[Scan]
initial_time=2016-01-18T22:18:42
final_time=2016-01-18T22:19:01
ip_count=19
run=1024
dataset=9
scan=705
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-7.56049E-1
ql1_imon=1.39696E-8
ql2_vset=
ql2_vmon=-7.35116E-1
ql2_imon=2.01212E-9
ql3_vset=
ql3_vmon=-9.1949E0
ql3_imon=5.33938E-11
ql4_vset=
ql4_vmon=-9.19003E0
ql4_imon=-1.96898E-10
mult1=-9.40364E-9
mult2=-2.65596E-9
rf_tmon=-5.75264E-3
rf_agc=3.21133E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.7261E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19887E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=2.75601E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04778E1
cs_ea1_imon=2.59591E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33411E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.48703E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.90305E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.21226E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.27725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.41855E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=1.18277E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.90161E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.20246E-8
tplens_vset=1.4E-1
tplens_vmon=1.63122E0
tplens_imon=-2.59691E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.50109E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=4.01186E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=1.73757E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34054E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4714E0
os_ea2_imon=-8.68929E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.0072E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.1611E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.38202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.28162E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23848E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73234E1
iondef1_imon=1.10635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67308E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.78549E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.28351E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.49778E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92571E3
multa_neg_imon=7.66039E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.60414E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.55945E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56397E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.39819E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62603E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.95284E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62696E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63754E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98915E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.81052E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22013E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.79404E-1
res40_imon=-2.6195E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09309E0	-7.56192E-1	-7.34663E-1	-9.19526E0	-9.18992E0	4.36306E-3	9.48906E-2	2.73305E1	-3.26649E1	-3.26201E1	2.69001E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.0934E0	-7.56264E-1	-7.34425E-1	-9.1948E0	-9.18984E0	4.24385E-3	9.50575E-2	2.73413E1	-3.26491E1	-3.26429E1	2.69079E1	1.198E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-7.56192E-1	-7.34615E-1	-9.19495E0	-9.18987E0	4.26769E-3	9.46999E-2	2.73393E1	-3.26428E1	-3.26214E1	2.68016E1	1.19991E-7	2.51838E-3	2.51838E-3	6.29035E-3	3.03246E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09333E0	-7.56359E-1	-7.34663E-1	-9.19504E0	-9.1898E0	4.43459E-3	9.5129E-2	2.7355E1	-3.26717E1	-3.26224E1	2.68406E1	1.20092E-7	2.51814E-3	2.51814E-3	6.31269E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-7.56359E-1	-7.34711E-1	-9.19502E0	-9.18987E0	4.43459E-3	9.52005E-2	2.73351E1	-3.26458E1	-3.26554E1	2.68977E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09317E0	-7.56454E-1	-7.34591E-1	-9.19483E0	-9.18972E0	4.60148E-3	9.52721E-2	2.73303E1	-3.26452E1	-3.26212E1	2.68106E1	1.20278E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-7.56073E-1	-7.34806E-1	-9.19504E0	-9.18984E0	4.36306E-3	9.52482E-2	2.73087E1	-3.26609E1	-3.2614E1	2.68142E1	1.19861E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09325E0	-7.56192E-1	-7.34949E-1	-9.19502E0	-9.18984E0	4.43459E-3	9.51052E-2	2.72901E1	-3.26657E1	-3.26032E1	2.68412E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.97704E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-7.56216E-1	-7.34806E-1	-9.19502E0	-9.18972E0	3.98159E-3	9.51052E-2	2.72925E1	-3.26801E1	-3.2611E1	2.68334E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98222E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.5624E-1	-7.34448E-1	-9.19492E0	-9.19008E0	4.12464E-3	9.51767E-2	2.72921E1	-3.26614E1	-3.26331E1	2.68466E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-7.56025E-1	-7.34425E-1	-9.19487E0	-9.19001E0	4.43459E-3	9.50336E-2	2.73117E1	-3.26771E1	-3.26026E1	2.68647E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.97901E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-7.56216E-1	-7.34687E-1	-9.19518E0	-9.18987E0	4.48227E-3	9.53197E-2	2.73333E1	-3.26573E1	-3.26212E1	2.68388E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-7.56383E-1	-7.34854E-1	-9.19507E0	-9.18968E0	4.62532E-3	9.52005E-2	2.73532E1	-3.2739E1	-3.26356E1	2.67415E1	1.19913E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01347E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-7.56335E-1	-7.34854E-1	-9.19549E0	-9.1898E0	4.69685E-3	9.53197E-2	2.73315E1	-3.26362E1	-3.2635E1	2.67205E1	1.20174E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.97445E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-7.56288E-1	-7.34806E-1	-9.19528E0	-9.18968E0	4.57764E-3	9.54151E-2	2.73484E1	-3.26849E1	-3.26182E1	2.6968E1	1.19653E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-7.56431E-1	-7.34949E-1	-9.1953E0	-9.18989E0	4.45843E-3	9.50813E-2	2.73387E1	-3.26518E1	-3.2635E1	2.69638E1	1.20017E-7	2.52647E-3	2.52647E-3	6.3074E-3	2.98481E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-7.56359E-1	-7.34806E-1	-9.19526E0	-9.18999E0	4.79221E-3	9.53197E-2	2.72925E1	-3.26699E1	-3.26236E1	2.69247E1	1.20226E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-7.56407E-1	-7.35092E-1	-9.19533E0	-9.19011E0	4.45843E-3	9.52959E-2	2.73033E1	-3.26974E1	-3.26219E1	2.68991E1	1.19601E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-7.56216E-1	-7.34973E-1	-9.1953E0	-9.18989E0	4.36306E-3	9.54151E-2	2.73144E1	-3.26776E1	-3.26428E1	2.68671E1	1.20042E-7	2.52025E-3	2.52025E-3	6.30212E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-7.56049E-1	-7.35116E-1	-9.1949E0	-9.19003E0	4.22001E-3	9.52482E-2	2.73234E1	-3.26428E1	-3.26056E1	2.67308E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9892E-1
