[Scan]
initial_time=2016-01-18T22:16:02
final_time=2016-01-18T22:16:22
ip_count=19
run=1024
dataset=9
scan=699
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-7.56145E-1
ql1_imon=1.40092E-8
ql2_vset=
ql2_vmon=-7.34711E-1
ql2_imon=2.05816E-9
ql3_vset=
ql3_vmon=-9.1953E0
ql3_imon=8.51989E-11
ql4_vset=
ql4_vmon=-9.19013E0
ql4_imon=-1.8909E-10
mult1=-9.67668E-9
mult2=-2.70954E-9
rf_tmon=-5.19966E-3
rf_agc=3.28018E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=1.70236E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.6282E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12452E2
lens4a_imon=2.04955E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=2.76178E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04687E1
cs_ea1_imon=2.58467E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37728E0
lens1_imon=2.71669E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.4963E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84058E1
cs_ef1a_imon=2.89981E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.21826E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.27328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15211E1
os_ea1_imon=2.41938E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6396E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=1.17386E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=2.90125E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.20744E-8
tplens_vset=1.4E-1
tplens_vmon=1.65559E0
tplens_imon=-4.82936E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25812E1
iondef3_imon=1.51188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.56568E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.02035E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30165E0
ionrepsh_imon=1.74477E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33905E1
lens5b_imon=2.15428E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46328E0
os_ea2_imon=-7.16537E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71595E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11592E1
os_restr2_imon=3.39644E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.27805E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.23416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.10308E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.81597E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.29111E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56513E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.65996E-1
window_imon=-7.95896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86074E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.8913E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.55341E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.02769E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49414E0
defgridb_imon=6.01542E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.4203E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07497E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62616E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30905E1
cs_fil1_imon=9.97435E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62504E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63974E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92705E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.85418E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.27554E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.15753E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22104E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.19648E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-7.56383E-1	-7.3452E-1	-9.1953E0	-9.19008E0	4.02927E-3	9.52244E-2	2.73452E1	-3.26638E1	-3.26231E1	2.68812E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02511E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09379E0	-7.56431E-1	-7.34711E-1	-9.19507E0	-9.19001E0	4.29153E-3	9.52005E-2	2.73443E1	-3.26646E1	-3.26187E1	2.68388E1	1.19841E-7	2.51498E-3	2.51498E-3	6.30212E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-7.56311E-1	-7.34639E-1	-9.19538E0	-9.18992E0	4.29153E-3	9.52005E-2	2.73358E1	-3.26637E1	-3.2615E1	2.68464E1	1.20043E-7	2.52045E-3	2.52045E-3	6.31837E-3	2.9991E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-7.56311E-1	-7.34615E-1	-9.19538E0	-9.19013E0	4.17233E-3	9.52721E-2	2.73092E1	-3.26508E1	-3.25983E1	2.68516E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-7.56001E-1	-7.34687E-1	-9.19545E0	-9.19011E0	4.07696E-3	9.51052E-2	2.73249E1	-3.26693E1	-3.26585E1	2.67842E1	1.19749E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-7.56025E-1	-7.34591E-1	-9.19547E0	-9.18975E0	3.98159E-3	9.52959E-2	2.73237E1	-3.27017E1	-3.26362E1	2.68635E1	1.20106E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-7.56335E-1	-7.34782E-1	-9.19561E0	-9.19018E0	3.93391E-3	9.51767E-2	2.73351E1	-3.26554E1	-3.25984E1	2.68346E1	1.20084E-7	2.51581E-3	2.51581E-3	6.30182E-3	2.99613E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.55954E-1	-7.34973E-1	-9.19559E0	-9.19015E0	4.48227E-3	9.52005E-2	2.72709E1	-3.26488E1	-3.26452E1	2.68274E1	1.19705E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-7.56145E-1	-7.34997E-1	-9.19549E0	-9.1903E0	4.29153E-3	9.52482E-2	2.72998E1	-3.26614E1	-3.2649E1	2.68166E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-7.55858E-1	-7.34663E-1	-9.19552E0	-9.18989E0	4.31538E-3	9.51529E-2	2.73393E1	-3.26518E1	-3.2623E1	2.6804E1	1.19941E-7	2.51498E-3	2.51498E-3	6.30212E-3	3.00097E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.56049E-1	-7.34663E-1	-9.19554E0	-9.18965E0	4.45843E-3	9.50098E-2	2.73193E1	-3.26502E1	-3.25894E1	2.68065E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98481E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-7.5624E-1	-7.34568E-1	-9.19533E0	-9.19003E0	4.31538E-3	9.50575E-2	2.73261E1	-3.26512E1	-3.26627E1	2.68689E1	1.19809E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.97963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-7.56168E-1	-7.34663E-1	-9.19523E0	-9.19003E0	4.29153E-3	9.52244E-2	2.73316E1	-3.26815E1	-3.25977E1	2.68352E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.98156E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.56145E-1	-7.34663E-1	-9.19523E0	-9.19008E0	4.17233E-3	9.52005E-2	2.73169E1	-3.26207E1	-3.26189E1	2.68123E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9943E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-7.56168E-1	-7.34806E-1	-9.19526E0	-9.18994E0	3.98159E-3	9.53436E-2	2.73351E1	-3.2641E1	-3.26735E1	2.68478E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-7.56097E-1	-7.34782E-1	-9.19535E0	-9.18987E0	3.98159E-3	9.5129E-2	2.73267E1	-3.26909E1	-3.26735E1	2.68881E1	1.19925E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.00676E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-7.55954E-1	-7.34878E-1	-9.1953E0	-9.18987E0	4.22001E-3	9.47714E-2	2.73247E1	-3.26529E1	-3.26181E1	2.68046E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-7.56431E-1	-7.34615E-1	-9.19526E0	-9.18987E0	4.14848E-3	9.54628E-2	2.73476E1	-3.27056E1	-3.26231E1	2.6822E1	1.20069E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.56288E-1	-7.34615E-1	-9.19535E0	-9.18984E0	3.93391E-3	9.50575E-2	2.73458E1	-3.2672E1	-3.26437E1	2.68617E1	1.19697E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-7.56145E-1	-7.34711E-1	-9.1953E0	-9.19013E0	3.95775E-3	9.50336E-2	2.7321E1	-3.26885E1	-3.25812E1	2.68412E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
