[Scan]
initial_time=2016-01-18T22:13:49
final_time=2016-01-18T22:14:08
ip_count=19
run=1024
dataset=9
scan=694
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09665E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-7.56168E-1
ql1_imon=1.40007E-8
ql2_vset=
ql2_vmon=-7.34615E-1
ql2_imon=2.01566E-9
ql3_vset=
ql3_vmon=-9.1949E0
ql3_imon=1.04535E-10
ql4_vset=
ql4_vmon=-9.19015E0
ql4_imon=-1.92213E-10
mult1=-1.03585E-8
mult2=-2.76057E-9
rf_tmon=-5.25008E-3
rf_agc=3.22816E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.70743E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.17516E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12438E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.77187E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02199E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04434E1
cs_ea1_imon=2.58609E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34778E0
lens1_imon=2.87242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.48038E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=2.90882E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.22044E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.27905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14893E1
os_ea1_imon=2.40416E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63323E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22791E0
cs_ionrep_imon=1.17316E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93519E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=2.92143E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.21156E-8
tplens_vset=1.4E-1
tplens_vmon=1.65205E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.49984E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26903E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98098E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.02808E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29398E0
ionrepsh_imon=1.75043E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.15711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44087E0
os_ea2_imon=-6.88222E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.15713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04074E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.62586E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11328E1
os_restr2_imon=3.3867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.27167E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.24749E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73253E1
iondef1_imon=1.10839E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69025E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.79598E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.32515E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-1.72932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.52181E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82675E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92692E3
multa_neg_imon=7.61877E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.3552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.05954E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59454E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33366E1
os_fil1_imon=9.38348E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06921E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62863E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=9.95098E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63237E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64035E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.9777E-2
os_fil2_imon=-2.76808E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.73522E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.78009E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22028E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=3.0041E-1
chamber_ion_pmon=1.19872E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.95332E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-7.56645E-1	-7.34925E-1	-9.1953E0	-9.18992E0	4.19617E-3	9.52244E-2	2.73694E1	-3.26596E1	-3.2639E1	2.67937E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99175E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-7.56288E-1	-7.34901E-1	-9.1954E0	-9.19018E0	4.43459E-3	9.52482E-2	2.73247E1	-3.26542E1	-3.25966E1	2.68756E1	1.20004E-7	2.52276E-3	2.52276E-3	6.34518E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.56311E-1	-7.34854E-1	-9.19523E0	-9.18965E0	4.41074E-3	9.5129E-2	2.73364E1	-3.26756E1	-3.26343E1	2.68742E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00942E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-7.56335E-1	-7.34878E-1	-9.19528E0	-9.1897E0	4.26769E-3	9.47475E-2	2.7344E1	-3.2662E1	-3.26502E1	2.6798E1	1.19841E-7	2.51709E-3	2.51709E-3	6.30212E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-7.5624E-1	-7.34758E-1	-9.1954E0	-9.18989E0	4.74453E-3	9.4986E-2	2.73139E1	-3.26644E1	-3.26172E1	2.68348E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.56216E-1	-7.34591E-1	-9.19535E0	-9.18958E0	4.52995E-3	9.49383E-2	2.73173E1	-3.26425E1	-3.26199E1	2.68487E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-7.56431E-1	-7.3483E-1	-9.19504E0	-9.18975E0	4.69685E-3	9.51767E-2	2.72933E1	-3.26773E1	-3.25924E1	2.68592E1	1.20137E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.98819E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-7.56073E-1	-7.34639E-1	-9.1953E0	-9.1898E0	4.45843E-3	9.5129E-2	2.73129E1	-3.26446E1	-3.2632E1	2.68454E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.98665E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-7.56097E-1	-7.34615E-1	-9.19516E0	-9.18984E0	4.45843E-3	9.4986E-2	2.72937E1	-3.26476E1	-3.26116E1	2.68593E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.96929E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-7.56288E-1	-7.34568E-1	-9.19533E0	-9.18989E0	4.26769E-3	9.49621E-2	2.72974E1	-3.2685E1	-3.26054E1	2.68286E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-7.56407E-1	-7.34663E-1	-9.19521E0	-9.18977E0	4.29153E-3	9.5129E-2	2.73207E1	-3.26591E1	-3.26314E1	2.68134E1	1.19861E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-7.5593E-1	-7.34925E-1	-9.19521E0	-9.18992E0	4.3869E-3	9.52005E-2	2.72823E1	-3.26476E1	-3.26446E1	2.68284E1	1.19887E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00302E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.55882E-1	-7.34878E-1	-9.19523E0	-9.18984E0	4.3869E-3	9.4986E-2	2.72992E1	-3.26472E1	-3.26166E1	2.682E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-7.55906E-1	-7.34925E-1	-9.19518E0	-9.18984E0	4.43459E-3	9.50098E-2	2.73139E1	-3.26549E1	-3.26331E1	2.68352E1	1.20243E-7	2.52131E-3	2.52131E-3	6.32858E-3	3.00097E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-7.56145E-1	-7.34735E-1	-9.19518E0	-9.18999E0	4.33922E-3	9.50575E-2	2.73381E1	-3.26843E1	-3.2611E1	2.67694E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.55644E-1	-7.34568E-1	-9.19492E0	-9.19006E0	4.3869E-3	9.52482E-2	2.73178E1	-3.26671E1	-3.26133E1	2.695E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01738E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-7.56121E-1	-7.34639E-1	-9.19509E0	-9.18984E0	4.22001E-3	9.47237E-2	2.73466E1	-3.26783E1	-3.25767E1	2.6816E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-7.55954E-1	-7.34615E-1	-9.19514E0	-9.1898E0	4.673E-3	9.49383E-2	2.73005E1	-3.26471E1	-3.25998E1	2.68088E1	1.19947E-7	2.51511E-3	2.51511E-3	6.33948E-3	2.99766E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-7.56049E-1	-7.34854E-1	-9.19509E0	-9.18992E0	4.14848E-3	9.51052E-2	2.73516E1	-3.26652E1	-3.2686E1	2.67783E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09665E0	-7.56168E-1	-7.34615E-1	-9.1949E0	-9.19015E0	4.55379E-3	9.50813E-2	2.73253E1	-3.26903E1	-3.26254E1	2.69025E1	1.19872E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.0041E-1
