[Scan]
initial_time=2016-01-18T22:08:56
final_time=2016-01-18T22:09:15
ip_count=19
run=1024
dataset=9
scan=683
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-7.55906E-1
ql1_imon=1.40091E-8
ql2_vset=
ql2_vmon=-7.34782E-1
ql2_imon=2.01088E-9
ql3_vset=
ql3_vmon=-9.1949E0
ql3_imon=8.92997E-11
ql4_vset=
ql4_vmon=-9.18944E0
ql4_imon=-1.85633E-10
mult1=-9.30693E-9
mult2=-2.6707E-9
rf_tmon=-5.20337E-3
rf_agc=3.31173E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.68656E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66621E0
bslens_imon=2.47955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19347E1
lens5a_imon=1.9766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5453E1
cs_ef1b_imon=2.80737E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05177E1
cs_ea1_imon=2.55848E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37787E0
lens1_imon=2.7981E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.95646E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03006E1
cs_ea2_imon=1.48462E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83913E1
cs_ef1a_imon=2.8807E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.2341E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=4.2979E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14692E1
os_ea1_imon=2.38753E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63954E1
os_ef1bup_imon=3.09095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25092E0
cs_ionrep_imon=1.19227E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93625E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01554E1
cs_anode1_imon=2.88313E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.22665E-8
tplens_vset=1.4E-1
tplens_vmon=1.66385E0
tplens_imon=-1.99784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.49701E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.54833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98077E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=4.01628E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27038E0
ionrepsh_imon=1.73698E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74322E1
cs_ef2b_imon=3.133E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47508E0
os_ea2_imon=-1.02093E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.0046E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71808E1
cs_ef2a_imon=3.18965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06498E0
os_ef2alow_imon=-2.68579E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93756E-1
os_ef2bup_imon=-5.57373E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10915E1
os_restr2_imon=3.3714E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01554E1
cs_anode2_imon=2.21449E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73201E1
iondef1_imon=1.08326E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68322E1
iondef4_imon=1.12534E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.84215E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.35943E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16374E0
cs_ionaccel_imon=-1.96294E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02032E2
cs_ionfocb_imon=1.47167E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56504E1
einzel_imon=8.09097E-6
window_vset=0.0E0
window_vmon=1.96255E-1
window_imon=-8.30005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.38775E-4
mask2_vset=0.0E0
mask2_vmon=-1.86101E1
mask2_imon=-5.45035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=7.07016E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.5074E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50166E3
multb_neg_imon=7.72141E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=5.89508E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.4147E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63092E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.96211E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62569E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64402E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76243E-2
os_fil2_imon=-2.94721E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81389E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.55298E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-2.33324E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.81364E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22144E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=6.37806E-1
res40_imon=-2.94991E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-7.56502E-1	-7.35164E-1	-9.19542E0	-9.19001E0	4.19617E-3	9.5129E-2	2.73316E1	-3.26579E1	-3.26449E1	2.68526E1	1.20363E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.00453E-1
2.0E0	5.4E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.56288E-1	-7.35021E-1	-9.19533E0	-9.18992E0	4.31538E-3	9.52244E-2	2.73183E1	-3.26549E1	-3.262E1	2.68304E1	1.20142E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-7.5593E-1	-7.35164E-1	-9.1953E0	-9.18977E0	4.17233E-3	9.50813E-2	2.73021E1	-3.27095E1	-3.2617E1	2.67992E1	1.19766E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.0201E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-7.56073E-1	-7.35211E-1	-9.19557E0	-9.18996E0	4.45843E-3	9.50336E-2	2.73141E1	-3.26681E1	-3.25828E1	2.68701E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-7.55882E-1	-7.34973E-1	-9.19526E0	-9.18975E0	4.31538E-3	9.49383E-2	2.73275E1	-3.2688E1	-3.26248E1	2.68442E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-7.56025E-1	-7.34949E-1	-9.19523E0	-9.18982E0	4.26769E-3	9.5129E-2	2.72642E1	-3.26843E1	-3.26368E1	2.6792E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-7.56216E-1	-7.35426E-1	-9.19528E0	-9.18982E0	4.22001E-3	9.48906E-2	2.73172E1	-3.26535E1	-3.26079E1	2.68144E1	1.198E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-7.56121E-1	-7.35116E-1	-9.19509E0	-9.18984E0	4.31538E-3	9.52244E-2	2.73283E1	-3.26353E1	-3.2622E1	2.68731E1	1.19919E-7	2.51956E-3	2.51956E-3	6.31251E-3	2.99421E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-7.56073E-1	-7.34925E-1	-9.19509E0	-9.19008E0	4.48227E-3	9.50336E-2	2.72642E1	-3.26597E1	-3.26224E1	2.68689E1	1.20019E-7	2.52029E-3	2.52029E-3	6.30149E-3	2.97673E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-7.55954E-1	-7.35116E-1	-9.19533E0	-9.18996E0	4.36306E-3	9.48429E-2	2.73442E1	-3.26639E1	-3.26134E1	2.6834E1	1.19913E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-7.56025E-1	-7.34782E-1	-9.19504E0	-9.19006E0	4.43459E-3	9.52482E-2	2.73375E1	-3.27015E1	-3.26113E1	2.6846E1	1.19607E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.00144E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-7.55811E-1	-7.34949E-1	-9.19509E0	-9.18965E0	4.29153E-3	9.52244E-2	2.73204E1	-3.26982E1	-3.26168E1	2.68088E1	1.19941E-7	2.51287E-3	2.51287E-3	6.32858E-3	3.02368E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-7.55882E-1	-7.34663E-1	-9.19511E0	-9.18989E0	4.48227E-3	9.5129E-2	2.73287E1	-3.26838E1	-3.26024E1	2.68833E1	1.20137E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.01475E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-7.56264E-1	-7.34854E-1	-9.19504E0	-9.18963E0	4.673E-3	9.49621E-2	2.73279E1	-3.26332E1	-3.2638E1	2.681E1	1.20278E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-7.56216E-1	-7.34925E-1	-9.19497E0	-9.18994E0	4.57764E-3	9.47714E-2	2.73153E1	-3.26512E1	-3.26633E1	2.68532E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-7.56121E-1	-7.34949E-1	-9.19502E0	-9.18994E0	4.41074E-3	9.48429E-2	2.73435E1	-3.26621E1	-3.26194E1	2.6849E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9952E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-7.56764E-1	-7.34997E-1	-9.19487E0	-9.18982E0	4.43459E-3	9.51529E-2	2.72847E1	-3.26494E1	-3.26789E1	2.6849E1	1.2033E-7	2.51552E-3	2.51552E-3	6.27461E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.56311E-1	-7.34782E-1	-9.19504E0	-9.19003E0	4.50611E-3	9.47237E-2	2.73387E1	-3.26337E1	-3.26325E1	2.68157E1	1.20017E-7	2.5199E-3	2.5199E-3	6.36244E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-7.56264E-1	-7.35021E-1	-9.19523E0	-9.18989E0	4.33922E-3	9.47952E-2	2.73063E1	-3.26518E1	-3.25984E1	2.68286E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-7.55906E-1	-7.34782E-1	-9.1949E0	-9.18944E0	4.52995E-3	9.52721E-2	2.73201E1	-3.26735E1	-3.26332E1	2.68322E1	1.19902E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.99686E-1
