[Scan]
initial_time=2016-01-18T22:13:22
final_time=2016-01-18T22:13:41
ip_count=19
run=1024
dataset=9
scan=693
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08729E-4
ql1_vset=
ql1_vmon=-7.56764E-1
ql1_imon=1.40288E-8
ql2_vset=
ql2_vmon=-7.34973E-1
ql2_imon=2.01617E-9
ql3_vset=
ql3_vmon=-9.19547E0
ql3_imon=6.7234E-11
ql4_vset=
ql4_vmon=-9.19001E0
ql4_imon=-1.80078E-10
mult1=-9.71215E-9
mult2=-2.72914E-9
rf_tmon=-5.51231E-3
rf_agc=3.28136E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.70994E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68623E0
bslens_imon=2.22081E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19853E1
lens5a_imon=1.99514E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05021E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5402E1
cs_ef1b_imon=2.76894E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.0191E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04836E1
cs_ea1_imon=2.60457E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33283E0
lens1_imon=2.78098E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64823E1
os_ef1alow_imon=2.98461E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0373E1
cs_ea2_imon=1.4759E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84153E1
cs_ef1a_imon=2.89604E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.22115E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.27025E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14803E1
os_ea1_imon=2.41348E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64155E1
os_ef1bup_imon=3.07278E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23025E0
cs_ionrep_imon=1.19502E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01994E1
cs_anode1_imon=2.9147E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.22289E-8
tplens_vset=1.4E-1
tplens_vmon=1.63349E0
tplens_imon=-2.42329E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25682E1
iondef3_imon=1.50689E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27015E1
iondef2_imon=1.54622E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98191E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=3.97135E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28057E0
ionrepsh_imon=1.73214E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33374E1
lens5b_imon=2.1624E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74481E1
cs_ef2b_imon=3.12044E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4514E0
os_ea2_imon=-7.27011E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06048E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71211E1
cs_ef2a_imon=3.14506E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05621E0
os_ef2alow_imon=-2.52345E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74476E-1
os_ef2bup_imon=-5.2401E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11209E1
os_restr2_imon=3.39409E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23019E2
cs_ionfoca_imon=6.28736E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01729E1
cs_anode2_imon=2.25063E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.13026E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6852E1
iondef4_imon=1.10519E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.78178E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.31068E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15662E0
cs_ionaccel_imon=-1.75691E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47353E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56332E1
einzel_imon=7.56472E-6
window_vset=0.0E0
window_vmon=2.65677E-1
window_imon=-7.44117E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82681E2
mask1_imon=2.39116E-4
mask2_vset=0.0E0
mask2_vmon=-1.86271E1
mask2_imon=-6.05107E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92556E3
multa_neg_imon=7.79466E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.2254E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=6.92859E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29299E0
defgridb_imon=6.03073E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.4203E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06323E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62825E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.97461E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62299E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63915E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88467E-2
os_fil2_imon=-2.78255E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98352E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.80981E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35003E-1
cs_fil2_imon=-2.8686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08988E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22034E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.59823E-1
res40_imon=-2.48373E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09286E0	-7.56288E-1	-7.3514E-1	-9.19523E0	-9.18989E0	4.45843E-3	9.48191E-2	2.73159E1	-3.26735E1	-3.265E1	2.69199E1	1.20322E-7	2.52191E-3	2.52191E-3	6.32555E-3	3.01753E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.0934E0	-7.56359E-1	-7.35164E-1	-9.19497E0	-9.1898E0	4.3869E-3	9.51529E-2	2.73267E1	-3.26807E1	-3.26368E1	2.67868E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-7.55978E-1	-7.35283E-1	-9.19516E0	-9.18968E0	4.17233E-3	9.51529E-2	2.73134E1	-3.26437E1	-3.26107E1	2.68453E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9874E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.0934E0	-7.56621E-1	-7.35259E-1	-9.19516E0	-9.18972E0	4.41074E-3	9.50575E-2	2.73187E1	-3.26608E1	-3.2652E1	2.68418E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-7.56121E-1	-7.34806E-1	-9.19499E0	-9.19011E0	4.33922E-3	9.49621E-2	2.73261E1	-3.26939E1	-3.2608E1	2.68587E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.97647E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09333E0	-7.56335E-1	-7.34782E-1	-9.19514E0	-9.19006E0	4.43459E-3	9.48191E-2	2.72949E1	-3.26356E1	-3.26158E1	2.6792E1	1.19861E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-7.56359E-1	-7.34591E-1	-9.19497E0	-9.18992E0	4.31538E-3	9.4986E-2	2.73021E1	-3.26488E1	-3.26176E1	2.68175E1	1.20017E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-7.56383E-1	-7.34663E-1	-9.19497E0	-9.19003E0	4.26769E-3	9.49383E-2	2.72892E1	-3.26638E1	-3.26231E1	2.68412E1	1.2026E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-7.56073E-1	-7.3514E-1	-9.19542E0	-9.19006E0	4.36306E-3	9.52244E-2	2.73141E1	-3.26819E1	-3.26518E1	2.68466E1	1.2033E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.03712E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.56383E-1	-7.35068E-1	-9.19569E0	-9.18965E0	4.673E-3	9.5129E-2	2.73141E1	-3.26783E1	-3.26338E1	2.68593E1	1.19705E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-7.56288E-1	-7.35188E-1	-9.19497E0	-9.18977E0	4.69685E-3	9.48429E-2	2.73417E1	-3.26567E1	-3.2632E1	2.678E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.97963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-7.56216E-1	-7.35116E-1	-9.19523E0	-9.18975E0	4.33922E-3	9.4986E-2	2.73257E1	-3.26891E1	-3.26602E1	2.68388E1	1.20069E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9926E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.56192E-1	-7.35164E-1	-9.19538E0	-9.18982E0	4.12464E-3	9.50813E-2	2.73219E1	-3.26819E1	-3.2611E1	2.68839E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.56216E-1	-7.34639E-1	-9.19497E0	-9.18989E0	4.29153E-3	9.51767E-2	2.72985E1	-3.26518E1	-3.2635E1	2.68587E1	1.19913E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.99E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.56431E-1	-7.34782E-1	-9.19485E0	-9.18975E0	4.31538E-3	9.51529E-2	2.73369E1	-3.26813E1	-3.25942E1	2.68221E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-7.56192E-1	-7.34735E-1	-9.19487E0	-9.18982E0	4.50611E-3	9.48906E-2	2.73399E1	-3.26849E1	-3.25659E1	2.67889E1	1.19851E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.0071E-1
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-2.09487E0	-7.56454E-1	-7.34854E-1	-9.19528E0	-9.18972E0	4.36306E-3	9.48191E-2	2.72874E1	-3.2649E1	-3.26207E1	2.69287E1	1.19607E-7	2.52139E-3	2.52139E-3	6.29067E-3	2.99348E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-7.56764E-1	-7.35021E-1	-9.19545E0	-9.18975E0	4.52995E-3	9.50336E-2	2.73283E1	-3.26509E1	-3.26075E1	2.6701E1	1.198E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.97647E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-7.56788E-1	-7.35235E-1	-9.19549E0	-9.19003E0	4.57764E-3	9.48906E-2	2.73255E1	-3.2635E1	-3.2647E1	2.6977E1	1.20092E-7	2.51393E-3	2.51393E-3	6.33388E-3	2.99093E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-7.56764E-1	-7.34973E-1	-9.19547E0	-9.19001E0	4.43459E-3	9.50336E-2	2.73075E1	-3.27015E1	-3.25682E1	2.6852E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01347E-1
