[Scan]
initial_time=2016-01-18T22:05:49
final_time=2016-01-18T22:06:09
ip_count=19
run=1024
dataset=9
scan=676
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.0873E-4
ql1_vset=
ql1_vmon=-7.56454E-1
ql1_imon=1.39854E-8
ql2_vset=
ql2_vmon=-7.34615E-1
ql2_imon=1.99729E-9
ql3_vset=
ql3_vmon=-9.19526E0
ql3_imon=8.06332E-11
ql4_vset=
ql4_vmon=-9.18951E0
ql4_imon=-1.74952E-10
mult1=-1.01732E-8
mult2=-2.69386E-9
rf_tmon=-3.7603E-3
rf_agc=3.34684E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.71694E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66208E0
bslens_imon=2.38752E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19813E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54177E1
cs_ef1b_imon=2.78756E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02015E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04805E1
cs_ea1_imon=2.58396E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33422E0
lens1_imon=2.78748E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64701E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.49347E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=2.91267E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.23456E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11257E1
os_restr1_imon=4.26767E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=2.40593E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63763E1
os_ef1bup_imon=3.07635E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22378E0
cs_ionrep_imon=1.17882E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01763E1
cs_anode1_imon=2.91927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.22928E-8
tplens_vset=1.4E-1
tplens_vmon=1.67329E0
tplens_imon=-5.82074E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26508E1
iondef3_imon=1.5094E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26372E1
iondef2_imon=1.554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98211E-4
ql6_vset=1.0E-1
ql6_vmon=9.44853E-2
ql6_imon=4.03051E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25977E0
ionrepsh_imon=1.76034E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33864E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74652E1
cs_ef2b_imon=3.13404E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47685E0
os_ea2_imon=-8.97047E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06047E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71072E1
cs_ef2a_imon=3.17401E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06325E0
os_ef2alow_imon=-2.49118E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76379E-1
os_ef2bup_imon=-5.29571E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11199E1
os_restr2_imon=3.38912E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.27698E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01722E1
cs_anode2_imon=2.22978E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73122E1
iondef1_imon=1.12537E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68593E1
iondef4_imon=1.09372E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.85187E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.38698E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.7579E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56434E1
einzel_imon=7.87203E-6
window_vset=0.0E0
window_vmon=2.35641E-1
window_imon=-9.09936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39042E-4
mask2_vset=0.0E0
mask2_vmon=-1.8613E1
mask2_imon=-6.90995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.50551E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.66667E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=6.9392E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.13576E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.42241E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07236E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62889E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30919E1
cs_fil1_imon=9.96669E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6349E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64261E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93972E-2
os_fil2_imon=-2.78503E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.58209E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35145E-1
cs_fil2_imon=-2.47225E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01458E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2208E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.85474E-1
res40_imon=-2.61281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09348E0	-7.56598E-1	-7.34854E-1	-9.19516E0	-9.18989E0	4.3869E-3	9.50336E-2	2.73157E1	-3.26467E1	-3.26012E1	2.6774E1	1.20004E-7	2.52276E-3	2.52276E-3	6.33977E-3	2.98665E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09309E0	-7.56717E-1	-7.34615E-1	-9.19514E0	-9.18977E0	4.45843E-3	9.4986E-2	2.73388E1	-3.2648E1	-3.26542E1	2.68839E1	1.19646E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-7.56812E-1	-7.35068E-1	-9.19502E0	-9.19008E0	4.52995E-3	9.50813E-2	2.73132E1	-3.26301E1	-3.25721E1	2.68094E1	1.19713E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00144E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-7.56526E-1	-7.34925E-1	-9.19523E0	-9.18972E0	4.26769E-3	9.48668E-2	2.73357E1	-3.26278E1	-3.26506E1	2.68016E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-7.56645E-1	-7.34997E-1	-9.19528E0	-9.18992E0	4.48227E-3	9.48906E-2	2.72974E1	-3.27104E1	-3.25682E1	2.67722E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-7.56621E-1	-7.34663E-1	-9.19533E0	-9.18984E0	4.33922E-3	9.49144E-2	2.73535E1	-3.2656E1	-3.26444E1	2.69181E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.97647E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-7.56621E-1	-7.34568E-1	-9.19538E0	-9.18982E0	4.48227E-3	9.48668E-2	2.73051E1	-3.26378E1	-3.26449E1	2.67559E1	1.19872E-7	2.52362E-3	2.52362E-3	6.3074E-3	2.99083E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.56812E-1	-7.34615E-1	-9.1953E0	-9.19001E0	4.50611E-3	9.46283E-2	2.72986E1	-3.2688E1	-3.25965E1	2.68708E1	1.19953E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-7.56359E-1	-7.34353E-1	-9.19504E0	-9.18968E0	4.74453E-3	9.51052E-2	2.73279E1	-3.26326E1	-3.26428E1	2.68412E1	1.20055E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.02253E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-7.56645E-1	-7.34568E-1	-9.19485E0	-9.19001E0	4.60148E-3	9.50098E-2	2.73171E1	-3.26188E1	-3.26651E1	2.69085E1	1.19653E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-7.56383E-1	-7.3452E-1	-9.19511E0	-9.18989E0	4.43459E-3	9.49383E-2	2.7285E1	-3.26325E1	-3.257E1	2.67938E1	1.20122E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-7.56526E-1	-7.35164E-1	-9.19559E0	-9.18996E0	4.50611E-3	9.50336E-2	2.73333E1	-3.26567E1	-3.26362E1	2.68905E1	1.19851E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.01995E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-7.56192E-1	-7.34854E-1	-9.19559E0	-9.18996E0	4.31538E-3	9.51052E-2	2.72998E1	-3.26779E1	-3.25906E1	2.67845E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-7.56288E-1	-7.3483E-1	-9.19569E0	-9.18961E0	4.19617E-3	9.50098E-2	2.73405E1	-3.26331E1	-3.26461E1	2.68454E1	1.19851E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.99941E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-7.56359E-1	-7.34997E-1	-9.19538E0	-9.18961E0	4.24385E-3	9.47714E-2	2.72365E1	-3.26505E1	-3.27056E1	2.68837E1	1.19653E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-7.56168E-1	-7.34806E-1	-9.19538E0	-9.18963E0	4.26769E-3	9.47952E-2	2.7302E1	-3.26946E1	-3.25985E1	2.68635E1	1.19766E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.99879E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-7.56407E-1	-7.34878E-1	-9.19518E0	-9.18975E0	4.52995E-3	9.49621E-2	2.73405E1	-3.26699E1	-3.26573E1	2.67956E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-7.56335E-1	-7.34758E-1	-9.19526E0	-9.18937E0	4.81606E-3	9.49144E-2	2.73169E1	-3.26756E1	-3.25883E1	2.67711E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-7.56502E-1	-7.34758E-1	-9.19514E0	-9.18951E0	4.74453E-3	9.47475E-2	2.73275E1	-3.26561E1	-3.25393E1	2.69247E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-7.56454E-1	-7.34615E-1	-9.19526E0	-9.18951E0	4.60148E-3	9.44853E-2	2.73122E1	-3.26372E1	-3.26508E1	2.68593E1	1.198E-7	2.52276E-3	2.52276E-3	6.29665E-3	2.9943E-1
