[Scan]
initial_time=2016-01-18T22:00:03
final_time=2016-01-18T22:00:22
ip_count=19
run=1024
dataset=9
scan=663
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-7.56359E-1
ql1_imon=1.39848E-8
ql2_vset=
ql2_vmon=-7.34544E-1
ql2_imon=2.03408E-9
ql3_vset=
ql3_vmon=-9.19511E0
ql3_imon=9.03368E-11
ql4_vset=
ql4_vmon=-9.19008E0
ql4_imon=-1.60253E-10
mult1=-1.00414E-8
mult2=-2.76652E-9
rf_tmon=-3.39489E-3
rf_agc=3.37301E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.68643E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65833E0
bslens_imon=2.37553E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.99641E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.77908E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04471E1
cs_ea1_imon=2.56924E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35273E0
lens1_imon=2.62427E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03919E1
cs_ea2_imon=1.51515E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.9135E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.24611E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.26896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.40413E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.06523E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.18854E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.92179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.25725E-8
tplens_vset=1.4E-1
tplens_vmon=1.65705E0
tplens_imon=-2.63296E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27041E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.57211E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=3.96018E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27733E0
ionrepsh_imon=1.76317E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33916E1
lens5b_imon=2.16368E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45998E0
os_ea2_imon=-7.2473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.15641E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93219E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11177E1
os_restr2_imon=3.39031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.27225E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.24064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.10058E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6822E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.89128E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.44095E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-7.95896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=6.96103E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.47076E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.41549E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07137E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63482E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30919E1
cs_fil1_imon=9.96714E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63291E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64823E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.29364E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.37668E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2227E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.05253E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-7.56049E-1	-7.34639E-1	-9.19509E0	-9.18989E0	4.62532E-3	9.49383E-2	2.73193E1	-3.26614E1	-3.26992E1	2.68018E1	1.20004E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00197E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-7.55858E-1	-7.3483E-1	-9.19509E0	-9.19015E0	4.79221E-3	9.4986E-2	2.73363E1	-3.26517E1	-3.27442E1	2.6845E1	1.198E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-7.55978E-1	-7.34997E-1	-9.19511E0	-9.18999E0	4.60148E-3	9.4986E-2	2.73399E1	-3.26402E1	-3.24945E1	2.68526E1	1.2005E-7	2.51126E-3	2.51126E-3	6.32402E-3	2.99304E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-7.56121E-1	-7.35068E-1	-9.19514E0	-9.18982E0	4.86374E-3	9.49383E-2	2.73213E1	-3.26849E1	-3.25545E1	2.68018E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-7.55882E-1	-7.34878E-1	-9.19526E0	-9.18968E0	4.88758E-3	9.49144E-2	2.73234E1	-3.26649E1	-3.26573E1	2.68178E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-7.56168E-1	-7.34568E-1	-9.19521E0	-9.18972E0	4.76837E-3	9.49383E-2	2.73057E1	-3.26627E1	-3.25713E1	2.68545E1	1.20122E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.56574E-1	-7.34997E-1	-9.19514E0	-9.18989E0	4.72069E-3	9.49144E-2	2.73155E1	-3.26389E1	-3.26738E1	2.68262E1	1.20106E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-7.56168E-1	-7.34639E-1	-9.19521E0	-9.18958E0	4.673E-3	9.52005E-2	2.73003E1	-3.26615E1	-3.26464E1	2.68526E1	1.19925E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.02277E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-7.56168E-1	-7.34615E-1	-9.19516E0	-9.18961E0	4.62532E-3	9.4986E-2	2.7311E1	-3.26526E1	-3.25535E1	2.68719E1	1.20174E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.03185E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-7.56168E-1	-7.34639E-1	-9.19509E0	-9.18977E0	4.62532E-3	9.48429E-2	2.73159E1	-3.2626E1	-3.27185E1	2.68358E1	1.19953E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00966E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-7.56335E-1	-7.34663E-1	-9.19521E0	-9.18999E0	4.57764E-3	9.47714E-2	2.73189E1	-3.26795E1	-3.26362E1	2.6846E1	1.20084E-7	2.51915E-3	2.51915E-3	6.27954E-3	3.01475E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.56192E-1	-7.34615E-1	-9.19533E0	-9.19006E0	4.45843E-3	9.4986E-2	2.7325E1	-3.26619E1	-3.25241E1	2.68012E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-7.55978E-1	-7.34639E-1	-9.19521E0	-9.18977E0	4.69685E-3	9.49383E-2	2.73411E1	-3.26675E1	-3.26278E1	2.68713E1	1.19991E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.01356E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-7.56192E-1	-7.34663E-1	-9.19547E0	-9.18996E0	4.673E-3	9.48668E-2	2.73315E1	-3.26693E1	-3.27528E1	2.68511E1	1.19653E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-7.56335E-1	-7.34496E-1	-9.1953E0	-9.1897E0	4.74453E-3	9.50098E-2	2.73081E1	-3.26699E1	-3.26242E1	2.68492E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99175E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-7.5624E-1	-7.3483E-1	-9.19538E0	-9.18992E0	4.8399E-3	9.49621E-2	2.73153E1	-3.26729E1	-3.26158E1	2.68277E1	1.20383E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9874E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-7.5624E-1	-7.34591E-1	-9.19523E0	-9.19006E0	4.62532E-3	9.48906E-2	2.73267E1	-3.2635E1	-3.25918E1	2.68226E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-7.56335E-1	-7.3452E-1	-9.19545E0	-9.18987E0	4.62532E-3	9.47714E-2	2.73157E1	-3.26762E1	-3.26502E1	2.68094E1	1.20069E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-7.56431E-1	-7.34663E-1	-9.1954E0	-9.19023E0	4.62532E-3	9.48429E-2	2.73086E1	-3.26732E1	-3.25458E1	2.68864E1	1.19851E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-7.56359E-1	-7.34544E-1	-9.19511E0	-9.19008E0	4.45843E-3	9.47952E-2	2.73405E1	-3.26753E1	-3.27041E1	2.6822E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00966E-1
