[Scan]
initial_time=2016-01-18T22:11:35
final_time=2016-01-18T22:11:55
ip_count=19
run=1024
dataset=9
scan=689
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08722E-4
ql1_vset=
ql1_vmon=-7.56288E-1
ql1_imon=1.39915E-8
ql2_vset=
ql2_vmon=-7.34758E-1
ql2_imon=1.98069E-9
ql3_vset=
ql3_vmon=-9.19514E0
ql3_imon=8.19802E-11
ql4_vset=
ql4_vmon=-9.19008E0
ql4_imon=-1.8599E-10
mult1=-1.00641E-8
mult2=-2.82361E-9
rf_tmon=-4.98073E-3
rf_agc=3.31753E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.67621E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67783E0
bslens_imon=2.43626E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.97504E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54098E1
cs_ef1b_imon=2.75871E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02095E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04476E1
cs_ea1_imon=2.5714E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33138E0
lens1_imon=2.8518E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64714E1
os_ef1alow_imon=2.95595E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03578E1
cs_ea2_imon=1.48276E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=2.91328E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.22842E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11392E1
os_restr1_imon=4.27858E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14938E1
os_ea1_imon=2.3977E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63511E1
os_ef1bup_imon=3.07309E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24898E0
cs_ionrep_imon=1.17953E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.93536E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01796E1
cs_anode1_imon=2.9159E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.2212E-8
tplens_vset=1.4E-1
tplens_vmon=1.6589E0
tplens_imon=-3.37753E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26358E1
iondef3_imon=1.49811E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26799E1
iondef2_imon=1.56512E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98166E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.00547E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28891E0
ionrepsh_imon=1.74331E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33752E1
lens5b_imon=2.14575E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74589E1
cs_ef2b_imon=3.13859E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45924E0
os_ea2_imon=-7.38318E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00597E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71439E1
cs_ef2a_imon=3.14719E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03585E0
os_ef2alow_imon=-2.55186E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95761E-1
os_ef2bup_imon=-5.27646E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.3942E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.2742E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.24261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73112E1
iondef1_imon=1.10054E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67746E1
iondef4_imon=1.10374E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.82831E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.33762E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12141E0
cs_ionaccel_imon=-1.84451E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47484E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.73275E-6
window_vset=0.0E0
window_vmon=2.53775E-1
window_imon=-9.31322E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-5.38351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.89818E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.4494E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.14197E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41498E0
defgridb_imon=6.17238E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.41397E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07098E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63084E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.95671E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62615E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63883E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.8803E-2
os_fil2_imon=-2.87458E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80988E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.52006E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34492E-1
cs_fil2_imon=-2.36933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1175E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21929E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.79771E-1
res40_imon=-2.51069E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-7.56359E-1	-7.34687E-1	-9.19528E0	-9.19023E0	4.62532E-3	9.46283E-2	2.73139E1	-3.26602E1	-3.26136E1	2.68094E1	1.20031E-7	2.51359E-3	2.51359E-3	6.34099E-3	3.00144E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09302E0	-7.56574E-1	-7.34711E-1	-9.19547E0	-9.19006E0	4.88758E-3	9.47237E-2	2.72959E1	-3.26707E1	-3.26199E1	2.68132E1	1.20106E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-7.56168E-1	-7.34305E-1	-9.19533E0	-9.18984E0	4.93526E-3	9.49383E-2	2.73328E1	-3.26756E1	-3.26225E1	2.68372E1	1.19766E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.03618E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-7.56407E-1	-7.34687E-1	-9.19516E0	-9.19006E0	4.91142E-3	9.50575E-2	2.73352E1	-3.26726E1	-3.26337E1	2.68538E1	1.19697E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-7.56335E-1	-7.3483E-1	-9.19542E0	-9.18989E0	4.52995E-3	9.48429E-2	2.73141E1	-3.26434E1	-3.26404E1	2.68617E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-7.56383E-1	-7.34878E-1	-9.19533E0	-9.18999E0	4.64916E-3	9.5129E-2	2.73345E1	-3.26675E1	-3.26254E1	2.67926E1	1.19925E-7	2.51804E-3	2.51804E-3	6.34661E-3	2.9829E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-7.56478E-1	-7.34854E-1	-9.19511E0	-9.19006E0	4.673E-3	9.49383E-2	2.73177E1	-3.26663E1	-3.2647E1	2.68957E1	1.20004E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-7.56526E-1	-7.34949E-1	-9.19514E0	-9.19008E0	4.62532E-3	9.49621E-2	2.73169E1	-3.26561E1	-3.26213E1	2.68064E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-7.56478E-1	-7.34711E-1	-9.1953E0	-9.19027E0	4.45843E-3	9.4533E-2	2.73111E1	-3.26278E1	-3.26314E1	2.6813E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09333E0	-7.55978E-1	-7.34639E-1	-9.1953E0	-9.18999E0	4.64916E-3	9.47952E-2	2.73122E1	-3.2636E1	-3.25924E1	2.68478E1	1.19861E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09309E0	-7.56264E-1	-7.34758E-1	-9.19511E0	-9.19013E0	4.43459E-3	9.47952E-2	2.73129E1	-3.26561E1	-3.26482E1	2.68382E1	1.20158E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09317E0	-7.56288E-1	-7.34806E-1	-9.19509E0	-9.18999E0	4.48227E-3	9.48191E-2	2.73275E1	-3.26738E1	-3.25989E1	2.68366E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09333E0	-7.56192E-1	-7.34711E-1	-9.19478E0	-9.18994E0	4.76837E-3	9.47714E-2	2.7321E1	-3.26615E1	-3.25966E1	2.6835E1	1.2026E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.98665E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09317E0	-7.56121E-1	-7.34735E-1	-9.19533E0	-9.18982E0	4.55379E-3	9.50336E-2	2.73159E1	-3.26813E1	-3.26182E1	2.68262E1	1.19819E-7	2.52585E-3	2.52585E-3	6.31299E-3	2.99613E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09317E0	-7.5593E-1	-7.34639E-1	-9.19528E0	-9.18984E0	4.60148E-3	9.51529E-2	2.73351E1	-3.26462E1	-3.2656E1	2.69301E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.97963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-7.56121E-1	-7.34663E-1	-9.19507E0	-9.19001E0	4.60148E-3	9.5129E-2	2.73393E1	-3.26567E1	-3.2603E1	2.68394E1	1.19978E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.99083E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-7.56335E-1	-7.34782E-1	-9.19514E0	-9.19013E0	4.45843E-3	9.49621E-2	2.7341E1	-3.26816E1	-3.26115E1	2.69258E1	1.19922E-7	2.51564E-3	2.51564E-3	6.32342E-3	3.004E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-7.56192E-1	-7.34448E-1	-9.19507E0	-9.18996E0	4.62532E-3	9.50098E-2	2.73112E1	-3.26315E1	-3.2634E1	2.68683E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09333E0	-7.56335E-1	-7.34735E-1	-9.19507E0	-9.19008E0	4.57764E-3	9.51052E-2	2.72514E1	-3.26396E1	-3.27133E1	2.68232E1	1.19713E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.0041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-7.56288E-1	-7.34758E-1	-9.19514E0	-9.19008E0	4.93526E-3	9.51529E-2	2.73112E1	-3.26799E1	-3.26358E1	2.67746E1	1.19757E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00824E-1
