[Scan]
initial_time=2016-01-18T21:53:22
final_time=2016-01-18T21:53:41
ip_count=19
run=1024
dataset=9
scan=648
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-7.56192E-1
ql1_imon=1.39621E-8
ql2_vset=
ql2_vmon=-7.3452E-1
ql2_imon=1.97879E-9
ql3_vset=
ql3_vmon=-9.19495E0
ql3_imon=1.12414E-10
ql4_vset=
ql4_vmon=-9.18996E0
ql4_imon=-1.54638E-10
mult1=-9.32203E-9
mult2=-2.75853E-9
rf_tmon=-4.64515E-3
rf_agc=3.24125E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.69163E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64892E0
bslens_imon=2.37043E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1959E1
lens5a_imon=2.00815E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.04865E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53967E1
cs_ef1b_imon=2.77144E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02018E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04155E1
cs_ea1_imon=2.51612E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3444E0
lens1_imon=2.69365E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.97054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0396E1
cs_ea2_imon=1.50275E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84425E1
cs_ef1a_imon=2.91777E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.25454E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1136E1
os_restr1_imon=4.27932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14773E1
os_ea1_imon=2.4085E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63436E1
os_ef1bup_imon=3.06897E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24843E0
cs_ionrep_imon=1.1854E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01952E1
cs_anode1_imon=2.94771E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.25105E-8
tplens_vset=1.4E-1
tplens_vmon=1.68184E0
tplens_imon=-1.12501E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26431E1
iondef3_imon=1.48255E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26537E1
iondef2_imon=1.56592E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98147E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=4.03672E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2974E0
ionrepsh_imon=1.75618E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33805E1
lens5b_imon=2.18225E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74713E1
cs_ef2b_imon=3.11912E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47492E0
os_ea2_imon=-7.47925E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00505E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71127E1
cs_ef2a_imon=3.1588E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06017E0
os_ef2alow_imon=-2.45081E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05741E-1
os_ef2bup_imon=-5.3588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.39233E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.26769E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02021E1
cs_anode2_imon=2.2385E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.10056E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68435E1
iondef4_imon=1.09139E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.88681E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.45869E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1239E0
cs_ionaccel_imon=-1.75469E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47443E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56349E1
einzel_imon=7.70655E-6
window_vset=0.0E0
window_vmon=2.68745E-1
window_imon=-8.63956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86126E1
mask2_imon=-7.32966E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.6742E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.73759E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50082E3
multb_neg_imon=7.56401E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42194E0
defgridb_imon=6.22705E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33352E1
os_fil1_imon=9.41771E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0645E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63573E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30947E1
cs_fil1_imon=1.00118E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62765E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64726E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7782E-2
os_fil2_imon=-2.69993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04067E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.1913E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37047E-1
cs_fil2_imon=-2.5128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.61562E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22184E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31555E-3
inlet_lpb_pmon=2.99346E-1
chamber_ion_pmon=1.19985E-7
chamber_cvt_pmon=2.51918E-3
foreline_cvt_pmon=2.51918E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.74355E-1
res40_imon=-2.49198E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.56502E-1	-7.34258E-1	-9.19535E0	-9.18975E0	4.673E-3	9.55105E-2	2.73782E1	-3.26791E1	-3.26024E1	2.68499E1	1.20084E-7	2.51693E-3	2.51693E-3	6.29624E-3	3.01209E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-7.56478E-1	-7.34615E-1	-9.19528E0	-9.18989E0	4.8399E-3	9.53197E-2	2.73253E1	-3.26236E1	-3.26927E1	2.68475E1	1.20158E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-7.56669E-1	-7.34496E-1	-9.19492E0	-9.18965E0	4.50611E-3	9.53197E-2	2.73316E1	-3.27003E1	-3.25977E1	2.68053E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-7.56741E-1	-7.34758E-1	-9.19545E0	-9.18999E0	4.3869E-3	9.50575E-2	2.73535E1	-3.26708E1	-3.26136E1	2.68328E1	1.19697E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-7.56836E-1	-7.34687E-1	-9.19535E0	-9.18965E0	4.24385E-3	9.49383E-2	2.73015E1	-3.27023E1	-3.26338E1	2.68238E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.56717E-1	-7.34687E-1	-9.19516E0	-9.18989E0	4.52995E-3	9.52244E-2	2.72929E1	-3.26689E1	-3.26272E1	2.68496E1	1.20017E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-7.56454E-1	-7.34806E-1	-9.19509E0	-9.19011E0	4.86374E-3	9.48429E-2	2.73216E1	-3.26402E1	-3.26343E1	2.68334E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-7.56526E-1	-7.34735E-1	-9.19509E0	-9.18994E0	4.45843E-3	9.51529E-2	2.73157E1	-3.26644E1	-3.2659E1	2.68175E1	1.19757E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-7.56598E-1	-7.35068E-1	-9.19509E0	-9.1902E0	4.36306E-3	9.54151E-2	2.73189E1	-3.26783E1	-3.25311E1	2.68118E1	1.19851E-7	2.51632E-3	2.51632E-3	6.28592E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09333E0	-7.56621E-1	-7.34878E-1	-9.19483E0	-9.19037E0	4.76837E-3	9.51529E-2	2.73528E1	-3.27123E1	-3.26383E1	2.69103E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-7.56502E-1	-7.34568E-1	-9.19454E0	-9.19003E0	4.17233E-3	9.50813E-2	2.73653E1	-3.26543E1	-3.26449E1	2.6843E1	1.20122E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-7.56407E-1	-7.34639E-1	-9.19514E0	-9.18982E0	4.36306E-3	9.52482E-2	2.73009E1	-3.26597E1	-3.26554E1	2.67758E1	1.19861E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-7.56121E-1	-7.34806E-1	-9.19507E0	-9.18996E0	4.33922E-3	9.49383E-2	2.73081E1	-3.26579E1	-3.26494E1	2.68851E1	1.20106E-7	2.52276E-3	2.52276E-3	6.2752E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-7.55882E-1	-7.34878E-1	-9.19499E0	-9.18996E0	4.50611E-3	9.5129E-2	2.73027E1	-3.26644E1	-3.26018E1	2.68232E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-7.55763E-1	-7.35188E-1	-9.19497E0	-9.18984E0	4.43459E-3	9.54151E-2	2.73117E1	-3.2644E1	-3.265E1	2.67523E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-7.56025E-1	-7.3483E-1	-9.19538E0	-9.18975E0	4.52995E-3	9.52005E-2	2.73309E1	-3.26543E1	-3.26284E1	2.68605E1	1.19713E-7	2.51804E-3	2.51804E-3	6.29067E-3	2.99879E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.56335E-1	-7.34735E-1	-9.19528E0	-9.1898E0	4.43459E-3	9.49621E-2	2.7311E1	-3.26508E1	-3.26897E1	2.67792E1	1.19902E-7	2.52599E-3	2.52599E-3	6.30202E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-7.5624E-1	-7.34806E-1	-9.19542E0	-9.19018E0	4.52995E-3	9.5129E-2	2.73493E1	-3.26608E1	-3.25004E1	2.68136E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01738E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-7.56192E-1	-7.34663E-1	-9.19516E0	-9.18982E0	4.55379E-3	9.51052E-2	2.73261E1	-3.2623E1	-3.26669E1	2.6855E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.98481E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.56192E-1	-7.3452E-1	-9.19495E0	-9.18996E0	4.31538E-3	9.48191E-2	2.73016E1	-3.26537E1	-3.26431E1	2.68435E1	1.19985E-7	2.51918E-3	2.51918E-3	6.31555E-3	2.99346E-1
