[Scan]
initial_time=2016-01-18T22:02:43
final_time=2016-01-18T22:03:02
ip_count=19
run=1024
dataset=9
scan=669
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-7.56574E-1
ql1_imon=1.39806E-8
ql2_vset=
ql2_vmon=-7.34425E-1
ql2_imon=1.99935E-9
ql3_vset=
ql3_vmon=-9.19516E0
ql3_imon=8.73685E-11
ql4_vset=
ql4_vmon=-9.19006E0
ql4_imon=-1.68598E-10
mult1=-9.76447E-9
mult2=-2.70264E-9
rf_tmon=-3.56312E-3
rf_agc=3.45653E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.69559E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.44062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19836E1
lens5a_imon=2.01129E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=2.77475E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04516E1
cs_ea1_imon=2.5691E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37669E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03673E1
cs_ea2_imon=1.49383E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.91855E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.23979E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.27508E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.155E1
os_ea1_imon=2.40239E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63966E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.19085E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91972E2
cs_nozzle_imon=1.93367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.93152E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.23612E-8
tplens_vset=1.4E-1
tplens_vmon=1.67978E0
tplens_imon=-1.99784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27275E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.56497E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.01303E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29752E0
ionrepsh_imon=1.75185E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3354E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48275E0
os_ea2_imon=-6.88222E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00743E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.15641E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72797E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11304E1
os_restr2_imon=3.39571E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.27805E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.86513E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.39995E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.74374E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.43772E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39023E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.62231E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.48616E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.29668E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.41543E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08819E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63438E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.97417E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63585E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64291E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.9777E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.30873E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22012E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92328E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.56121E-1	-7.34544E-1	-9.19552E0	-9.19011E0	4.76837E-3	9.47952E-2	2.73446E1	-3.2672E1	-3.26856E1	2.6869E1	1.20383E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.56311E-1	-7.34448E-1	-9.19554E0	-9.19001E0	4.57764E-3	9.52005E-2	2.7319E1	-3.26428E1	-3.25675E1	2.68041E1	1.19972E-7	2.5199E-3	2.5199E-3	6.30474E-3	3.004E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-7.56192E-1	-7.34448E-1	-9.19559E0	-9.18956E0	4.19617E-3	9.48906E-2	2.73097E1	-3.26482E1	-3.26277E1	2.68613E1					
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-7.56073E-1	-7.34591E-1	-9.19549E0	-9.18992E0	4.29153E-3	9.48429E-2	2.73444E1	-3.26516E1	-3.26915E1	2.68094E1	1.20028E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.0E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-7.56311E-1	-7.34353E-1	-9.19538E0	-9.18987E0	4.43459E-3	9.48906E-2	2.73263E1	-3.27133E1	-3.25588E1	2.68611E1	1.20031E-7	2.52585E-3	2.52585E-3	6.31858E-3	3.01209E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-7.56335E-1	-7.3452E-1	-9.19535E0	-9.18977E0	4.31538E-3	9.50575E-2	2.73159E1	-3.26729E1	-3.273E1	2.6816E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-7.56383E-1	-7.34735E-1	-9.19516E0	-9.18999E0	4.48227E-3	9.52482E-2	2.73299E1	-3.2672E1	-3.25511E1	2.68018E1	1.19965E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.56359E-1	-7.34639E-1	-9.19511E0	-9.18987E0	4.24385E-3	9.51052E-2	2.73141E1	-3.26675E1	-3.26086E1	2.68438E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-7.56097E-1	-7.34425E-1	-9.19528E0	-9.18975E0	4.3869E-3	9.47475E-2	2.73261E1	-3.26434E1	-3.26825E1	2.68018E1	1.19809E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-7.56311E-1	-7.3452E-1	-9.19521E0	-9.18956E0	4.50611E-3	9.49144E-2	2.73129E1	-3.26446E1	-3.24902E1	2.68556E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02133E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-7.56502E-1	-7.34854E-1	-9.19528E0	-9.18961E0	4.50611E-3	9.49621E-2	2.73387E1	-3.26867E1	-3.26266E1	2.68142E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-7.56621E-1	-7.34735E-1	-9.19516E0	-9.18992E0	4.52995E-3	9.47475E-2	2.7285E1	-3.26437E1	-3.26762E1	2.6819E1	1.19978E-7	2.51693E-3	2.51693E-3	6.29067E-3	2.99083E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-7.56383E-1	-7.34639E-1	-9.1953E0	-9.18972E0	4.81606E-3	9.46999E-2	2.73139E1	-3.26602E1	-3.24679E1	2.68597E1	1.20081E-7	2.51525E-3	2.51525E-3	6.31009E-3	2.98792E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.56335E-1	-7.34687E-1	-9.19561E0	-9.18984E0	4.43459E-3	9.48429E-2	2.73195E1	-3.26554E1	-3.25269E1	2.68142E1					
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.56192E-1	-7.34758E-1	-9.19542E0	-9.1898E0	4.57764E-3	9.48429E-2	2.73568E1	-3.2638E1	-3.24494E1	2.68094E1	1.19953E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.56121E-1	-7.34711E-1	-9.1953E0	-9.18994E0	4.93526E-3	9.48429E-2	2.73123E1	-3.26855E1	-3.26422E1	2.68448E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02133E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-7.56359E-1	-7.34353E-1	-9.19528E0	-9.18999E0	4.41074E-3	9.47237E-2	2.73363E1	-3.26452E1	-3.26326E1	2.67806E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-7.56621E-1	-7.34329E-1	-9.1954E0	-9.18965E0	4.43459E-3	9.50336E-2	2.73381E1	-3.26773E1	-3.27015E1	2.68472E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-7.56454E-1	-7.34353E-1	-9.19554E0	-9.18987E0	4.3869E-3	9.47952E-2	2.73311E1	-3.26455E1	-3.27428E1	2.68204E1	1.20383E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-7.56574E-1	-7.34425E-1	-9.19516E0	-9.19006E0	4.33922E-3	9.4986E-2	2.73057E1	-3.26585E1	-3.27275E1	2.68256E1	1.19953E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.99686E-1
