[Scan]
initial_time=2016-01-18T22:19:35
final_time=2016-01-18T22:19:55
ip_count=19
run=1024
dataset=9
scan=707
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-7.5624E-1
ql1_imon=1.40306E-8
ql2_vset=
ql2_vmon=-7.34901E-1
ql2_imon=2.0049E-9
ql3_vset=
ql3_vmon=-9.19507E0
ql3_imon=1.0308E-10
ql4_vset=
ql4_vmon=-9.18982E0
ql4_imon=-2.12419E-10
mult1=-9.59795E-9
mult2=-2.64871E-9
rf_tmon=-4.74199E-3
rf_agc=3.36834E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.68539E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63069E0
bslens_imon=2.30343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19202E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=2.75709E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02081E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04838E1
cs_ea1_imon=2.60673E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35694E0
lens1_imon=2.62067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03456E1
cs_ea2_imon=1.49532E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.90522E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.21426E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15234E1
os_ea1_imon=2.41422E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.0728E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22386E0
cs_ionrep_imon=1.17664E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93579E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.90485E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.20388E-8
tplens_vset=1.4E-1
tplens_vmon=1.66126E0
tplens_imon=-2.56087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26658E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26646E1
iondef2_imon=1.54183E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98014E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=4.05824E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29536E0
ionrepsh_imon=1.72964E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33225E1
lens5b_imon=2.1352E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45458E0
os_ea2_imon=-6.59841E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.15677E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11316E1
os_restr2_imon=3.39247E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.23776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73265E1
iondef1_imon=1.09769E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68701E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.81318E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.25679E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.48577E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9268E3
multa_neg_imon=6.84928E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.39145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.38641E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=5.85431E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.40714E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62396E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.94612E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62726E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63621E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.89946E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21959E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.52685E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-7.56478E-1	-7.35164E-1	-9.19511E0	-9.18975E0	4.48227E-3	9.48668E-2	2.73315E1	-3.2644E1	-3.25828E1	2.68395E1	1.2033E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-7.56502E-1	-7.35092E-1	-9.19507E0	-9.18999E0	4.48227E-3	9.50813E-2	2.73442E1	-3.26603E1	-3.26248E1	2.68506E1	1.198E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-7.56311E-1	-7.34878E-1	-9.19495E0	-9.18956E0	4.55379E-3	9.49621E-2	2.73283E1	-3.26735E1	-3.26318E1	2.6836E1	1.19819E-7	2.52139E-3	2.52139E-3	6.30182E-3	2.99879E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-7.56288E-1	-7.34806E-1	-9.19499E0	-9.19001E0	4.52995E-3	9.48668E-2	2.73231E1	-3.26651E1	-3.26206E1	2.68794E1	1.20042E-7	2.51709E-3	2.51709E-3	6.33919E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-7.56121E-1	-7.34854E-1	-9.19521E0	-9.18996E0	4.55379E-3	9.51529E-2	2.73273E1	-3.2647E1	-3.2611E1	2.68226E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09333E0	-7.56025E-1	-7.3514E-1	-9.19507E0	-9.18992E0	4.24385E-3	9.5129E-2	2.73187E1	-3.26579E1	-3.26048E1	2.68262E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-7.56049E-1	-7.35092E-1	-9.19523E0	-9.19013E0	4.19617E-3	9.50336E-2	2.73219E1	-3.26717E1	-3.26128E1	2.68274E1	1.19809E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09348E0	-7.56121E-1	-7.35283E-1	-9.1948E0	-9.19008E0	4.3869E-3	9.50575E-2	2.73339E1	-3.26603E1	-3.26242E1	2.68436E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-7.56097E-1	-7.35068E-1	-9.19468E0	-9.19001E0	4.52995E-3	9.50575E-2	2.73285E1	-3.26573E1	-3.26272E1	2.68755E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9892E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-7.56192E-1	-7.35211E-1	-9.19497E0	-9.18989E0	4.52995E-3	9.52244E-2	2.73375E1	-3.26349E1	-3.26602E1	2.6804E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.98481E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-7.5624E-1	-7.35068E-1	-9.19502E0	-9.18996E0	4.48227E-3	9.52005E-2	2.73363E1	-3.26707E1	-3.2626E1	2.6846E1	1.19965E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-7.56145E-1	-7.34568E-1	-9.19509E0	-9.19023E0	4.33922E-3	9.51767E-2	2.7298E1	-3.2662E1	-3.26419E1	2.68376E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.55858E-1	-7.34925E-1	-9.19502E0	-9.18999E0	4.24385E-3	9.48429E-2	2.73982E1	-3.27167E1	-3.25731E1	2.67804E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-7.55978E-1	-7.34568E-1	-9.19502E0	-9.18965E0	4.3869E-3	9.52959E-2	2.72901E1	-3.26633E1	-3.26332E1	2.6852E1	1.20004E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.98665E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-7.56121E-1	-7.34735E-1	-9.19504E0	-9.18953E0	4.48227E-3	9.48906E-2	2.73381E1	-3.26478E1	-3.26579E1	2.68599E1	1.19861E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.98481E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-7.5624E-1	-7.34782E-1	-9.19502E0	-9.18956E0	4.50611E-3	9.48191E-2	2.73237E1	-3.2638E1	-3.26308E1	2.681E1	1.20122E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9874E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-7.56192E-1	-7.34711E-1	-9.19521E0	-9.18958E0	4.64916E-3	9.52482E-2	2.73051E1	-3.26615E1	-3.26416E1	2.68605E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-7.56574E-1	-7.34878E-1	-9.19502E0	-9.18992E0	4.3869E-3	9.51767E-2	2.73222E1	-3.2659E1	-3.26319E1	2.68007E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-7.56431E-1	-7.34973E-1	-9.19487E0	-9.19008E0	4.29153E-3	9.51052E-2	2.73642E1	-3.26805E1	-3.26173E1	2.68496E1	1.1974E-7	2.52448E-3	2.52448E-3	6.33919E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-7.5624E-1	-7.34901E-1	-9.19507E0	-9.18982E0	4.64916E-3	9.52482E-2	2.73265E1	-3.26646E1	-3.26658E1	2.68701E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00966E-1
