[Scan]
initial_time=2016-01-18T22:01:23
final_time=2016-01-18T22:01:42
ip_count=19
run=1024
dataset=9
scan=666
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-7.56502E-1
ql1_imon=1.40964E-8
ql2_vset=
ql2_vmon=-7.3452E-1
ql2_imon=2.0332E-9
ql3_vset=
ql3_vmon=-9.19497E0
ql3_imon=8.775E-11
ql4_vset=
ql4_vmon=-9.1897E0
ql4_imon=-1.44315E-10
mult1=-9.22264E-9
mult2=-2.74256E-9
rf_tmon=-4.16995E-3
rf_agc=3.31593E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.67902E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6668E0
bslens_imon=2.42292E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20066E1
lens5a_imon=1.98864E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12399E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54139E1
cs_ef1b_imon=2.77727E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04732E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04198E1
cs_ea1_imon=2.5599E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38023E0
lens1_imon=2.87242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.50692E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.91242E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.24364E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.26031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16002E1
os_ea1_imon=2.42044E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63828E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=1.17209E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93643E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.93513E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.24175E-8
tplens_vset=1.4E-1
tplens_vmon=1.6786E0
tplens_imon=-4.12148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.51789E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.5409E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98031E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=4.01766E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31227E0
ionrepsh_imon=1.78654E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.12809E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7485E1
cs_ef2b_imon=3.14236E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47154E0
os_ea2_imon=-1.28996E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=1.99975E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.16614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05816E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.40328E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.29114E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.24893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73327E1
iondef1_imon=1.09706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68232E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.8418E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.41689E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15237E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.46174E-1
window_imon=-7.05797E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82675E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.8629E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=6.96044E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.64897E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=6.82948E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27563E0
defgridb_imon=6.12868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.42132E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07545E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6343E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.9848E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62924E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64703E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.80042E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.1556E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22068E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.8512E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-7.56216E-1	-7.34568E-1	-9.19523E0	-9.18977E0	4.64916E-3	9.52482E-2	2.73363E1	-3.26332E1	-3.28339E1	2.678E1	1.20069E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.01609E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-7.56359E-1	-7.34901E-1	-9.19528E0	-9.18977E0	4.52995E-3	9.49144E-2	2.73279E1	-3.26585E1	-3.27296E1	2.68311E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-7.56383E-1	-7.34663E-1	-9.19533E0	-9.18992E0	4.64916E-3	9.52721E-2	2.73286E1	-3.26495E1	-3.25554E1	2.68672E1	1.20177E-7	2.51886E-3	2.51886E-3	6.323E-3	3.00494E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-7.56288E-1	-7.34854E-1	-9.19518E0	-9.19003E0	5.00679E-3	9.4986E-2	2.73435E1	-3.26603E1	-3.27486E1	2.68448E1	1.1973E-7	2.51065E-3	2.51065E-3	6.3016E-3	3.02581E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-7.56264E-1	-7.34544E-1	-9.1953E0	-9.18984E0	4.91142E-3	9.4986E-2	2.73001E1	-3.26708E1	-3.25522E1	2.68384E1	1.19757E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.56407E-1	-7.34711E-1	-9.19559E0	-9.18996E0	4.79221E-3	9.50336E-2	2.72947E1	-3.26597E1	-3.26297E1	2.68412E1	1.19967E-7	2.51956E-3	2.51956E-3	6.32273E-3	3.00149E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-7.56311E-1	-7.35021E-1	-9.19573E0	-9.18994E0	4.43459E-3	9.49383E-2	2.73219E1	-3.2644E1	-3.2638E1	2.68316E1	1.19872E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-7.55978E-1	-7.34448E-1	-9.19521E0	-9.19006E0	4.69685E-3	9.51529E-2	2.73293E1	-3.26402E1	-3.25446E1	2.68701E1	1.20017E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-7.56121E-1	-7.34353E-1	-9.19545E0	-9.18992E0	4.88758E-3	9.48906E-2	2.73015E1	-3.26825E1	-3.26446E1	2.68376E1	1.19953E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-7.5624E-1	-7.34448E-1	-9.19547E0	-9.19008E0	5.126E-3	9.4676E-2	2.73116E1	-3.26779E1	-3.26767E1	2.68088E1	1.19757E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.97704E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-7.56216E-1	-7.34425E-1	-9.1953E0	-9.18984E0	4.69685E-3	9.49144E-2	2.72973E1	-3.27035E1	-3.2629E1	2.68364E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-7.56288E-1	-7.34591E-1	-9.1953E0	-9.19001E0	4.74453E-3	9.47237E-2	2.73357E1	-3.2626E1	-3.26205E1	2.68671E1	1.19913E-7	2.5199E-3	2.5199E-3	6.28006E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-7.56407E-1	-7.34568E-1	-9.19533E0	-9.18996E0	4.98295E-3	9.47714E-2	2.7321E1	-3.26649E1	-3.27003E1	2.68142E1	1.20137E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.00676E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-7.56121E-1	-7.34377E-1	-9.19516E0	-9.19025E0	4.91142E-3	9.47714E-2	2.72892E1	-3.2613E1	-3.28118E1	2.68574E1	1.19953E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.0071E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-7.56025E-1	-7.34496E-1	-9.19521E0	-9.19008E0	4.74453E-3	9.48429E-2	2.73118E1	-3.26523E1	-3.26793E1	2.68731E1	1.20209E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.03027E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-7.56121E-1	-7.34329E-1	-9.19526E0	-9.19001E0	4.95911E-3	9.49383E-2	2.73204E1	-3.26773E1	-3.25983E1	2.68136E1	1.1966E-7	2.51804E-3	2.51804E-3	6.33538E-3	3.01209E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-7.56073E-1	-7.34282E-1	-9.19497E0	-9.18992E0	4.74453E-3	9.47714E-2	2.73057E1	-3.26422E1	-3.25485E1	2.68689E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-7.56359E-1	-7.34544E-1	-9.19518E0	-9.19008E0	4.93526E-3	9.50575E-2	2.73478E1	-3.26807E1	-3.26188E1	2.68022E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-7.56621E-1	-7.34425E-1	-9.19514E0	-9.19003E0	4.93526E-3	9.49383E-2	2.73115E1	-3.26457E1	-3.26718E1	2.68528E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-7.56502E-1	-7.3452E-1	-9.19497E0	-9.1897E0	4.88758E-3	9.48191E-2	2.73327E1	-3.26561E1	-3.26404E1	2.68232E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.01995E-1
