[Scan]
initial_time=2016-01-18T22:03:36
final_time=2016-01-18T22:03:55
ip_count=19
run=1024
dataset=9
scan=671
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08675E-4
ql1_vset=
ql1_vmon=-7.56431E-1
ql1_imon=1.40049E-8
ql2_vset=
ql2_vmon=-7.34687E-1
ql2_imon=2.007E-9
ql3_vset=
ql3_vmon=-9.19502E0
ql3_imon=8.00014E-11
ql4_vset=
ql4_vmon=-9.19001E0
ql4_imon=-1.83344E-10
mult1=-9.83671E-9
mult2=-2.79646E-9
rf_tmon=-3.56913E-3
rf_agc=3.44091E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.70391E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64463E0
bslens_imon=2.4145E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19915E1
lens5a_imon=2.00301E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04975E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=2.7625E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04768E1
cs_ea1_imon=2.5635E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34073E0
lens1_imon=2.70834E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03482E1
cs_ea2_imon=1.50201E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.91891E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.2372E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.27256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14804E1
os_ea1_imon=2.41181E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63864E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24414E0
cs_ionrep_imon=1.18357E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93552E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=2.93297E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.23733E-8
tplens_vset=1.4E-1
tplens_vmon=1.69714E0
tplens_imon=-3.98992E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2587E1
iondef3_imon=1.50936E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26392E1
iondef2_imon=1.56445E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98247E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=4.0452E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30719E0
ionrepsh_imon=1.77198E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33554E1
lens5b_imon=2.16205E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44187E0
os_ea2_imon=-6.01006E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04735E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78203E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.39283E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.28128E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.23776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73442E1
iondef1_imon=1.09542E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68496E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.85905E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.37163E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.29956E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86038E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.31057E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.65311E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=6.99837E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31775E0
defgridb_imon=6.18297E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.43039E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07077E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63112E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.97285E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62666E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6436E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90961E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.48679E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.69813E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22199E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32099E-3
inlet_lpb_pmon=3.01934E-1
chamber_ion_pmon=1.19933E-7
chamber_cvt_pmon=2.51918E-3
foreline_cvt_pmon=2.51918E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92929E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-7.56574E-1	-7.34639E-1	-9.19528E0	-9.19001E0	4.64916E-3	9.4986E-2	2.73322E1	-3.26791E1	-3.26703E1	2.68334E1	1.19872E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.99613E-1
2.0E0	4.9E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-7.56931E-1	-7.34615E-1	-9.19514E0	-9.19008E0	4.76837E-3	9.47714E-2	2.73075E1	-3.26805E1	-3.25501E1	2.68472E1	1.198E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.97901E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-7.57003E-1	-7.34496E-1	-9.19549E0	-9.18958E0	4.81606E-3	9.49383E-2	2.73249E1	-3.26518E1	-3.26669E1	2.6831E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-7.56812E-1	-7.3483E-1	-9.19518E0	-9.18956E0	4.26769E-3	9.47237E-2	2.7347E1	-3.26885E1	-3.25605E1	2.6828E1	1.20017E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-7.56764E-1	-7.34711E-1	-9.19542E0	-9.18984E0	4.26769E-3	9.50098E-2	2.73345E1	-3.26543E1	-3.26134E1	2.68352E1	1.19851E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-7.56717E-1	-7.34711E-1	-9.1954E0	-9.18968E0	4.57764E-3	9.52244E-2	2.73069E1	-3.26408E1	-3.26756E1	2.68482E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	1.0E0	1.163E3	7.54E2	-2.09433E0	-7.56693E-1	-7.34901E-1	-9.19547E0	-9.18996E0	4.55379E-3	9.49383E-2	2.73363E1	-3.26362E1	-3.25623E1	2.68369E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.98665E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-7.56764E-1	-7.34401E-1	-9.19559E0	-9.18994E0	4.64916E-3	9.51529E-2	2.73484E1	-3.26536E1	-3.26476E1	2.68198E1	1.19925E-7	2.50803E-3	2.50803E-3	6.29067E-3	2.98554E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-7.56884E-1	-7.34544E-1	-9.19561E0	-9.18989E0	4.52995E-3	9.49621E-2	2.73219E1	-3.26591E1	-3.26897E1	2.68472E1	1.19653E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.56431E-1	-7.34711E-1	-9.19561E0	-9.18982E0	4.60148E-3	9.4986E-2	2.72962E1	-3.26366E1	-3.26195E1	2.68334E1	1.19985E-7	2.51484E-3	2.51484E-3	6.32371E-3	3.00378E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-7.56574E-1	-7.34448E-1	-9.19526E0	-9.19003E0	4.60148E-3	9.48191E-2	2.73466E1	-3.26176E1	-3.2611E1	2.68364E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-7.56693E-1	-7.34496E-1	-9.19511E0	-9.18992E0	4.55379E-3	9.49621E-2	2.73128E1	-3.2659E1	-3.26762E1	2.68566E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.03027E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-7.5686E-1	-7.34711E-1	-9.19511E0	-9.18975E0	4.55379E-3	9.49383E-2	2.73339E1	-3.26603E1	-3.25347E1	2.68047E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.56836E-1	-7.34639E-1	-9.19542E0	-9.18975E0	4.76837E-3	9.50575E-2	2.73022E1	-3.26805E1	-3.27268E1	2.68482E1	1.19653E-7	2.51662E-3	2.51662E-3	6.35692E-3	3.00302E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.56979E-1	-7.34663E-1	-9.19545E0	-9.18982E0	5.05447E-3	9.51052E-2	2.72964E1	-3.26591E1	-3.2651E1	2.68419E1	1.20226E-7	2.51679E-3	2.51679E-3	6.3126E-3	3.01485E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.56788E-1	-7.34639E-1	-9.19502E0	-9.19001E0	4.74453E-3	9.52721E-2	2.73293E1	-3.26779E1	-3.26337E1	2.68418E1	1.201E-7	2.52066E-3	2.52066E-3	6.3074E-3	3.00794E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-7.5655E-1	-7.34568E-1	-9.19526E0	-9.18984E0	4.55379E-3	9.5129E-2	2.73075E1	-3.26705E1	-3.25954E1	2.68298E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-7.56764E-1	-7.34472E-1	-9.19528E0	-9.18984E0	4.81606E-3	9.48906E-2	2.73592E1	-3.26801E1	-3.27017E1	2.68526E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.56454E-1	-7.34687E-1	-9.19514E0	-9.18977E0	4.52995E-3	9.46999E-2	2.73231E1	-3.26625E1	-3.26138E1	2.68412E1	1.19851E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.56431E-1	-7.34687E-1	-9.19502E0	-9.19001E0	4.673E-3	9.52482E-2	2.73442E1	-3.26392E1	-3.2587E1	2.68496E1	1.19933E-7	2.51918E-3	2.51918E-3	6.32099E-3	3.01934E-1
