[Scan]
initial_time=2016-01-18T22:17:49
final_time=2016-01-18T22:18:08
ip_count=19
run=1024
dataset=9
scan=703
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-7.56049E-1
ql1_imon=1.40089E-8
ql2_vset=
ql2_vmon=-7.34568E-1
ql2_imon=2.00694E-9
ql3_vset=
ql3_vmon=-9.19573E0
ql3_imon=1.01495E-10
ql4_vset=
ql4_vmon=-9.18989E0
ql4_imon=-1.98174E-10
mult1=-9.66486E-9
mult2=-2.78009E-9
rf_tmon=-4.69234E-3
rf_agc=3.30849E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.65384E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65064E0
bslens_imon=2.3539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1966E1
lens5a_imon=1.99053E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54106E1
cs_ef1b_imon=2.75586E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02065E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=2.59851E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36271E0
lens1_imon=2.77104E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64592E1
os_ef1alow_imon=2.96625E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03986E1
cs_ea2_imon=1.47396E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=2.90451E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.21131E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11481E1
os_restr1_imon=4.28224E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14749E1
os_ea1_imon=2.41254E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63753E1
os_ef1bup_imon=3.06523E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21038E0
cs_ionrep_imon=1.18335E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93643E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01854E1
cs_anode1_imon=2.90753E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.20062E-8
tplens_vset=1.4E-1
tplens_vmon=1.62173E0
tplens_imon=-4.75731E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26461E1
iondef3_imon=1.50768E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.56573E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.46999E-2
ql6_imon=4.00471E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2886E0
ionrepsh_imon=1.72529E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33657E1
lens5b_imon=2.14209E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74557E1
cs_ef2b_imon=3.12697E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44908E0
os_ea2_imon=-8.23352E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.15381E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07525E0
os_ef2alow_imon=-2.48578E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73563E-1
os_ef2bup_imon=-5.32111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=3.385E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.28955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01854E1
cs_anode2_imon=2.23779E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7337E1
iondef1_imon=1.11591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67323E1
iondef4_imon=1.0956E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.77039E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.2628E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1335E0
cs_ionaccel_imon=-1.76101E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.4734E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56528E1
einzel_imon=7.80528E-6
window_vset=0.0E0
window_vmon=2.62185E-1
window_imon=-9.08738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-6.63792E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.22059E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.45582E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.00854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3427E0
defgridb_imon=6.09082E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.42129E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07273E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62524E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.9552E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62618E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6327E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99127E-2
os_fil2_imon=-2.70014E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.75956E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34835E-1
cs_fil2_imon=-2.44289E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20332E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21949E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18405E-1
res40_imon=-2.47236E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=263
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09348E0	-7.55835E-1	-7.35044E-1	-9.19552E0	-9.19001E0	4.3869E-3	9.51052E-2	2.73305E1	-3.26579E1	-3.26201E1	2.67716E1	1.20042E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.01356E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-7.56311E-1	-7.34901E-1	-9.19578E0	-9.18999E0	4.19617E-3	9.48906E-2	2.73314E1	-3.26744E1	-3.26199E1	2.69436E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-7.56121E-1	-7.34758E-1	-9.19552E0	-9.18996E0	4.48227E-3	9.48429E-2	2.73532E1	-3.26654E1	-3.26173E1	2.68134E1	1.19978E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.0041E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-7.56168E-1	-7.3483E-1	-9.19521E0	-9.18989E0	4.43459E-3	9.50575E-2	2.73267E1	-3.26518E1	-3.26056E1	2.68493E1	1.19991E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-7.55906E-1	-7.34711E-1	-9.19559E0	-9.1897E0	4.3869E-3	9.50813E-2	2.73333E1	-3.26729E1	-3.26236E1	2.68581E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-7.56025E-1	-7.34496E-1	-9.19566E0	-9.18996E0	4.60148E-3	9.49383E-2	2.7311E1	-3.26431E1	-3.26142E1	2.68142E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-7.56192E-1	-7.34544E-1	-9.19571E0	-9.18977E0	4.76837E-3	9.51052E-2	2.73249E1	-3.26699E1	-3.2593E1	2.68779E1	1.19953E-7	2.51954E-3	2.51954E-3	6.28592E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.56192E-1	-7.34591E-1	-9.19545E0	-9.18982E0	4.673E-3	9.50575E-2	2.73117E1	-3.26663E1	-3.26056E1	2.68046E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00041E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.56502E-1	-7.34711E-1	-9.19554E0	-9.18975E0	4.48227E-3	9.53913E-2	2.73195E1	-3.26434E1	-3.26549E1	2.67577E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.56335E-1	-7.34591E-1	-9.1953E0	-9.19008E0	4.45843E-3	9.52721E-2	2.73147E1	-3.2638E1	-3.25978E1	2.6956E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-7.56454E-1	-7.34425E-1	-9.19564E0	-9.19001E0	4.50611E-3	9.52005E-2	2.73222E1	-3.26655E1	-3.26213E1	2.68773E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-7.56454E-1	-7.34711E-1	-9.19535E0	-9.19025E0	4.41074E-3	9.52721E-2	2.73201E1	-3.26392E1	-3.25984E1	2.68755E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.5624E-1	-7.34782E-1	-9.1954E0	-9.19018E0	4.22001E-3	9.52482E-2	2.72961E1	-3.26416E1	-3.26188E1	2.67019E1	1.20209E-7	2.51525E-3	2.51525E-3	6.28056E-3	3.00966E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-7.5624E-1	-7.34901E-1	-9.1954E0	-9.18996E0	4.57764E-3	9.52005E-2	2.73033E1	-3.26579E1	-3.26194E1	2.69019E1	1.19601E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.56335E-1	-7.34949E-1	-9.19569E0	-9.18982E0	4.43459E-3	9.51052E-2	2.73363E1	-3.26524E1	-3.26308E1	2.68484E1	1.20226E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-7.56121E-1	-7.35211E-1	-9.19554E0	-9.18968E0	4.86374E-3	9.51052E-2	2.73231E1	-3.26717E1	-3.26452E1	2.67121E1	1.20226E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.99E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-7.56145E-1	-7.35021E-1	-9.19559E0	-9.18987E0	4.62532E-3	9.47714E-2	2.73151E1	-3.26874E1	-3.25865E1	2.66538E1	1.20174E-7	2.51007E-3	2.51007E-3	6.29098E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-7.56145E-1	-7.34973E-1	-9.19549E0	-9.18975E0	4.55379E-3	9.51052E-2	2.73111E1	-3.26597E1	-3.26266E1	2.68208E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-7.55978E-1	-7.34782E-1	-9.19559E0	-9.18992E0	4.3869E-3	9.49383E-2	2.73187E1	-3.26461E1	-3.26225E1	2.69217E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-7.56049E-1	-7.34568E-1	-9.19573E0	-9.18989E0	4.43459E-3	9.46999E-2	2.7337E1	-3.26579E1	-3.26461E1	2.67323E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00197E-1
