[Scan]
initial_time=2016-01-18T22:09:49
final_time=2016-01-18T22:10:08
ip_count=19
run=1024
dataset=9
scan=685
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0934E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-7.56311E-1
ql1_imon=1.40127E-8
ql2_vset=
ql2_vmon=-7.35044E-1
ql2_imon=1.98133E-9
ql3_vset=
ql3_vmon=-9.19538E0
ql3_imon=9.52482E-11
ql4_vset=
ql4_vmon=-9.18989E0
ql4_imon=-1.83451E-10
mult1=-9.76447E-9
mult2=-2.78648E-9
rf_tmon=-4.92099E-3
rf_agc=3.34778E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.6899E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6397E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.81872E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04495E1
cs_ea1_imon=2.57753E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35213E0
lens1_imon=2.44402E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65413E1
os_ef1alow_imon=2.95927E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.47621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=2.88828E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.23262E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.28049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15083E1
os_ea1_imon=2.41206E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64422E1
os_ef1bup_imon=3.10271E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.1871E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.89476E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.22431E-8
tplens_vset=1.4E-1
tplens_vmon=1.66667E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26669E1
iondef3_imon=1.49208E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.54904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.9814E-4
ql6_vset=1.0E-1
ql6_vmon=9.44376E-2
ql6_imon=4.05666E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=1.76425E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.16728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74159E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45938E0
os_ea2_imon=-5.51693E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.2011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.76006E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40962E-1
os_ef2bup_imon=-5.49547E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=3.35715E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.29099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01479E1
cs_anode2_imon=2.22371E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68719E1
iondef4_imon=1.13242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.83239E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81021E-1
olens1_imon=7.34584E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.22084E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02009E2
cs_ionfocb_imon=1.47082E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.91489E-6
window_vset=0.0E0
window_vmon=2.10135E-1
window_imon=-6.22906E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.38688E-4
mask2_vset=0.0E0
mask2_vmon=-1.85809E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.58829E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.69787E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.05115E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=5.93362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33349E1
os_fil1_imon=9.44E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06698E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62764E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.97621E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64198E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64104E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.8762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.68678E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-1.9692E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21991E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=7.17286E-1
res40_imon=-2.8898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-7.56025E-1	-7.34782E-1	-9.19535E0	-9.19008E0	4.41074E-3	9.49383E-2	2.73464E1	-3.2672E1	-3.25865E1	2.68929E1	1.19965E-7	2.51662E-3	2.51662E-3	6.34588E-3	2.9978E-1
2.0E0	2.2E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-7.56526E-1	-7.34735E-1	-9.19528E0	-9.19008E0	4.60148E-3	9.50575E-2	2.73165E1	-3.26627E1	-3.26188E1	2.68659E1	1.20004E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-7.56288E-1	-7.34854E-1	-9.19507E0	-9.19006E0	4.62532E-3	9.50336E-2	2.73647E1	-3.26608E1	-3.26183E1	2.67897E1	1.20244E-7	2.51248E-3	2.51248E-3	6.31858E-3	2.99879E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-7.56359E-1	-7.34472E-1	-9.19518E0	-9.1902E0	4.45843E-3	9.45807E-2	2.73216E1	-3.26655E1	-3.26649E1	2.6801E1	1.20092E-7	2.50867E-3	2.50867E-3	6.3074E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-7.56311E-1	-7.34544E-1	-9.19523E0	-9.18951E0	4.36306E-3	9.4676E-2	2.73141E1	-3.26633E1	-3.262E1	2.69007E1	1.19809E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-7.56192E-1	-7.34687E-1	-9.19511E0	-9.18987E0	4.45843E-3	9.47237E-2	2.73275E1	-3.26596E1	-3.26349E1	2.68395E1	1.20106E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-7.5655E-1	-7.34949E-1	-9.19523E0	-9.1902E0	4.55379E-3	9.49144E-2	2.73249E1	-3.26621E1	-3.26446E1	2.67962E1	1.19601E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-7.56502E-1	-7.34735E-1	-9.19523E0	-9.19018E0	4.72069E-3	9.47952E-2	2.73104E1	-3.2639E1	-3.2603E1	2.69097E1	1.20017E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.96671E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-7.56526E-1	-7.34496E-1	-9.19554E0	-9.18996E0	4.45843E-3	9.47475E-2	2.73443E1	-3.26774E1	-3.26321E1	2.6846E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.95623E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-7.56359E-1	-7.34353E-1	-9.19535E0	-9.18987E0	4.3869E-3	9.50098E-2	2.73442E1	-3.26597E1	-3.26428E1	2.68412E1	1.20031E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.9829E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-7.55978E-1	-7.34496E-1	-9.19507E0	-9.19018E0	4.41074E-3	9.50098E-2	2.73532E1	-3.26452E1	-3.26044E1	2.68382E1	1.19697E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-7.56145E-1	-7.34448E-1	-9.19528E0	-9.18975E0	4.52995E-3	9.48906E-2	2.73093E1	-3.26308E1	-3.26104E1	2.68749E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-7.55954E-1	-7.34687E-1	-9.19509E0	-9.18968E0	4.48227E-3	9.49144E-2	2.73405E1	-3.26408E1	-3.25835E1	2.68202E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-7.56454E-1	-7.34663E-1	-9.19495E0	-9.18996E0	4.62532E-3	9.50575E-2	2.72916E1	-3.26627E1	-3.26315E1	2.68328E1	1.20278E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02396E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.56192E-1	-7.3452E-1	-9.19497E0	-9.18999E0	4.55379E-3	9.49383E-2	2.73075E1	-3.26621E1	-3.26356E1	2.68244E1	1.19978E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.99348E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-7.55954E-1	-7.34687E-1	-9.19492E0	-9.18944E0	4.41074E-3	9.5129E-2	2.7364E1	-3.26921E1	-3.26416E1	2.67908E1	1.20158E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0148E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-7.5593E-1	-7.34901E-1	-9.19511E0	-9.19001E0	4.57764E-3	9.48668E-2	2.7308E1	-3.26461E1	-3.26119E1	2.68737E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-7.56192E-1	-7.34663E-1	-9.19523E0	-9.18958E0	4.48227E-3	9.50813E-2	2.73588E1	-3.26608E1	-3.26366E1	2.68765E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-7.56359E-1	-7.34997E-1	-9.19535E0	-9.1898E0	4.69685E-3	9.46999E-2	2.72937E1	-3.26591E1	-3.26645E1	2.67836E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02511E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.0934E0	-7.56311E-1	-7.35044E-1	-9.19538E0	-9.18989E0	4.45843E-3	9.44376E-2	2.73075E1	-3.26404E1	-3.26669E1	2.68719E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99941E-1
