[Scan]
initial_time=2016-01-18T22:00:29
final_time=2016-01-18T22:00:49
ip_count=19
run=1024
dataset=9
scan=664
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-7.5624E-1
ql1_imon=1.40103E-8
ql2_vset=
ql2_vmon=-7.34854E-1
ql2_imon=2.00707E-9
ql3_vset=
ql3_vmon=-9.19523E0
ql3_imon=1.05393E-10
ql4_vset=
ql4_vmon=-9.18975E0
ql4_imon=-1.57714E-10
mult1=-9.29839E-9
mult2=-2.70562E-9
rf_tmon=-5.09348E-3
rf_agc=3.38282E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.71032E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67755E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19791E1
lens5a_imon=2.01119E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05147E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=2.77439E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04748E1
cs_ea1_imon=2.56059E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37136E0
lens1_imon=2.67835E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.48955E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.92215E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.24759E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14855E1
os_ea1_imon=2.40016E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=1.18566E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91947E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.94414E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.24975E-8
tplens_vset=1.4E-1
tplens_vmon=1.67328E0
tplens_imon=-3.8226E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26585E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26697E1
iondef2_imon=1.54471E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98018E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.04866E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=1.7556E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.16368E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45998E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00785E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.15965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05095E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11099E1
os_restr2_imon=3.39716E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73316E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6836E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.9131E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.4305E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.86988E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.39567E-1
window_imon=-7.45441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82681E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.43328E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.66182E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.09441E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27525E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.44216E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06831E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63441E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=9.98636E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63141E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64588E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.41223E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.27767E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22127E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.03545E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71616E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-7.56216E-1	-7.3421E-1	-9.19538E0	-9.18999E0	4.62532E-3	9.50336E-2	2.73439E1	-3.26834E1	-3.26335E1	2.68707E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.97963E-1
2.0E0	5.4E1	1.0E0	3.16E2	1.6E2	-2.09449E0	-7.56121E-1	-7.34472E-1	-9.19535E0	-9.18996E0	4.52995E-3	9.5129E-2	2.73313E1	-3.26603E1	-3.24919E1	2.68148E1	1.19902E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.56216E-1	-7.34425E-1	-9.1953E0	-9.18987E0	4.50611E-3	9.50336E-2	2.73283E1	-3.26834E1	-3.26683E1	2.68273E1	1.19607E-7	2.5147E-3	2.5147E-3	6.34661E-3	2.99879E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-7.56431E-1	-7.34639E-1	-9.19521E0	-9.19006E0	4.45843E-3	9.5129E-2	2.73381E1	-3.26484E1	-3.27251E1	2.68677E1	1.20142E-7	2.51393E-3	2.51393E-3	6.32328E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-7.56407E-1	-7.34901E-1	-9.19509E0	-9.19006E0	4.69685E-3	9.50098E-2	2.73079E1	-3.26442E1	-3.27581E1	2.68362E1	1.19902E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-7.56288E-1	-7.3483E-1	-9.19516E0	-9.18999E0	4.673E-3	9.47237E-2	2.73146E1	-3.26655E1	-3.27901E1	2.68251E1	1.20148E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-7.56931E-1	-7.34735E-1	-9.19521E0	-9.19006E0	4.76837E-3	9.49383E-2	2.73293E1	-3.26366E1	-3.27228E1	2.68767E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.56383E-1	-7.34591E-1	-9.19516E0	-9.18984E0	4.74453E-3	9.45568E-2	2.73222E1	-3.26591E1	-3.2626E1	2.68202E1	1.19809E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.56168E-1	-7.34758E-1	-9.19549E0	-9.18982E0	4.60148E-3	9.50098E-2	2.73423E1	-3.26431E1	-3.25263E1	2.68464E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-7.56407E-1	-7.34568E-1	-9.19554E0	-9.19006E0	4.81606E-3	9.50098E-2	2.73429E1	-3.26807E1	-3.24848E1	2.68184E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.98665E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-7.56669E-1	-7.34639E-1	-9.19545E0	-9.18994E0	4.72069E-3	9.4986E-2	2.73183E1	-3.26344E1	-3.26951E1	2.68785E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32112E-3	3.00693E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-7.56335E-1	-7.34806E-1	-9.19528E0	-9.19025E0	4.64916E-3	9.49621E-2	2.73195E1	-3.26374E1	-3.25383E1	2.68304E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-7.56288E-1	-7.34806E-1	-9.19545E0	-9.19006E0	5.07832E-3	9.50575E-2	2.73249E1	-3.26579E1	-3.26891E1	2.68444E1	1.20278E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.56335E-1	-7.34901E-1	-9.1953E0	-9.18999E0	4.673E-3	9.49621E-2	2.73411E1	-3.26615E1	-3.28159E1	2.68229E1	1.20122E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.01347E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.56121E-1	-7.34591E-1	-9.19516E0	-9.18994E0	4.79221E-3	9.49144E-2	2.73285E1	-3.26567E1	-3.27071E1	2.68608E1	1.19965E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00824E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.56407E-1	-7.3483E-1	-9.19518E0	-9.18996E0	4.74453E-3	9.49621E-2	2.73472E1	-3.26675E1	-3.2486E1	2.68499E1	1.20069E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02659E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-7.56335E-1	-7.34949E-1	-9.19521E0	-9.18982E0	4.88758E-3	9.52244E-2	2.73321E1	-3.26765E1	-3.27131E1	2.68743E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-7.56431E-1	-7.34639E-1	-9.19516E0	-9.18972E0	5.05447E-3	9.51052E-2	2.73122E1	-3.26561E1	-3.26815E1	2.68058E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.5624E-1	-7.34878E-1	-9.19533E0	-9.18994E0	4.98295E-3	9.52005E-2	2.73322E1	-3.2649E1	-3.2554E1	2.68761E1	1.19749E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.03545E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-7.5624E-1	-7.34854E-1	-9.19523E0	-9.18975E0	4.673E-3	9.51529E-2	2.73316E1	-3.26697E1	-3.26585E1	2.6836E1	1.19953E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.03545E-1
