[Scan]
initial_time=2016-01-18T22:10:42
final_time=2016-01-18T22:11:01
ip_count=19
run=1024
dataset=9
scan=687
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-7.56407E-1
ql1_imon=1.39994E-8
ql2_vset=
ql2_vmon=-7.34901E-1
ql2_imon=1.95577E-9
ql3_vset=
ql3_vmon=-9.19545E0
ql3_imon=1.14548E-10
ql4_vset=
ql4_vmon=-9.19013E0
ql4_imon=-1.63364E-10
mult1=-9.36631E-9
mult2=-2.62882E-9
rf_tmon=-5.29604E-3
rf_agc=3.23837E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.63592E-9
bslens_vset=-6.2E0
bslens_vmon=-6.632E0
bslens_imon=2.32381E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20308E1
lens5a_imon=1.97908E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5402E1
cs_ef1b_imon=2.76983E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02238E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=2.57476E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36371E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64736E1
os_ef1alow_imon=2.97974E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03501E1
cs_ea2_imon=1.48746E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84128E1
cs_ef1a_imon=2.91267E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.23272E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11517E1
os_restr1_imon=4.27323E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14627E1
os_ea1_imon=2.39956E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63375E1
os_ef1bup_imon=3.07427E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27274E0
cs_ionrep_imon=1.18944E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01751E1
cs_anode1_imon=2.92379E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.23265E-8
tplens_vset=1.4E-1
tplens_vmon=1.67093E0
tplens_imon=-4.26306E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.51117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26684E1
iondef2_imon=1.54975E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.9819E-4
ql6_vset=1.0E-1
ql6_vmon=9.54151E-2
ql6_imon=3.98718E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=1.7653E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33392E1
lens5b_imon=2.15357E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74727E1
cs_ef2b_imon=3.11701E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47921E0
os_ea2_imon=-6.52828E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71362E1
cs_ef2a_imon=3.15211E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03776E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94335E-1
os_ef2bup_imon=-5.22273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=3.3853E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.2475E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.09033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68462E1
iondef4_imon=1.09754E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.83968E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.36906E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10987E0
cs_ionaccel_imon=-1.80655E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.81295E-6
window_vset=0.0E0
window_vmon=2.38537E-1
window_imon=-9.62065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82686E2
mask1_imon=2.39108E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.11064E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92708E3
multa_neg_imon=7.29668E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.32689E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.31438E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47347E0
defgridb_imon=5.99772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33352E1
os_fil1_imon=9.41053E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.073E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6298E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=9.96275E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63362E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64365E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7751E-2
os_fil2_imon=-2.63443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02241E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.58209E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35645E-1
cs_fil2_imon=-2.48963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.58196E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2212E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.93379E-1
res40_imon=-2.63714E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=195
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-7.56121E-1	-7.34687E-1	-9.1954E0	-9.18994E0	4.673E-3	9.45807E-2	2.73107E1	-3.26618E1	-3.26159E1	2.68261E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9892E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-7.56216E-1	-7.34639E-1	-9.19542E0	-9.18999E0	4.64916E-3	9.51052E-2	2.73641E1	-3.26732E1	-3.26437E1	2.68581E1	1.19967E-7	2.51854E-3	2.51854E-3	6.32784E-3	2.99421E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-7.56359E-1	-7.34544E-1	-9.19507E0	-9.18999E0	4.62532E-3	9.50813E-2	2.7355E1	-3.26518E1	-3.26134E1	2.68677E1	1.19913E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.00041E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-7.56407E-1	-7.34639E-1	-9.19526E0	-9.19001E0	4.41074E-3	9.5129E-2	2.73303E1	-3.26368E1	-3.26374E1	2.68018E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-7.56407E-1	-7.34711E-1	-9.1954E0	-9.18992E0	4.45843E-3	9.51052E-2	2.7308E1	-3.26514E1	-3.2606E1	2.68623E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-7.56574E-1	-7.34735E-1	-9.19523E0	-9.19013E0	4.43459E-3	9.49621E-2	2.72823E1	-3.26248E1	-3.26296E1	2.68538E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-7.56526E-1	-7.34568E-1	-9.19518E0	-9.19042E0	4.36306E-3	9.51052E-2	2.73003E1	-3.26759E1	-3.2587E1	2.67854E1	1.20174E-7	2.52757E-3	2.52757E-3	6.30192E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-7.56526E-1	-7.34735E-1	-9.19518E0	-9.18994E0	4.36306E-3	9.51767E-2	2.73099E1	-3.26338E1	-3.26116E1	2.68863E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-7.56431E-1	-7.34591E-1	-9.19533E0	-9.18958E0	4.24385E-3	9.54151E-2	2.73153E1	-3.26843E1	-3.26314E1	2.68797E1	1.19554E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01742E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-7.56454E-1	-7.34568E-1	-9.19545E0	-9.19015E0	4.33922E-3	9.5129E-2	2.73228E1	-3.26738E1	-3.26455E1	2.6804E1	1.20069E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-7.56335E-1	-7.34377E-1	-9.19538E0	-9.18982E0	4.3869E-3	9.50098E-2	2.7291E1	-3.26689E1	-3.26817E1	2.68238E1	1.20004E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-7.56168E-1	-7.34472E-1	-9.19514E0	-9.19001E0	4.50611E-3	9.52244E-2	2.73417E1	-3.26549E1	-3.26158E1	2.68178E1	1.19913E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-7.56192E-1	-7.34282E-1	-9.19516E0	-9.18982E0	4.86374E-3	9.52959E-2	2.73653E1	-3.26685E1	-3.2675E1	2.6825E1	1.19705E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.56121E-1	-7.34329E-1	-9.19492E0	-9.18984E0	4.74453E-3	9.50336E-2	2.73123E1	-3.26831E1	-3.26254E1	2.68448E1	1.20017E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02396E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.56502E-1	-7.34544E-1	-9.19478E0	-9.19034E0	4.673E-3	9.51529E-2	2.73187E1	-3.26579E1	-3.26284E1	2.68244E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.56454E-1	-7.3483E-1	-9.19504E0	-9.18987E0	4.76837E-3	9.52244E-2	2.73153E1	-3.26416E1	-3.26098E1	2.6786E1	1.20158E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.99686E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-7.56001E-1	-7.3452E-1	-9.19504E0	-9.19025E0	4.88758E-3	9.50813E-2	2.73309E1	-3.26807E1	-3.26014E1	2.68575E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-7.55978E-1	-7.34758E-1	-9.19511E0	-9.19003E0	4.8399E-3	9.49621E-2	2.73231E1	-3.26765E1	-3.26585E1	2.68334E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-7.56073E-1	-7.34568E-1	-9.19497E0	-9.18996E0	4.60148E-3	9.52721E-2	2.73832E1	-3.26536E1	-3.24962E1	2.6801E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-7.56407E-1	-7.34901E-1	-9.19545E0	-9.19013E0	4.79221E-3	9.54151E-2	2.73183E1	-3.26684E1	-3.26425E1	2.68462E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
