[Scan]
initial_time=2016-01-18T21:53:48
final_time=2016-01-18T21:54:08
ip_count=19
run=1024
dataset=9
scan=649
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-7.56216E-1
ql1_imon=1.4E-8
ql2_vset=
ql2_vmon=-7.34735E-1
ql2_imon=1.99515E-9
ql3_vset=
ql3_vmon=-9.19502E0
ql3_imon=9.71675E-11
ql4_vset=
ql4_vmon=-9.1902E0
ql4_imon=-1.57797E-10
mult1=-1.00641E-8
mult2=-2.5999E-9
rf_tmon=-3.42584E-3
rf_agc=3.41793E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.70995E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54097E1
cs_ef1b_imon=2.79457E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04189E1
cs_ea1_imon=2.54256E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36895E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.48811E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.90558E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.25508E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11646E1
os_restr1_imon=4.27544E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.38827E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62896E1
os_ef1bup_imon=3.06379E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=1.19106E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02073E1
cs_anode1_imon=2.92612E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.25828E-8
tplens_vset=1.4E-1
tplens_vmon=1.64263E0
tplens_imon=-3.93075E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26034E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27172E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.9805E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=3.98552E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30317E0
ionrepsh_imon=1.76281E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48402E0
os_ea2_imon=-5.98557E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.15425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31061E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11436E1
os_restr2_imon=3.41337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23012E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.24317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68556E1
iondef4_imon=1.07404E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.88679E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.47002E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.53831E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47118E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.47376E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82682E2
mask1_imon=2.38951E-4
mask2_vset=0.0E0
mask2_vmon=-1.86038E1
mask2_imon=-5.25599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.41886E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.82765E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.80602E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41359E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.4239E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07624E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63623E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=1.00086E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62792E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65052E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.79597E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.20857E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22246E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31902E-3
inlet_lpb_pmon=2.99811E-1
chamber_ion_pmon=1.2006E-7
chamber_cvt_pmon=2.51874E-3
foreline_cvt_pmon=2.51874E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.71906E-1
res40_imon=-2.76727E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.56526E-1	-7.34687E-1	-9.19528E0	-9.19001E0	4.48227E-3	9.50098E-2	2.73281E1	-3.26649E1	-3.26425E1	2.68913E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-7.56311E-1	-7.34568E-1	-9.1953E0	-9.18956E0	4.31538E-3	9.48668E-2	2.73165E1	-3.26308E1	-3.26266E1	2.6851E1	1.19891E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-7.56431E-1	-7.34735E-1	-9.19535E0	-9.18975E0	4.36306E-3	9.48429E-2	2.73482E1	-3.26549E1	-3.26065E1	2.6858E1	1.20031E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.0201E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-7.56598E-1	-7.34639E-1	-9.19514E0	-9.18996E0	4.48227E-3	9.4986E-2	2.73063E1	-3.26773E1	-3.26561E1	2.68256E1	1.20142E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-7.56526E-1	-7.34234E-1	-9.1953E0	-9.18994E0	4.72069E-3	9.4533E-2	2.73168E1	-3.26453E1	-3.26128E1	2.68305E1	1.19653E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-7.56478E-1	-7.34401E-1	-9.19542E0	-9.18996E0	4.55379E-3	9.46999E-2	2.73339E1	-3.26793E1	-3.26199E1	2.67866E1	1.19894E-7	2.51657E-3	2.51657E-3	6.28014E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0934E0	-7.56454E-1	-7.34544E-1	-9.19518E0	-9.18996E0	4.50611E-3	9.48906E-2	2.73039E1	-3.26434E1	-3.26176E1	2.68448E1	1.19978E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.01475E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-7.56192E-1	-7.34496E-1	-9.19523E0	-9.18999E0	4.48227E-3	9.49144E-2	2.73363E1	-3.2644E1	-3.26182E1	2.68917E1	1.20122E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-7.56478E-1	-7.34329E-1	-9.19511E0	-9.18996E0	4.45843E-3	9.50336E-2	2.73016E1	-3.2639E1	-3.26484E1	2.68737E1	1.19965E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-7.56383E-1	-7.34758E-1	-9.19504E0	-9.18999E0	4.36306E-3	9.51529E-2	2.73259E1	-3.26658E1	-3.26156E1	2.68532E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-7.56454E-1	-7.34377E-1	-9.19535E0	-9.18982E0	4.43459E-3	9.54151E-2	2.73635E1	-3.2662E1	-3.26384E1	2.6789E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.56407E-1	-7.34401E-1	-9.19518E0	-9.18977E0	4.50611E-3	9.50575E-2	2.73448E1	-3.26458E1	-3.26591E1	2.68755E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-7.56288E-1	-7.34353E-1	-9.19504E0	-9.18987E0	4.29153E-3	9.51767E-2	2.73171E1	-3.26891E1	-3.26236E1	2.68538E1	1.20031E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00676E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-7.56264E-1	-7.34615E-1	-9.19511E0	-9.18996E0	4.24385E-3	9.51767E-2	2.73153E1	-3.26573E1	-3.26663E1	2.68354E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-7.56359E-1	-7.34615E-1	-9.19514E0	-9.18989E0	4.07696E-3	9.50098E-2	2.73473E1	-3.26633E1	-3.25654E1	2.6819E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.97445E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-7.56502E-1	-7.34472E-1	-9.19504E0	-9.19037E0	4.43459E-3	9.51767E-2	2.737E1	-3.26691E1	-3.26537E1	2.68184E1	1.19898E-7	2.51891E-3	2.51891E-3	6.31234E-3	2.9926E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-7.56335E-1	-7.34591E-1	-9.19509E0	-9.19018E0	4.45843E-3	9.52482E-2	2.73405E1	-3.2644E1	-3.2626E1	2.68851E1	1.20004E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.9841E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-7.56288E-1	-7.34639E-1	-9.19499E0	-9.19011E0	4.57764E-3	9.50575E-2	2.74069E1	-3.2692E1	-3.25544E1	2.68132E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-7.56192E-1	-7.34663E-1	-9.19504E0	-9.1903E0	4.36306E-3	9.54151E-2	2.735E1	-3.2641E1	-3.26379E1	2.68768E1	1.20016E-7	2.51956E-3	2.51956E-3	6.31761E-3	3.00149E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-7.56216E-1	-7.34735E-1	-9.19502E0	-9.1902E0	4.48227E-3	9.52005E-2	2.73075E1	-3.27172E1	-3.26034E1	2.68556E1	1.2006E-7	2.51874E-3	2.51874E-3	6.31902E-3	2.99811E-1
