[Scan]
initial_time=2016-01-18T22:04:02
final_time=2016-01-18T22:04:22
ip_count=19
run=1024
dataset=9
scan=672
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-7.56264E-1
ql1_imon=1.39863E-8
ql2_vset=
ql2_vmon=-7.34711E-1
ql2_imon=2.02564E-9
ql3_vset=
ql3_vmon=-9.19509E0
ql3_imon=7.94649E-11
ql4_vset=
ql4_vmon=-9.19034E0
ql4_imon=-1.60801E-10
mult1=-9.9604E-9
mult2=-2.81929E-9
rf_tmon=-5.71287E-3
rf_agc=3.27605E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.66053E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64439E0
bslens_imon=2.42646E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19813E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04973E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=2.77763E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04577E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04481E1
cs_ea1_imon=2.56733E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31003E0
lens1_imon=2.58927E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03962E1
cs_ea2_imon=1.50197E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.92071E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.23734E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.27905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15052E1
os_ea1_imon=2.39815E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27569E0
cs_ionrep_imon=1.17316E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93555E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.91963E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.22317E-8
tplens_vset=1.4E-1
tplens_vmon=1.66798E0
tplens_imon=-1.96244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26437E1
iondef3_imon=1.5048E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.5547E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98172E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.02893E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28926E0
ionrepsh_imon=1.75327E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.16561E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49514E0
os_ea2_imon=-7.37774E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.15569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04255E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11352E1
os_restr2_imon=3.38779E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.27592E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.23668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.10662E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68382E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.79575E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.36719E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.4746E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=2.35963E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.15865E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.01353E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30811E0
defgridb_imon=6.2384E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.41087E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07437E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6329E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.96456E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63753E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6428E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.81309E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.23154E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22056E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.87233E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-7.56335E-1	-7.34854E-1	-9.19509E0	-9.18972E0	4.81606E-3	9.50575E-2	2.73171E1	-3.26729E1	-3.26909E1	2.68348E1	1.19646E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.98665E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.56478E-1	-7.34782E-1	-9.19509E0	-9.19011E0	4.72069E-3	9.47952E-2	2.73357E1	-3.26621E1	-3.25764E1	2.68593E1	1.19861E-7	2.51771E-3	2.51771E-3	6.33211E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-7.56097E-1	-7.35021E-1	-9.19509E0	-9.18987E0	4.62532E-3	9.48906E-2	2.73228E1	-3.2652E1	-3.2685E1	2.68702E1					
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-7.56049E-1	-7.35044E-1	-9.19559E0	-9.18977E0	4.673E-3	9.46522E-2	2.73237E1	-3.26729E1	-3.26543E1	2.68136E1	1.20106E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-7.56216E-1	-7.34806E-1	-9.19549E0	-9.18977E0	4.76837E-3	9.49383E-2	2.73157E1	-3.26343E1	-3.25192E1	2.68767E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-7.56001E-1	-7.35092E-1	-9.19547E0	-9.18977E0	4.64916E-3	9.4676E-2	2.73429E1	-3.26783E1	-3.26957E1	2.68172E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-7.56073E-1	-7.34639E-1	-9.19542E0	-9.18968E0	4.55379E-3	9.4533E-2	2.73175E1	-3.26502E1	-3.24974E1	2.68418E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.56001E-1	-7.34878E-1	-9.19557E0	-9.1897E0	4.55379E-3	9.48429E-2	2.73189E1	-3.26903E1	-3.26669E1	2.68233E1	1.19851E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-7.55763E-1	-7.34925E-1	-9.19557E0	-9.19008E0	4.52995E-3	9.4986E-2	2.73334E1	-3.2672E1	-3.25688E1	2.68623E1	1.19749E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.98665E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-7.55763E-1	-7.35021E-1	-9.1953E0	-9.18977E0	4.12464E-3	9.52005E-2	2.73388E1	-3.26676E1	-3.27209E1	2.68436E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-7.55954E-1	-7.34901E-1	-9.19485E0	-9.18968E0	4.52995E-3	9.49144E-2	2.73299E1	-3.26372E1	-3.25175E1	2.68508E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-7.56407E-1	-7.34806E-1	-9.19533E0	-9.18994E0	4.64916E-3	9.49621E-2	2.73291E1	-3.26591E1	-3.26723E1	2.68274E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-7.56407E-1	-7.34878E-1	-9.19504E0	-9.18989E0	4.50611E-3	9.48191E-2	2.73225E1	-3.26819E1	-3.24926E1	2.6834E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-7.56097E-1	-7.35092E-1	-9.19533E0	-9.19015E0	4.64916E-3	9.48906E-2	2.7346E1	-3.26765E1	-3.26717E1	2.68394E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9892E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-7.55858E-1	-7.34901E-1	-9.19557E0	-9.1902E0	4.36306E-3	9.46999E-2	2.74217E1	-3.27468E1	-3.25161E1	2.6846E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.98026E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-7.56288E-1	-7.34758E-1	-9.19545E0	-9.18987E0	4.3869E-3	9.50098E-2	2.73502E1	-3.26567E1	-3.2641E1	2.67674E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-7.56097E-1	-7.34496E-1	-9.19518E0	-9.19011E0	4.57764E-3	9.48429E-2	2.73411E1	-3.26885E1	-3.26188E1	2.68538E1	1.20158E-7	2.52169E-3	2.52169E-3	6.34518E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.5655E-1	-7.34472E-1	-9.19514E0	-9.18984E0	4.48227E-3	9.4986E-2	2.73411E1	-3.26729E1	-3.25521E1	2.68334E1	1.19913E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-7.56502E-1	-7.34353E-1	-9.19526E0	-9.19023E0	4.60148E-3	9.48429E-2	2.73423E1	-3.26655E1	-3.26378E1	2.68684E1	1.19861E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.02396E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.56264E-1	-7.34711E-1	-9.19509E0	-9.19034E0	4.62532E-3	9.49144E-2	2.73187E1	-3.26555E1	-3.26437E1	2.68382E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99941E-1
