[Scan]
initial_time=2016-01-18T22:04:29
final_time=2016-01-18T22:04:49
ip_count=19
run=1024
dataset=9
scan=673
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-7.56192E-1
ql1_imon=1.40108E-8
ql2_vset=
ql2_vmon=-7.34663E-1
ql2_imon=2.0615E-9
ql3_vset=
ql3_vmon=-9.19518E0
ql3_imon=1.01995E-10
ql4_vset=
ql4_vmon=-9.19011E0
ql4_imon=-1.5924E-10
mult1=-9.75944E-9
mult2=-2.79577E-9
rf_tmon=-5.5595E-3
rf_agc=3.28372E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.66783E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66177E0
bslens_imon=2.32635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19492E1
lens5a_imon=1.98244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04986E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53986E1
cs_ef1b_imon=2.7793E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04792E1
cs_ea1_imon=2.58334E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34991E0
lens1_imon=2.66059E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6482E1
os_ef1alow_imon=2.96755E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03825E1
cs_ea2_imon=1.473E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84363E1
cs_ef1a_imon=2.91628E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.23551E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11236E1
os_restr1_imon=4.27446E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15459E1
os_ea1_imon=2.42173E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.07908E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22822E0
cs_ionrep_imon=1.16667E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93435E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01921E1
cs_anode1_imon=2.92264E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.22356E-8
tplens_vset=1.4E-1
tplens_vmon=1.67327E0
tplens_imon=-3.14514E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2544E1
iondef3_imon=1.49246E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26968E1
iondef2_imon=1.55711E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98192E-4
ql6_vset=1.0E-1
ql6_vmon=9.53197E-2
ql6_imon=4.04187E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27781E0
ionrepsh_imon=1.75361E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.17674E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7462E1
cs_ef2b_imon=3.12025E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4486E0
os_ea2_imon=-7.73635E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00498E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.1588E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06329E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77048E-1
os_ef2bup_imon=-5.24652E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=3.38934E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.28239E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01853E1
cs_anode2_imon=2.24074E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.10974E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.09065E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.85586E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.37227E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13076E0
cs_ionaccel_imon=-1.64241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56293E1
einzel_imon=7.85251E-6
window_vset=0.0E0
window_vmon=2.50656E-1
window_imon=-7.85362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.3917E-4
mask2_vset=0.0E0
mask2_vmon=-1.86475E1
mask2_imon=-7.59164E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92589E3
multa_neg_imon=7.35465E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.64209E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.17835E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39436E0
defgridb_imon=6.15726E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33354E1
os_fil1_imon=9.39538E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07591E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63093E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.95833E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63027E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64446E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84391E-2
os_fil2_imon=-2.71864E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95958E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.48023E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34089E-1
cs_fil2_imon=-2.64379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.67998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22071E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.91622E-1
res40_imon=-2.5556E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-7.56025E-1	-7.34687E-1	-9.19509E0	-9.18987E0	4.81606E-3	9.52244E-2	2.73523E1	-3.2682E1	-3.26307E1	2.6924E1	1.20031E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.0041E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-7.56526E-1	-7.34639E-1	-9.19528E0	-9.19039E0	4.48227E-3	9.51767E-2	2.73285E1	-3.2667E1	-3.26274E1	2.67829E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-7.56478E-1	-7.34591E-1	-9.19521E0	-9.19011E0	4.36306E-3	9.51052E-2	2.73169E1	-3.26703E1	-3.26644E1	2.68731E1	1.19792E-7	2.52049E-3	2.52049E-3	6.32953E-3	3.02349E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-7.5624E-1	-7.34496E-1	-9.19518E0	-9.19018E0	4.52995E-3	9.49144E-2	2.7334E1	-3.2649E1	-3.26166E1	2.68106E1	1.19749E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-7.56407E-1	-7.34782E-1	-9.1949E0	-9.19003E0	4.43459E-3	9.49621E-2	2.7352E1	-3.26422E1	-3.26392E1	2.68736E1	1.19902E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-7.56407E-1	-7.34711E-1	-9.19514E0	-9.18953E0	4.17233E-3	9.49383E-2	2.73016E1	-3.26744E1	-3.2616E1	2.67998E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.97445E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-7.56097E-1	-7.34329E-1	-9.19502E0	-9.18975E0	4.3869E-3	9.4986E-2	2.7324E1	-3.26762E1	-3.25959E1	2.68545E1	1.19841E-7	2.51393E-3	2.51393E-3	6.33919E-3	2.98342E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-7.56073E-1	-7.34544E-1	-9.19502E0	-9.18989E0	4.19617E-3	9.52244E-2	2.72949E1	-3.26573E1	-3.25942E1	2.68364E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-7.56168E-1	-7.34544E-1	-9.19518E0	-9.18968E0	4.673E-3	9.52482E-2	2.73163E1	-3.26767E1	-3.26201E1	2.68581E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.5624E-1	-7.34758E-1	-9.19507E0	-9.18946E0	4.8399E-3	9.49383E-2	2.72999E1	-3.26231E1	-3.26179E1	2.67989E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-7.55906E-1	-7.34568E-1	-9.19542E0	-9.18939E0	4.673E-3	9.47952E-2	2.73493E1	-3.26713E1	-3.26562E1	2.68222E1	1.20226E-7	2.5199E-3	2.5199E-3	6.3282E-3	3.01485E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-7.55835E-1	-7.34639E-1	-9.19518E0	-9.18972E0	4.72069E-3	9.49383E-2	2.73085E1	-3.26632E1	-3.26706E1	2.68501E1	1.19676E-7	2.5165E-3	2.5165E-3	6.28703E-3	3.00149E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.55906E-1	-7.34329E-1	-9.19526E0	-9.1898E0	4.45843E-3	9.48906E-2	2.73139E1	-3.2682E1	-3.25776E1	2.68146E1	1.20167E-7	2.52113E-3	2.52113E-3	6.31357E-3	3.00432E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.55811E-1	-7.34425E-1	-9.19545E0	-9.18961E0	4.24385E-3	9.48429E-2	2.73293E1	-3.26443E1	-3.26649E1	2.68268E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00453E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-7.56288E-1	-7.34615E-1	-9.1948E0	-9.18968E0	4.14848E-3	9.49621E-2	2.72961E1	-3.2605E1	-3.26116E1	2.67932E1	1.19757E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.5593E-1	-7.34639E-1	-9.19523E0	-9.18977E0	4.36306E-3	9.47952E-2	2.73252E1	-3.26626E1	-3.25818E1	2.68615E1	1.19749E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00966E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-7.56216E-1	-7.34711E-1	-9.19514E0	-9.18992E0	4.19617E-3	9.47952E-2	2.73014E1	-3.26682E1	-3.26676E1	2.68737E1	1.20122E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-7.56121E-1	-7.34878E-1	-9.19511E0	-9.18982E0	4.3869E-3	9.48668E-2	2.7337E1	-3.26638E1	-3.25605E1	2.68337E1	1.20122E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-7.55858E-1	-7.34806E-1	-9.19511E0	-9.18982E0	4.62532E-3	9.51529E-2	2.73311E1	-3.26638E1	-3.27404E1	2.68142E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-7.56192E-1	-7.34663E-1	-9.19518E0	-9.19011E0	4.52995E-3	9.53197E-2	2.73405E1	-3.26968E1	-3.2544E1	2.68514E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00453E-1
