[Scan]
initial_time=2016-01-18T22:00:56
final_time=2016-01-18T22:01:15
ip_count=19
run=1024
dataset=9
scan=665
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08834E-4
ql1_vset=
ql1_vmon=-7.56383E-1
ql1_imon=1.39665E-8
ql2_vset=
ql2_vmon=-7.34735E-1
ql2_imon=2.03308E-9
ql3_vset=
ql3_vmon=-9.19504E0
ql3_imon=6.64353E-11
ql4_vset=
ql4_vmon=-9.19032E0
ql4_imon=-1.60718E-10
mult1=-9.88488E-9
mult2=-2.62879E-9
rf_tmon=-5.65399E-3
rf_agc=3.22281E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.64901E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6391E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=2.0047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.78917E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04712E1
cs_ea1_imon=2.55554E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3317E0
lens1_imon=2.69277E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64873E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.50542E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=2.91603E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.2476E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.26571E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=2.41098E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63389E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=1.18313E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93344E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.93044E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.23602E-8
tplens_vset=1.4E-1
tplens_vmon=1.63903E0
tplens_imon=-4.21914E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26687E1
iondef3_imon=1.51335E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.56706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98003E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.00511E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29956E0
ionrepsh_imon=1.76533E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.15755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47921E0
os_ea2_imon=-8.50904E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04495E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.38959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.28378E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01617E1
cs_anode2_imon=2.241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.1186E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.90028E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.43841E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-8.06708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.8626E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.5955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93677E3
defgrida_imon=6.82044E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.14849E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38953E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.43495E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06843E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63355E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30948E1
cs_fil1_imon=9.97951E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63531E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64554E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.78307E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.33102E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22195E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.40982E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-7.56359E-1	-7.34425E-1	-9.19535E0	-9.18975E0	4.29153E-3	9.49383E-2	2.73231E1	-3.2659E1	-3.24939E1	2.68771E1	1.19965E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.99E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09364E0	-7.56168E-1	-7.34329E-1	-9.19504E0	-9.18992E0	4.33922E-3	9.47237E-2	2.73051E1	-3.26646E1	-3.26578E1	2.6831E1	1.20092E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-7.56145E-1	-7.3452E-1	-9.19526E0	-9.18996E0	4.31538E-3	9.48906E-2	2.73387E1	-3.26632E1	-3.27357E1	2.6807E1	1.19819E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.01475E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-7.56502E-1	-7.34758E-1	-9.1953E0	-9.18992E0	4.55379E-3	9.44614E-2	2.73111E1	-3.26705E1	-3.27077E1	2.68545E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-7.5655E-1	-7.34735E-1	-9.1954E0	-9.19008E0	4.673E-3	9.48191E-2	2.73346E1	-3.2698E1	-3.26773E1	2.68545E1	1.20069E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-7.56431E-1	-7.34591E-1	-9.19528E0	-9.19003E0	4.57764E-3	9.48668E-2	2.73297E1	-3.26699E1	-3.26098E1	2.68394E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-7.56049E-1	-7.34711E-1	-9.19545E0	-9.19006E0	4.69685E-3	9.47475E-2	2.73285E1	-3.26759E1	-3.27618E1	2.68232E1	1.19861E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.56001E-1	-7.34591E-1	-9.19518E0	-9.18977E0	4.98295E-3	9.50813E-2	2.73016E1	-3.2649E1	-3.25883E1	2.68406E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-7.56216E-1	-7.34687E-1	-9.19528E0	-9.18989E0	4.76837E-3	9.50098E-2	2.73357E1	-3.26432E1	-3.2514E1	2.6825E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-7.56097E-1	-7.34687E-1	-9.19538E0	-9.18975E0	4.48227E-3	9.5129E-2	2.73316E1	-3.26944E1	-3.26012E1	2.68028E1	1.19872E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.00676E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-7.56145E-1	-7.3452E-1	-9.19521E0	-9.1902E0	4.69685E-3	9.52959E-2	2.73189E1	-3.25846E1	-3.29084E1	2.68563E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-7.56073E-1	-7.34591E-1	-9.19528E0	-9.19013E0	4.91142E-3	9.51052E-2	2.73141E1	-3.26146E1	-3.27702E1	2.6834E1	1.20122E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-7.56049E-1	-7.3452E-1	-9.19535E0	-9.19008E0	4.74453E-3	9.51052E-2	2.73086E1	-3.26573E1	-3.2826E1	2.68215E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00563E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-7.56025E-1	-7.34496E-1	-9.19585E0	-9.18975E0	4.86374E-3	9.48191E-2	2.73502E1	-3.27251E1	-3.27149E1	2.68514E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-7.5624E-1	-7.3483E-1	-9.19583E0	-9.19006E0	4.88758E-3	9.48191E-2	2.7288E1	-3.2652E1	-3.25175E1	2.68268E1	1.19757E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9952E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-7.56192E-1	-7.34687E-1	-9.19557E0	-9.19006E0	4.76837E-3	9.4986E-2	2.73195E1	-3.26927E1	-3.26801E1	2.68112E1	1.19953E-7	2.50989E-3	2.50989E-3	6.34518E-3	2.9943E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-7.56049E-1	-7.34782E-1	-9.19535E0	-9.18996E0	4.64916E-3	9.48191E-2	2.73321E1	-3.26705E1	-3.25076E1	2.68352E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-7.56335E-1	-7.34496E-1	-9.19526E0	-9.19011E0	4.673E-3	9.52721E-2	2.73234E1	-3.26691E1	-3.25971E1	2.68522E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9952E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-7.5624E-1	-7.34687E-1	-9.19528E0	-9.19044E0	4.50611E-3	9.50575E-2	2.72962E1	-3.26608E1	-3.27198E1	2.6828E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-7.56383E-1	-7.34735E-1	-9.19504E0	-9.19032E0	4.62532E-3	9.48906E-2	2.73129E1	-3.26609E1	-3.26687E1	2.6837E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99686E-1
