[Scan]
initial_time=2016-01-18T21:54:15
final_time=2016-01-18T21:54:35
ip_count=19
run=1024
dataset=9
scan=650
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-7.56645E-1
ql1_imon=1.39646E-8
ql2_vset=
ql2_vmon=-7.34854E-1
ql2_imon=1.98929E-9
ql3_vset=
ql3_vmon=-9.19514E0
ql3_imon=8.12888E-11
ql4_vset=
ql4_vmon=-9.18994E0
ql4_imon=-1.57499E-10
mult1=-9.33101E-9
mult2=-2.73059E-9
rf_tmon=-4.90897E-3
rf_agc=3.34117E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.71211E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66916E0
bslens_imon=2.30258E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1947E1
lens5a_imon=2.00244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05012E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=2.79421E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.049E1
cs_ea1_imon=2.53831E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37787E0
lens1_imon=2.72731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65065E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03525E1
cs_ea2_imon=1.49418E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.91026E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.25568E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=4.27148E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15323E1
os_ea1_imon=2.39779E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63425E1
os_ef1bup_imon=3.06595E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22614E0
cs_ionrep_imon=1.17422E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93675E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.96756E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.253E-8
tplens_vset=1.4E-1
tplens_vmon=1.69039E0
tplens_imon=-2.13941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25978E1
iondef3_imon=1.48038E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.56143E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98133E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=4.01086E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27038E0
ionrepsh_imon=1.76707E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.17622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48334E0
os_ea2_imon=-8.86429E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06061E2
lens4b_imon=2.00768E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07798E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11346E1
os_restr2_imon=3.39716E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.27592E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.24497E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73664E1
iondef1_imon=1.08856E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68611E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.86692E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81116E-1
olens1_imon=7.46708E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.99041E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.51094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=6.87195E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45576E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33352E1
os_fil1_imon=9.42979E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.09263E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63646E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=1.0023E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63231E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64959E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.9777E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.17712E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.82214E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.7582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22203E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.15153E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-7.56359E-1	-7.34949E-1	-9.19514E0	-9.1902E0	4.48227E-3	9.48668E-2	2.73028E1	-3.26666E1	-3.26005E1	2.68545E1	1.20106E-7	2.51525E-3	2.51525E-3	6.28592E-3	3.00966E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09379E0	-7.56288E-1	-7.35068E-1	-9.19499E0	-9.1897E0	4.3869E-3	9.49383E-2	2.73149E1	-3.26223E1	-3.27001E1	2.68046E1	1.19991E-7	2.52342E-3	2.52342E-3	6.29684E-3	2.99594E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09279E0	-7.56288E-1	-7.34758E-1	-9.19523E0	-9.19013E0	4.36306E-3	9.4676E-2	2.7349E1	-3.2638E1	-3.2584E1	2.6831E1	1.19713E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.00676E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-7.56335E-1	-7.35044E-1	-9.19495E0	-9.19011E0	4.24385E-3	9.47237E-2	2.73051E1	-3.26732E1	-3.25818E1	2.68226E1	1.20244E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.98026E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-7.5655E-1	-7.34806E-1	-9.19507E0	-9.18999E0	4.43459E-3	9.46522E-2	2.73688E1	-3.26777E1	-3.25972E1	2.68358E1	1.19941E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-7.5655E-1	-7.34997E-1	-9.19504E0	-9.18994E0	4.17233E-3	9.49383E-2	2.72751E1	-3.26487E1	-3.26174E1	2.68773E1	1.19978E-7	2.51359E-3	2.51359E-3	6.3074E-3	2.97499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-7.56669E-1	-7.34782E-1	-9.19518E0	-9.19008E0	4.41074E-3	9.51052E-2	2.72809E1	-3.2649E1	-3.26667E1	2.68689E1	1.19913E-7	2.51935E-3	2.51935E-3	6.31837E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-7.56478E-1	-7.34854E-1	-9.19502E0	-9.18982E0	4.72069E-3	9.5129E-2	2.72895E1	-3.26086E1	-3.26326E1	2.68304E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-7.56478E-1	-7.34878E-1	-9.19492E0	-9.18994E0	4.31538E-3	9.53674E-2	2.73345E1	-3.26603E1	-3.2623E1	2.68198E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.56407E-1	-7.35092E-1	-9.19535E0	-9.18994E0	4.55379E-3	9.53197E-2	2.73333E1	-3.26891E1	-3.26116E1	2.68474E1	1.19851E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.0071E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0934E0	-7.56407E-1	-7.34663E-1	-9.19495E0	-9.18987E0	4.55379E-3	9.53913E-2	2.7288E1	-3.26667E1	-3.26054E1	2.6787E1	1.19965E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-7.56431E-1	-7.34758E-1	-9.19495E0	-9.18968E0	4.36306E-3	9.54151E-2	2.73279E1	-3.26621E1	-3.26218E1	2.68959E1	1.19697E-7	2.51096E-3	2.51096E-3	6.33977E-3	2.98665E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-7.56311E-1	-7.34854E-1	-9.19507E0	-9.18999E0	4.76837E-3	9.51529E-2	2.73315E1	-3.26687E1	-3.26392E1	2.6828E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-7.56288E-1	-7.34901E-1	-9.19502E0	-9.18977E0	4.45843E-3	9.50336E-2	2.73504E1	-3.26603E1	-3.26309E1	2.68052E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.98222E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-7.56431E-1	-7.35164E-1	-9.19497E0	-9.18994E0	4.50611E-3	9.50336E-2	2.73181E1	-3.2708E1	-3.26124E1	2.68268E1	1.20084E-7	2.51915E-3	2.51915E-3	6.34099E-3	2.98026E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-7.56621E-1	-7.34782E-1	-9.19499E0	-9.18999E0	4.55379E-3	9.50575E-2	2.73538E1	-3.26807E1	-3.25803E1	2.68466E1	1.20106E-7	2.51847E-3	2.51847E-3	6.28592E-3	3.00197E-1
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.56454E-1	-7.34973E-1	-9.19533E0	-9.19013E0	4.36306E-3	9.49383E-2	2.73482E1	-3.26608E1	-3.26378E1	2.68673E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.56502E-1	-7.34615E-1	-9.19514E0	-9.18982E0	4.72069E-3	9.48191E-2	2.7462E1	-3.27233E1	-3.24461E1	2.68064E1	1.20158E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-7.56502E-1	-7.34806E-1	-9.19502E0	-9.18987E0	4.55379E-3	9.4986E-2	2.72868E1	-3.26638E1	-3.26431E1	2.68551E1	1.20055E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-7.56645E-1	-7.34854E-1	-9.19514E0	-9.18994E0	4.55379E-3	9.52005E-2	2.73664E1	-3.26849E1	-3.25978E1	2.68611E1	1.19953E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.0148E-1
