[Scan]
initial_time=2016-01-18T22:04:56
final_time=2016-01-18T22:05:15
ip_count=19
run=1024
dataset=9
scan=674
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-7.56168E-1
ql1_imon=1.39694E-8
ql2_vset=
ql2_vmon=-7.34711E-1
ql2_imon=2.01261E-9
ql3_vset=
ql3_vmon=-9.19547E0
ql3_imon=8.75831E-11
ql4_vset=
ql4_vmon=-9.18992E0
ql4_imon=-1.83046E-10
mult1=-9.35509E-9
mult2=-2.71462E-9
rf_tmon=-4.53646E-3
rf_agc=3.2925E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.69368E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68863E0
bslens_imon=2.19286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19335E1
lens5a_imon=2.00067E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.04852E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.76899E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04569E1
cs_ea1_imon=2.57618E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37669E0
lens1_imon=2.78748E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03631E1
cs_ea2_imon=1.51117E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.9117E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.23573E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=4.26535E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15099E1
os_ea1_imon=2.39673E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22673E0
cs_ionrep_imon=1.19545E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.92468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.23421E-8
tplens_vset=1.4E-1
tplens_vmon=1.67329E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26651E1
iondef3_imon=1.51648E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.55895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.9808E-4
ql6_vset=1.0E-1
ql6_vmon=9.46283E-2
ql6_imon=3.93935E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29044E0
ionrepsh_imon=1.75751E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4503E0
os_ea2_imon=-6.70525E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06049E2
lens4b_imon=2.00449E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.39788E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.27203E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73748E1
iondef1_imon=1.10732E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67824E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.84937E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.37405E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-1.76536E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.58788E-1
window_imon=-7.49045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.58338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.54987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.35685E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27858E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.42108E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63179E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=9.97477E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63813E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64175E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74977E-2
os_fil2_imon=-2.82214E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.4606E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.65996E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.99846E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2198E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.2752E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.85721E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-7.55954E-1	-7.34687E-1	-9.19499E0	-9.18987E0	4.43459E-3	9.49621E-2	2.73357E1	-3.26561E1	-3.26753E1	2.68484E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9874E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-7.56001E-1	-7.34735E-1	-9.19487E0	-9.1898E0	4.52995E-3	9.48906E-2	2.73192E1	-3.26547E1	-3.26422E1	2.68516E1	1.19601E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-7.55978E-1	-7.34687E-1	-9.19497E0	-9.18968E0	4.55379E-3	9.50098E-2	2.73647E1	-3.26844E1	-3.26012E1	2.68454E1	1.20164E-7	2.51667E-3	2.51667E-3	6.32684E-3	3.01261E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-7.56288E-1	-7.34496E-1	-9.19487E0	-9.18984E0	4.43459E-3	9.50336E-2	2.73429E1	-3.26927E1	-3.26885E1	2.68436E1	1.19902E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.56526E-1	-7.34782E-1	-9.19471E0	-9.19001E0	4.72069E-3	9.50336E-2	2.73351E1	-3.26909E1	-3.25728E1	2.68833E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-7.56478E-1	-7.34997E-1	-9.1949E0	-9.18956E0	4.52995E-3	9.52005E-2	2.73294E1	-3.26411E1	-3.26133E1	2.67958E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-7.56454E-1	-7.34568E-1	-9.19514E0	-9.18968E0	4.41074E-3	9.50575E-2	2.73249E1	-3.26645E1	-3.26723E1	2.68442E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-7.56168E-1	-7.34472E-1	-9.1954E0	-9.1898E0	4.3869E-3	9.48429E-2	2.72845E1	-3.26537E1	-3.25358E1	2.68581E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-7.56145E-1	-7.34544E-1	-9.19516E0	-9.18963E0	4.43459E-3	9.47475E-2	2.7311E1	-3.26463E1	-3.26684E1	2.68429E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-7.56216E-1	-7.34234E-1	-9.19499E0	-9.18996E0	4.62532E-3	9.49383E-2	2.73623E1	-3.26762E1	-3.26413E1	2.68569E1	1.19874E-7	2.51498E-3	2.51498E-3	6.33211E-3	2.9965E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-7.5624E-1	-7.34663E-1	-9.19499E0	-9.19001E0	4.673E-3	9.49621E-2	2.7355E1	-3.27095E1	-3.24734E1	2.68327E1	1.19953E-7	2.52599E-3	2.52599E-3	6.33977E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-7.56121E-1	-7.34591E-1	-9.19502E0	-9.18982E0	4.72069E-3	9.49383E-2	2.73189E1	-3.26488E1	-3.27089E1	2.68535E1	1.19872E-7	2.5147E-3	2.5147E-3	6.32978E-3	2.98554E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-7.56192E-1	-7.34568E-1	-9.1949E0	-9.18965E0	4.86374E-3	9.45807E-2	2.73345E1	-3.26658E1	-3.26064E1	2.68178E1	1.20017E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-7.56454E-1	-7.34711E-1	-9.19497E0	-9.18989E0	4.48227E-3	9.4676E-2	2.73263E1	-3.26697E1	-3.25883E1	2.67926E1	1.20174E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-7.56192E-1	-7.34687E-1	-9.19533E0	-9.18989E0	4.43459E-3	9.46999E-2	2.73321E1	-3.26897E1	-3.26218E1	2.6854E1	1.19705E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-7.56216E-1	-7.34758E-1	-9.19514E0	-9.1898E0	4.43459E-3	9.44853E-2	2.73411E1	-3.26825E1	-3.27023E1	2.68659E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.96929E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-7.56001E-1	-7.34448E-1	-9.19528E0	-9.18953E0	4.45843E-3	9.47952E-2	2.73712E1	-3.26741E1	-3.25593E1	2.68304E1	1.19851E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-7.56168E-1	-7.34854E-1	-9.19533E0	-9.18956E0	4.55379E-3	9.47237E-2	2.73092E1	-3.26335E1	-3.25965E1	2.68684E1	1.19965E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-7.56145E-1	-7.34806E-1	-9.19528E0	-9.1898E0	4.43459E-3	9.48906E-2	2.73249E1	-3.26675E1	-3.2602E1	2.68459E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.56168E-1	-7.34711E-1	-9.19547E0	-9.18992E0	4.50611E-3	9.46283E-2	2.73748E1	-3.26675E1	-3.26651E1	2.67824E1	1.20106E-7	2.51847E-3	2.51847E-3	6.2752E-3	3.0071E-1
