[Scan]
initial_time=2016-01-18T22:16:55
final_time=2016-01-18T22:17:15
ip_count=19
run=1024
dataset=9
scan=701
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08748E-4
ql1_vset=
ql1_vmon=-7.56121E-1
ql1_imon=1.40232E-8
ql2_vset=
ql2_vmon=-7.34544E-1
ql2_imon=1.99424E-9
ql3_vset=
ql3_vmon=-9.19554E0
ql3_imon=9.74059E-11
ql4_vset=
ql4_vmon=-9.18977E0
ql4_imon=-1.86384E-10
mult1=-9.87765E-9
mult2=-2.81145E-9
rf_tmon=-5.08758E-3
rf_agc=3.33268E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.69456E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65619E0
bslens_imon=2.49725E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.194E1
lens5a_imon=1.99395E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=2.75961E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04522E1
cs_ea1_imon=2.59352E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36194E0
lens1_imon=2.75208E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64957E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03796E1
cs_ea2_imon=1.48993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.8926E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.21281E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.28481E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.38611E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.06379E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.18094E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.90485E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.21201E-8
tplens_vset=1.4E-1
tplens_vmon=1.66326E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.47365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98123E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=3.95274E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29339E0
ionrepsh_imon=1.75504E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.16631E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46859E0
os_ea2_imon=-8.51035E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06064E2
lens4b_imon=2.00386E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05833E-1
os_ef2bup_imon=-5.4342E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.37661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.22839E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73193E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68771E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.82687E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.28416E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.4746E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-7.13005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39005E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.5409E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.81886E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.24359E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58273E0
defgridb_imon=5.92693E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33328E1
os_fil1_imon=9.40924E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07419E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62486E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30911E1
cs_fil1_imon=9.9481E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63039E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63938E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76243E-2
os_fil2_imon=-2.79811E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.66182E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22024E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.02249E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-7.56311E-1	-7.34472E-1	-9.1953E0	-9.19001E0	4.3869E-3	9.45807E-2	2.73495E1	-3.26522E1	-3.26254E1	2.69407E1	1.19965E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.97963E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-7.56264E-1	-7.34758E-1	-9.19533E0	-9.19011E0	4.45843E-3	9.48668E-2	2.73293E1	-3.26616E1	-3.26076E1	2.66572E1	1.19967E-7	2.52364E-3	2.52364E-3	6.3074E-3	2.98696E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-7.56311E-1	-7.34758E-1	-9.19535E0	-9.19008E0	4.48227E-3	9.46045E-2	2.73092E1	-3.26903E1	-3.26457E1	2.67607E1	1.20005E-7	2.51642E-3	2.51642E-3	6.3074E-3	2.98161E-1
4.0E0	1.5E1	0.0E0	6.55E2	3.98E2	-2.09356E0	-7.56192E-1	-7.34854E-1	-9.19511E0	-9.18968E0	4.05312E-3	9.46522E-2	2.73207E1	-3.26609E1	-3.26134E1	2.69515E1	1.1974E-7	2.51393E-3	2.51393E-3	6.28103E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0934E0	-7.56288E-1	-7.34901E-1	-9.19554E0	-9.19003E0	4.12464E-3	9.49144E-2	2.73069E1	-3.26461E1	-3.26449E1	2.6764E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-7.56168E-1	-7.34687E-1	-9.19514E0	-9.18982E0	4.24385E-3	9.48429E-2	2.73081E1	-3.26633E1	-3.25737E1	2.70923E1	1.20209E-7	2.52276E-3	2.52276E-3	6.28056E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09286E0	-7.56121E-1	-7.34687E-1	-9.19526E0	-9.18975E0	4.3869E-3	9.49621E-2	2.73424E1	-3.26591E1	-3.26144E1	2.69151E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09317E0	-7.56025E-1	-7.34401E-1	-9.19518E0	-9.1903E0	4.29153E-3	9.48191E-2	2.73187E1	-3.26579E1	-3.2613E1	2.68767E1	1.19978E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.97499E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-7.56288E-1	-7.34639E-1	-9.1953E0	-9.18996E0	4.22001E-3	9.47475E-2	2.73069E1	-3.2593E1	-3.2608E1	2.68737E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09286E0	-7.56264E-1	-7.34591E-1	-9.19526E0	-9.19003E0	4.48227E-3	9.46283E-2	2.73496E1	-3.26747E1	-3.26296E1	2.66634E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9991E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-7.56407E-1	-7.34282E-1	-9.19521E0	-9.19034E0	4.02927E-3	9.45807E-2	2.73442E1	-3.26879E1	-3.26549E1	2.69061E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-7.56431E-1	-7.34878E-1	-9.19528E0	-9.18999E0	4.3869E-3	9.50098E-2	2.73442E1	-3.26488E1	-3.26212E1	2.68502E1	1.19872E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.01475E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-7.56431E-1	-7.34377E-1	-9.19518E0	-9.19025E0	4.45843E-3	9.49383E-2	2.72967E1	-3.26543E1	-3.26645E1	2.6768E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09325E0	-7.56383E-1	-7.34138E-1	-9.1954E0	-9.18992E0	4.33922E-3	9.50098E-2	2.73098E1	-3.26815E1	-3.26514E1	2.68761E1	1.20106E-7	2.51203E-3	2.51203E-3	6.29665E-3	3.0071E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09325E0	-7.56192E-1	-7.34568E-1	-9.19533E0	-9.19015E0	4.55379E-3	9.45091E-2	2.73333E1	-3.26729E1	-3.26236E1	2.67758E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.03027E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-7.56311E-1	-7.34663E-1	-9.1953E0	-9.18982E0	4.33922E-3	9.5129E-2	2.73315E1	-3.26488E1	-3.2653E1	2.69067E1	1.19601E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00302E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-7.56001E-1	-7.34782E-1	-9.19514E0	-9.18984E0	4.02927E-3	9.49621E-2	2.73093E1	-3.2644E1	-3.26278E1	2.6792E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-7.5624E-1	-7.34711E-1	-9.19514E0	-9.18975E0	4.62532E-3	9.48429E-2	2.73234E1	-3.26832E1	-3.26006E1	2.68268E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.98222E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-7.56311E-1	-7.34854E-1	-9.19523E0	-9.1898E0	4.52995E-3	9.49144E-2	2.73139E1	-3.26856E1	-3.26467E1	2.6819E1	1.20158E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-7.56121E-1	-7.34544E-1	-9.19554E0	-9.18977E0	4.48227E-3	9.50575E-2	2.73193E1	-3.26638E1	-3.2629E1	2.68771E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00453E-1
