E0	4.45843E-3	9.52959E-2	2.73159E1	-3.2641E1	-3.26554E1	2.68761E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.56502E-1	-7.34544E-1	-9.19483E0	-9.19027E0	4.45843E-3	9.50336E-2	2.72962E1	-3.26691E1	-3.26738E1	2.68593E1	1.19978E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.02277E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-7.56478E-1	-7.34758E-1	-9.19518E0	-9.18996E0	4.74453E-3	9.50575E-2	2.73222E1	-3.26615E1	-3.26138E1	2.6807E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.5655E-1	-7.34639E-1	-9.1953E0	-9.18996E0	4.64916E-3	9.48906E-2	2.73163E1	-3.26425E1	-3.26419E1	2.68454E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-7.56359E-1	-7.34568E-1	-9.19499E0	-9.19023E0	4.81606E-3	9.50575E-2	2.73437E1	-3.26474E1	-3.2615E1	2.68683E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-7.56288E-1	-7.34282E-1	-9.19497E0	-9.19015E0	4.26769E-3	9.48906E-2	2.73169E1	-3.26644E1	-3.26313E1	2.68611E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-7.56168E-1	-7.34878E-1	-9.19485E0	-9.18999E0	4.673E-3	9.44853E-2	2.73123E1	-3.26783E1	-3.2647E1	2.68094E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-7.56741E-1	-7.35188E-1	-9.19499E0	-9.18999E0	4.36306E-3	9.46283E-2	2.73237E1	-3.26771E1	-3.26236E1	2.68388E1	1.19757E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-7.56478E-1	-7.35021E-1	-9.1949E0	-9.19015E0	4.62532E-3	9.49144E-2	2.73381E1	-3.265E1	-3.26332E1	2.68406E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-7.56526E-1	-7.34758E-1	-9.19468E0	-9.19039E0	4.60148E-3	9.47952E-2	2.73411E1	-3.26621E1	-3.26206E1	2.68581E1	1.198E-7	2.52061E-3	2.52061E-3	6.28056E-3	3.00197E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-7.56502E-1	-7.34711E-1	-9.19516E0	-9.19023E0	4.72069E-3	9.4676E-2	2.7361E1	-3.26645E1	-3.26344E1	2.68512E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-7.5655E-1	-7.34949E-1	-9.1948E0	-9.19013E0	4.93526E-3	9.49383E-2	2.73159E1	-3.26747E1	-3.26218E1	2.68325E1	1.20084E-7	2.51804E-3	2.51804E-3	6.29067E-3	3.0041E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-7.56764E-1	-7.34758E-1	-9.19495E0	-9.19023E0	4.86374E-3	9.47952E-2	2.73472E1	-3.26506E1	-3.26837E1	2.6835E1	1.20055E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09356E0	-7.56574E-1	-7.34782E-1	-9.19523E0	-9.18984E0	4.86374E-3	9.49144E-2	2.72338E1	-3.26619E1	-3.27772E1	2.68007E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99879E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-7.56407E-1	-7.34568E-1	-9.19514E0	-9.18992E0	4.81606E-3	9.47952E-2	2.73161E1	-3.2642E1	-3.26134E1	2.68482E1	1.1979E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.97593E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-7.56574E-1	-7.34639E-1	-9.19521E0	-9.1902E0	4.69685E-3	9.47475E-2	2.73216E1	-3.26591E1	-3.2678E1	2.6783E1	1.1986E-7	2.52123E-3	2.52123E-3	6.29237E-3	3.00054E-1
