[Scan]
initial_time=2016-01-18T22:08:29
final_time=2016-01-18T22:08:48
ip_count=19
run=1024
dataset=9
scan=682
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08746E-4
ql1_vset=
ql1_vmon=-7.56264E-1
ql1_imon=1.40339E-8
ql2_vset=
ql2_vmon=-7.35044E-1
ql2_imon=2.02215E-9
ql3_vset=
ql3_vmon=-9.19523E0
ql3_imon=9.92537E-11
ql4_vset=
ql4_vmon=-9.1898E0
ql4_imon=-1.73843E-10
mult1=-9.33101E-9
mult2=-2.81442E-9
rf_tmon=-4.5665E-3
rf_agc=3.25285E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.67258E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68957E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19508E1
lens5a_imon=2.0065E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.76899E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02045E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04676E1
cs_ea1_imon=2.56779E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35153E0
lens1_imon=2.76126E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.96E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04045E1
cs_ea2_imon=1.47946E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=2.91567E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.23224E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.27797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15522E1
os_ea1_imon=2.40305E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63065E1
os_ef1bup_imon=3.06775E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21905E0
cs_ionrep_imon=1.18205E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=2.91711E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.22911E-8
tplens_vset=1.4E-1
tplens_vmon=1.68649E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.48703E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26861E1
iondef2_imon=1.57247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98281E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=3.99992E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29896E0
ionrepsh_imon=1.73433E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3388E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46539E0
os_ea2_imon=-8.29274E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.15677E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04615E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58381E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11418E1
os_restr2_imon=3.39932E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.27297E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.23704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.10887E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.83031E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.38338E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56609E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.48577E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.38641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.30853E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.07999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=5.94804E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33331E1
os_fil1_imon=9.39861E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07611E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62952E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30864E1
cs_fil1_imon=9.94365E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63345E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6446E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83466E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.4857E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22092E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.10949E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-7.56264E-1	-7.34949E-1	-9.19507E0	-9.19015E0	4.55379E-3	9.5129E-2	2.73358E1	-3.26236E1	-3.25959E1	2.68448E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-7.5624E-1	-7.34687E-1	-9.19516E0	-9.19011E0	4.673E-3	9.50575E-2	2.73519E1	-3.26778E1	-3.26254E1	2.6802E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.56264E-1	-7.34663E-1	-9.19511E0	-9.18944E0	4.50611E-3	9.50575E-2	2.73155E1	-3.26724E1	-3.26167E1	2.68296E1	1.20244E-7	2.52697E-3	2.52697E-3	6.29624E-3	2.99613E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-7.56192E-1	-7.3483E-1	-9.19507E0	-9.18999E0	4.43459E-3	9.50098E-2	2.73321E1	-3.26741E1	-3.26158E1	2.68629E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-7.5624E-1	-7.35068E-1	-9.19516E0	-9.18992E0	4.62532E-3	9.47237E-2	2.73255E1	-3.26579E1	-3.25894E1	2.68641E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-7.56216E-1	-7.34878E-1	-9.19526E0	-9.1898E0	4.62532E-3	9.48191E-2	2.73334E1	-3.26408E1	-3.26278E1	2.68273E1	1.20004E-7	2.51793E-3	2.51793E-3	6.31009E-3	3.00838E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-7.56264E-1	-7.34878E-1	-9.19516E0	-9.19006E0	4.62532E-3	9.52721E-2	2.73255E1	-3.26627E1	-3.26086E1	2.68418E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-7.56645E-1	-7.34758E-1	-9.19514E0	-9.18999E0	4.76837E-3	9.50336E-2	2.73175E1	-3.26567E1	-3.26384E1	2.68707E1	1.19809E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-7.56335E-1	-7.34878E-1	-9.1953E0	-9.19001E0	4.60148E-3	9.50813E-2	2.73063E1	-3.26645E1	-3.26639E1	2.67914E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-7.56574E-1	-7.34901E-1	-9.19533E0	-9.18975E0	4.24385E-3	9.49383E-2	2.73221E1	-3.26673E1	-3.26233E1	2.68752E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09348E0	-7.56526E-1	-7.34949E-1	-9.19495E0	-9.19006E0	4.55379E-3	9.49144E-2	2.73817E1	-3.27201E1	-3.26351E1	2.68426E1	1.20003E-7	2.51723E-3	2.51723E-3	6.30239E-3	2.99577E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-7.56717E-1	-7.3514E-1	-9.1953E0	-9.19001E0	4.673E-3	9.52482E-2	2.73081E1	-3.26398E1	-3.26362E1	2.68484E1	1.20076E-7	2.52147E-3	2.52147E-3	6.33706E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.56454E-1	-7.34735E-1	-9.19549E0	-9.1898E0	4.62532E-3	9.51529E-2	2.73316E1	-3.26703E1	-3.26195E1	2.68532E1	1.19913E-7	2.50789E-3	2.50789E-3	6.3074E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-7.56335E-1	-7.34997E-1	-9.1954E0	-9.19008E0	4.76837E-3	9.49383E-2	2.73454E1	-3.26861E1	-3.26296E1	2.68394E1	1.19891E-7	2.51077E-3	2.51077E-3	6.30212E-3	2.97593E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-7.56311E-1	-7.34949E-1	-9.1953E0	-9.19003E0	4.55379E-3	9.5129E-2	2.73482E1	-3.27033E1	-3.26042E1	2.68302E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-7.56359E-1	-7.34782E-1	-9.19547E0	-9.18975E0	4.64916E-3	9.50336E-2	2.73645E1	-3.26419E1	-3.26762E1	2.68182E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99686E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-7.56168E-1	-7.35068E-1	-9.19518E0	-9.18975E0	4.36306E-3	9.48668E-2	2.73416E1	-3.26567E1	-3.26411E1	2.68123E1	1.201E-7	2.51384E-3	2.51384E-3	6.3245E-3	2.99981E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-7.56383E-1	-7.34854E-1	-9.19528E0	-9.19001E0	4.76837E-3	9.50336E-2	2.73051E1	-3.26313E1	-3.26425E1	2.68551E1	1.20092E-7	2.51287E-3	2.51287E-3	6.31798E-3	3.00348E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-7.56288E-1	-7.34353E-1	-9.1954E0	-9.19001E0	4.26769E-3	9.52005E-2	2.72974E1	-3.26272E1	-3.26101E1	2.6819E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-7.56264E-1	-7.35044E-1	-9.19523E0	-9.1898E0	4.48227E-3	9.48429E-2	2.73351E1	-3.26861E1	-3.2611E1	2.68058E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01738E-1
