[Scan]
initial_time=2016-01-18T22:17:22
final_time=2016-01-18T22:17:42
ip_count=19
run=1024
dataset=9
scan=702
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-7.56121E-1
ql1_imon=1.39996E-8
ql2_vset=
ql2_vmon=-7.34377E-1
ql2_imon=2.02794E-9
ql3_vset=
ql3_vmon=-9.19499E0
ql3_imon=7.86304E-11
ql4_vset=
ql4_vmon=-9.19023E0
ql4_imon=-2.17807E-10
mult1=-9.41393E-9
mult2=-2.70159E-9
rf_tmon=-5.28069E-3
rf_agc=3.3359E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.73407E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19851E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04844E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.77511E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.57356E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36655E0
lens1_imon=2.91988E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.94882E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03468E1
cs_ea2_imon=1.48523E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=2.91386E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.21601E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.26932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.429E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=1.16583E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.9364E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.90522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20394E0
olens4_imon=3.21578E-8
tplens_vset=1.4E-1
tplens_vmon=1.62221E0
tplens_imon=-4.57964E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26756E1
iondef3_imon=1.50469E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26499E1
iondef2_imon=1.54831E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98112E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.01796E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.73469E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44496E0
os_ea2_imon=-8.76138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71558E1
cs_ef2a_imon=3.1647E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03534E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6679E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11346E1
os_restr2_imon=3.39788E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.2845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73204E1
iondef1_imon=1.09229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67499E1
iondef4_imon=1.11116E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.86361E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.2815E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15837E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.40168E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86458E1
mask2_imon=-8.3554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=6.86009E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.2999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.30132E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.42504E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06855E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62714E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30927E1
cs_fil1_imon=9.96846E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6275E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63442E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95074E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.81181E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22013E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=3.01104E-1
chamber_ion_pmon=1.20142E-7
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9353E-1
res40_imon=-2.67717E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-7.5593E-1	-7.34639E-1	-9.19523E0	-9.18975E0	4.3869E-3	9.48906E-2	2.73315E1	-3.26368E1	-3.26002E1	2.68586E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-7.56073E-1	-7.3483E-1	-9.19516E0	-9.18996E0	4.07696E-3	9.46999E-2	2.73375E1	-3.26813E1	-3.26512E1	2.66379E1	1.20017E-7	2.5188E-3	2.5188E-3	6.28006E-3	2.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-7.56025E-1	-7.34591E-1	-9.19516E0	-9.1898E0	4.24385E-3	9.48429E-2	2.73195E1	-3.26314E1	-3.26242E1	2.6834E1	1.20137E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.0041E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-7.56192E-1	-7.34639E-1	-9.19526E0	-9.1897E0	4.17233E-3	9.47714E-2	2.73375E1	-3.26461E1	-3.26236E1	2.68939E1	1.20055E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-7.56311E-1	-7.34878E-1	-9.19523E0	-9.18982E0	4.05312E-3	9.51767E-2	2.73135E1	-3.26675E1	-3.26332E1	2.68202E1	1.19902E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-7.56431E-1	-7.34711E-1	-9.19523E0	-9.18982E0	4.02927E-3	9.5129E-2	2.73193E1	-3.26638E1	-3.26042E1	2.68629E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-7.56574E-1	-7.34401E-1	-9.19528E0	-9.19001E0	4.12464E-3	9.4986E-2	2.7355E1	-3.2641E1	-3.26284E1	2.68256E1	1.20158E-7	2.51417E-3	2.51417E-3	6.28592E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-7.56311E-1	-7.34687E-1	-9.19535E0	-9.19008E0	4.05312E-3	9.50336E-2	2.72949E1	-3.26326E1	-3.26386E1	2.69019E1	1.20017E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-7.56526E-1	-7.34615E-1	-9.19487E0	-9.18982E0	4.43459E-3	9.53436E-2	2.73303E1	-3.26615E1	-3.26302E1	2.67025E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.56717E-1	-7.34568E-1	-9.19495E0	-9.19023E0	4.55379E-3	9.4986E-2	2.73257E1	-3.26909E1	-3.2636E1	2.6786E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02396E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-7.56621E-1	-7.34425E-1	-9.19504E0	-9.18977E0	4.33922E-3	9.52244E-2	2.73129E1	-3.26807E1	-3.25972E1	2.7016E1	1.20106E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-7.56598E-1	-7.34735E-1	-9.19504E0	-9.18996E0	3.95775E-3	9.4986E-2	2.73411E1	-3.26915E1	-3.2629E1	2.70016E1	1.20017E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-7.5655E-1	-7.34544E-1	-9.19492E0	-9.19003E0	4.52995E-3	9.52482E-2	2.73502E1	-3.26651E1	-3.26585E1	2.68989E1	1.20017E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-7.56431E-1	-7.34735E-1	-9.19502E0	-9.18992E0	4.48227E-3	9.51767E-2	2.73099E1	-3.26627E1	-3.2608E1	2.69199E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-7.5655E-1	-7.34854E-1	-9.19478E0	-9.1902E0	4.48227E-3	9.52244E-2	2.73496E1	-3.26302E1	-3.25972E1	2.67535E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-7.56741E-1	-7.34711E-1	-9.19483E0	-9.18987E0	4.24385E-3	9.4986E-2	2.73213E1	-3.26464E1	-3.2641E1	2.6789E1	1.19913E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00041E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-7.56335E-1	-7.34639E-1	-9.19504E0	-9.18984E0	4.22001E-3	9.49621E-2	2.73293E1	-3.26514E1	-3.26313E1	2.69602E1	1.20069E-7	2.50898E-3	2.50898E-3	6.32386E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.56407E-1	-7.34472E-1	-9.19476E0	-9.19027E0	4.41074E-3	9.49144E-2	2.72856E1	-3.26225E1	-3.26077E1	2.68592E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-7.5624E-1	-7.34544E-1	-9.19478E0	-9.19023E0	4.33922E-3	9.49383E-2	2.73428E1	-3.2677E1	-3.26017E1	2.68893E1	1.19851E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-7.56121E-1	-7.34377E-1	-9.19499E0	-9.19023E0	4.29153E-3	9.4986E-2	2.73204E1	-3.26499E1	-3.26756E1	2.67499E1	1.20142E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.01104E-1
