[Scan]
initial_time=2016-01-18T22:18:15
final_time=2016-01-18T22:18:35
ip_count=19
run=1024
dataset=9
scan=704
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-7.56288E-1
ql1_imon=1.40571E-8
ql2_vset=
ql2_vmon=-7.34663E-1
ql2_imon=2.04314E-9
ql3_vset=
ql3_vmon=-9.19542E0
ql3_imon=1.07515E-10
ql4_vset=
ql4_vmon=-9.19008E0
ql4_imon=-1.98579E-10
mult1=-9.61758E-9
mult2=-2.68406E-9
rf_tmon=-4.9814E-3
rf_agc=3.34389E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.70525E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.98704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04841E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=2.76142E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=2.57248E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35754E0
lens1_imon=2.52333E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65029E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04045E1
cs_ea2_imon=1.48847E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=2.9117E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.2117E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11658E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.41819E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.19575E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93687E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.9117E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.20225E-8
tplens_vset=1.4E-1
tplens_vmon=1.64984E0
tplens_imon=-4.57964E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26124E1
iondef3_imon=1.48415E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.56057E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.46522E-2
ql6_imon=4.01964E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29716E0
ionrepsh_imon=1.73649E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.16404E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42033E0
os_ea2_imon=-7.71595E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71456E1
cs_ef2a_imon=3.1474E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04435E0
os_ef2alow_imon=-2.42129E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37958E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.38058E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.27261E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01599E1
cs_anode2_imon=2.23199E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6847E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=4.79673E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=7.25502E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16138E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-6.33718E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.3898E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.22059E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.53564E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.03313E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.17515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.41231E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06632E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62388E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.96558E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63964E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63458E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07971E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.80021E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.51793E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22051E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01881E-1
chamber_ion_pmon=1.20045E-7
chamber_cvt_pmon=2.51611E-3
foreline_cvt_pmon=2.51611E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.83629E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-7.5624E-1	-7.34496E-1	-9.19533E0	-9.18994E0	4.36306E-3	9.50813E-2	2.73252E1	-3.26891E1	-3.26189E1	2.66953E1	1.20122E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9978E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09379E0	-7.56335E-1	-7.34496E-1	-9.19526E0	-9.19001E0	4.57764E-3	9.49144E-2	2.73051E1	-3.26585E1	-3.26217E1	2.69169E1	1.20209E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-7.56073E-1	-7.34162E-1	-9.1954E0	-9.18999E0	4.41074E-3	9.51052E-2	2.7344E1	-3.26661E1	-3.26266E1	2.6843E1	1.19925E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00676E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0934E0	-7.55954E-1	-7.3452E-1	-9.19518E0	-9.19011E0	4.24385E-3	9.52244E-2	2.73165E1	-3.2644E1	-3.26146E1	2.68589E1	1.19749E-7	2.51203E-3	2.51203E-3	6.29128E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-7.56049E-1	-7.34663E-1	-9.19526E0	-9.18994E0	4.24385E-3	9.50336E-2	2.73147E1	-3.26801E1	-3.26524E1	2.68298E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-7.55978E-1	-7.35068E-1	-9.19502E0	-9.19032E0	4.07696E-3	9.4986E-2	2.73676E1	-3.26789E1	-3.26188E1	2.67331E1	1.20174E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09271E0	-7.56168E-1	-7.34854E-1	-9.19535E0	-9.19023E0	4.36306E-3	9.50575E-2	2.73145E1	-3.26502E1	-3.26136E1	2.70052E1	1.198E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-7.55978E-1	-7.34639E-1	-9.19528E0	-9.18996E0	4.12464E-3	9.49144E-2	2.72937E1	-3.26386E1	-3.25846E1	2.69217E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09294E0	-7.55835E-1	-7.34758E-1	-9.19514E0	-9.19006E0	4.26769E-3	9.50336E-2	2.73207E1	-3.26579E1	-3.26272E1	2.68929E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-7.55596E-1	-7.34615E-1	-9.19499E0	-9.18989E0	4.29153E-3	9.50336E-2	2.73195E1	-3.26657E1	-3.26206E1	2.6843E1	1.19809E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-7.55858E-1	-7.34997E-1	-9.19528E0	-9.18984E0	4.3869E-3	9.47952E-2	2.73254E1	-3.26405E1	-3.26179E1	2.68146E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-7.55835E-1	-7.34949E-1	-9.19528E0	-9.18994E0	4.22001E-3	9.47475E-2	2.72943E1	-3.26597E1	-3.2629E1	2.68827E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.56168E-1	-7.35116E-1	-9.19535E0	-9.19001E0	4.43459E-3	9.48429E-2	2.72824E1	-3.26297E1	-3.2686E1	2.68334E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-7.5624E-1	-7.35092E-1	-9.19518E0	-9.1897E0	4.52995E-3	9.50098E-2	2.73299E1	-3.26655E1	-3.2639E1	2.67842E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-7.56454E-1	-7.34949E-1	-9.19528E0	-9.18987E0	4.36306E-3	9.49383E-2	2.72997E1	-3.26681E1	-3.26326E1	2.68478E1	1.19861E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00041E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-7.56335E-1	-7.34687E-1	-9.19502E0	-9.1898E0	4.29153E-3	9.48429E-2	2.73482E1	-3.26626E1	-3.26006E1	2.68575E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00563E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-7.56216E-1	-7.34901E-1	-9.19509E0	-9.19003E0	4.41074E-3	9.4676E-2	2.73225E1	-3.26669E1	-3.26416E1	2.6792E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-7.56359E-1	-7.34711E-1	-9.19511E0	-9.19013E0	4.3869E-3	9.50098E-2	2.73114E1	-3.26562E1	-3.26232E1	2.68546E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-7.56335E-1	-7.34639E-1	-9.19502E0	-9.1902E0	4.29153E-3	9.48906E-2	2.7345E1	-3.26516E1	-3.2611E1	2.68363E1	1.19979E-7	2.52197E-3	2.52197E-3	6.3282E-3	3.00989E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-7.56288E-1	-7.34663E-1	-9.19542E0	-9.19008E0	4.31538E-3	9.46522E-2	2.73187E1	-3.26573E1	-3.26124E1	2.6847E1	1.20045E-7	2.51611E-3	2.51611E-3	6.3074E-3	3.01881E-1
