[Scan]
initial_time=2016-01-18T22:14:15
final_time=2016-01-18T22:14:35
ip_count=19
run=1024
dataset=9
scan=695
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09279E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-7.56335E-1
ql1_imon=1.39971E-8
ql2_vset=
ql2_vmon=-7.34687E-1
ql2_imon=1.95783E-9
ql3_vset=
ql3_vmon=-9.19528E0
ql3_imon=6.5577E-11
ql4_vset=
ql4_vmon=-9.19003E0
ql4_imon=-2.01857E-10
mult1=-9.60575E-9
mult2=-2.78989E-9
rf_tmon=-4.3443E-3
rf_agc=3.29434E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.72329E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68445E0
bslens_imon=2.66565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=1.98585E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05162E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=2.76129E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04287E1
cs_ea1_imon=2.5549E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34717E0
lens1_imon=2.94778E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6467E1
os_ef1alow_imon=2.97708E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04085E1
cs_ea2_imon=1.47661E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8438E1
cs_ef1a_imon=2.91383E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.21619E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.27127E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14764E1
os_ea1_imon=2.40114E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6343E1
os_ef1bup_imon=3.06781E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28501E0
cs_ionrep_imon=1.20238E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93217E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01939E1
cs_anode1_imon=2.91126E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.2101E-8
tplens_vset=1.4E-1
tplens_vmon=1.62074E0
tplens_imon=-1.69724E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26331E1
iondef3_imon=1.49664E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.5257E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.9825E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=3.99144E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2916E0
ionrepsh_imon=1.7387E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33252E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74649E1
cs_ef2b_imon=3.13163E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4778E0
os_ea2_imon=-4.51851E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00329E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71205E1
cs_ef2a_imon=3.15452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.57233E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71507E-1
os_ef2bup_imon=-5.24828E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11381E1
os_restr2_imon=3.39779E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23007E2
cs_ionfoca_imon=6.30521E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24127E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73252E1
iondef1_imon=1.10392E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.09677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.80064E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.30281E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15256E0
cs_ionaccel_imon=-1.83967E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47407E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56529E1
einzel_imon=7.62774E-6
window_vset=0.0E0
window_vmon=2.47464E-1
window_imon=-8.58012E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39141E-4
mask2_vset=0.0E0
mask2_vmon=-1.86435E1
mask2_imon=-6.86293E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.17968E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.51386E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.26714E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25393E0
defgridb_imon=5.94114E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33363E1
os_fil1_imon=9.42749E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0701E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62579E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.97427E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62882E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63976E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.97036E-2
os_fil2_imon=-2.73222E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96619E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.79993E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35204E-1
cs_fil2_imon=-2.92779E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.737E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22057E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.15391E-1
res40_imon=-2.42351E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=389
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-7.5624E-1	-7.34544E-1	-9.1949E0	-9.18987E0	4.29153E-3	9.51052E-2	2.73328E1	-3.26508E1	-3.26549E1	2.68382E1	1.20022E-7	2.51904E-3	2.51904E-3	6.32888E-3	2.9865E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-7.56145E-1	-7.34544E-1	-9.19485E0	-9.19013E0	4.24385E-3	9.51529E-2	2.72977E1	-3.26698E1	-3.26206E1	2.68347E1	1.19827E-7	2.51842E-3	2.51842E-3	6.31234E-3	2.99728E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-7.56049E-1	-7.34568E-1	-9.19516E0	-9.18994E0	4.48227E-3	9.4986E-2	2.73224E1	-3.26902E1	-3.26101E1	2.6869E1					
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-7.56478E-1	-7.3483E-1	-9.19495E0	-9.18987E0	4.64916E-3	9.49621E-2	2.7341E1	-3.26764E1	-3.2626E1	2.68096E1	1.20126E-7	2.51906E-3	2.51906E-3	6.32001E-3	2.99061E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-7.56454E-1	-7.34782E-1	-9.19483E0	-9.18992E0	4.48227E-3	9.51529E-2	2.73291E1	-3.26807E1	-3.26206E1	2.67217E1	1.20066E-7	2.52032E-3	2.52032E-3	6.28227E-3	2.99061E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-7.56335E-1	-7.34663E-1	-9.19523E0	-9.19013E0	4.12464E-3	9.51052E-2	2.72967E1	-3.26621E1	-3.26458E1	2.69127E1	1.19749E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.97901E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-7.56431E-1	-7.34544E-1	-9.19509E0	-9.18989E0	4.26769E-3	9.53674E-2	2.72979E1	-3.2653E1	-3.25966E1	2.67885E1	1.19965E-7	2.51225E-3	2.51225E-3	6.28006E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0934E0	-7.56526E-1	-7.34496E-1	-9.19509E0	-9.18994E0	4.12464E-3	9.52244E-2	2.73147E1	-3.26783E1	-3.26074E1	2.68496E1	1.20226E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09317E0	-7.56574E-1	-7.34663E-1	-9.19533E0	-9.19027E0	4.26769E-3	9.52721E-2	2.73075E1	-3.26296E1	-3.26449E1	2.68611E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09325E0	-7.56454E-1	-7.34854E-1	-9.19521E0	-9.18992E0	4.17233E-3	9.53674E-2	2.72943E1	-3.26663E1	-3.25942E1	2.6795E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09271E0	-7.56431E-1	-7.34711E-1	-9.19507E0	-9.18987E0	4.17233E-3	9.5129E-2	2.73405E1	-3.26484E1	-3.26543E1	2.68569E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-7.56431E-1	-7.34901E-1	-9.19502E0	-9.19006E0	4.33922E-3	9.4986E-2	2.73015E1	-3.26176E1	-3.26176E1	2.68611E1	1.20106E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-7.56574E-1	-7.34854E-1	-9.19509E0	-9.1898E0	4.55379E-3	9.47952E-2	2.73411E1	-3.26705E1	-3.26068E1	2.68476E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-7.56621E-1	-7.34663E-1	-9.1948E0	-9.18989E0	4.55379E-3	9.48906E-2	2.73291E1	-3.26585E1	-3.2629E1	2.67895E1	1.2026E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01223E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09356E0	-7.56288E-1	-7.34758E-1	-9.19518E0	-9.18999E0	4.29153E-3	9.49144E-2	2.73237E1	-3.26933E1	-3.2614E1	2.68789E1	1.19872E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.0041E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09294E0	-7.56383E-1	-7.34663E-1	-9.19545E0	-9.19015E0	4.69685E-3	9.49621E-2	2.73375E1	-3.26897E1	-3.26122E1	2.67926E1	1.20055E-7	2.52492E-3	2.52492E-3	6.33977E-3	2.9943E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09294E0	-7.56431E-1	-7.34615E-1	-9.19552E0	-9.19013E0	4.673E-3	9.50098E-2	2.73358E1	-3.26685E1	-3.26266E1	2.6837E1	1.20069E-7	2.52647E-3	2.52647E-3	6.30192E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09209E0	-7.56335E-1	-7.34663E-1	-9.19526E0	-9.19003E0	4.93526E-3	9.52244E-2	2.73157E1	-3.26526E1	-3.26272E1	2.68454E1	1.19705E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09271E0	-7.56431E-1	-7.34568E-1	-9.19528E0	-9.18992E0	4.64916E-3	9.52959E-2	2.73009E1	-3.26639E1	-3.26176E1	2.68701E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09279E0	-7.56335E-1	-7.34687E-1	-9.19528E0	-9.19003E0	4.74453E-3	9.49383E-2	2.73252E1	-3.26649E1	-3.26331E1	2.68076E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
