[Scan]
initial_time=2016-01-18T22:20:02
final_time=2016-01-18T22:20:21
ip_count=19
run=1024
dataset=9
scan=708
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-7.56621E-1
ql1_imon=1.40055E-8
ql2_vset=
ql2_vmon=-7.34949E-1
ql2_imon=2.01563E-9
ql3_vset=
ql3_vmon=-9.19535E0
ql3_imon=8.91805E-11
ql4_vset=
ql4_vmon=-9.1903E0
ql4_imon=-1.90961E-10
mult1=-9.14404E-9
mult2=-2.606E-9
rf_tmon=-5.9908E-3
rf_agc=3.18714E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.71108E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64369E0
bslens_imon=2.34E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2028E1
lens5a_imon=2.0093E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04864E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54096E1
cs_ef1b_imon=2.76149E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.0225E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04803E1
cs_ea1_imon=2.58809E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39689E0
lens1_imon=2.92747E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.49065E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=2.92622E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.21293E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11407E1
os_restr1_imon=4.26246E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14732E1
os_ea1_imon=2.40663E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62842E1
os_ef1bup_imon=3.0628E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21676E0
cs_ionrep_imon=1.16527E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91942E2
cs_nozzle_imon=1.93396E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02058E1
cs_anode1_imon=2.89147E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.20233E-8
tplens_vset=1.4E-1
tplens_vmon=1.67793E0
tplens_imon=-3.54064E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26285E1
iondef3_imon=1.50108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26578E1
iondef2_imon=1.548E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98207E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=3.97619E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28049E0
ionrepsh_imon=1.72772E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34011E1
lens5b_imon=2.15356E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74605E1
cs_ef2b_imon=3.12674E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44155E0
os_ea2_imon=-7.95542E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00678E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71437E1
cs_ef2a_imon=3.16323E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0395E0
os_ef2alow_imon=-2.64756E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81013E-1
os_ef2bup_imon=-5.31308E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11204E1
os_restr2_imon=3.38391E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.29233E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0152E1
cs_anode2_imon=2.22978E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.08741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69847E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.81248E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.28048E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14694E0
cs_ionaccel_imon=-1.56676E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56191E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=2.45488E-1
window_imon=-8.9951E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-7.15322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92677E3
multa_neg_imon=7.25535E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.36544E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.19973E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2528E0
defgridb_imon=6.1082E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33355E1
os_fil1_imon=9.4202E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0785E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62663E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.95082E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62233E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63894E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01615E-2
os_fil2_imon=-2.62864E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93552E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.726E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35645E-1
cs_fil2_imon=-2.57072E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.64013E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22136E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.99845E-1
chamber_ion_pmon=1.20293E-7
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.33345E-1
res40_imon=-2.65104E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-7.56359E-1	-7.35021E-1	-9.19521E0	-9.18987E0	4.48227E-3	9.44376E-2	2.73122E1	-3.26431E1	-3.26154E1	2.68923E1	1.1974E-7	2.51603E-3	2.51603E-3	6.33388E-3	3.01356E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-7.56264E-1	-7.34973E-1	-9.19483E0	-9.18984E0	4.26769E-3	9.50098E-2	2.73431E1	-3.26823E1	-3.26315E1	2.68118E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.56192E-1	-7.35021E-1	-9.19473E0	-9.18977E0	4.07696E-3	9.4986E-2	2.73234E1	-3.26703E1	-3.26337E1	2.68325E1	1.20084E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.98819E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-7.56478E-1	-7.34711E-1	-9.19473E0	-9.18968E0	4.48227E-3	9.48429E-2	2.7321E1	-3.26738E1	-3.26183E1	2.68064E1	1.19841E-7	2.52448E-3	2.52448E-3	6.33388E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-7.56311E-1	-7.34591E-1	-9.1948E0	-9.18987E0	4.45843E-3	9.47714E-2	2.73057E1	-3.26458E1	-3.26146E1	2.68124E1	1.19861E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-7.56216E-1	-7.34496E-1	-9.19502E0	-9.18999E0	4.43459E-3	9.50098E-2	2.7373E1	-3.26428E1	-3.26536E1	2.68845E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.56216E-1	-7.34806E-1	-9.1948E0	-9.18999E0	4.72069E-3	9.49144E-2	2.7333E1	-3.26306E1	-3.26049E1	2.68199E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0934E0	-7.56311E-1	-7.34878E-1	-9.1949E0	-9.18984E0	4.45843E-3	9.50575E-2	2.72994E1	-3.26585E1	-3.26228E1	2.68445E1	1.1988E-7	2.5199E-3	2.5199E-3	6.3282E-3	3.00989E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09279E0	-7.56407E-1	-7.34949E-1	-9.19478E0	-9.19013E0	4.3869E-3	9.4986E-2	2.73087E1	-3.26482E1	-3.26098E1	2.68154E1	1.19895E-7	2.51874E-3	2.51874E-3	6.32483E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09263E0	-7.56121E-1	-7.34949E-1	-9.1948E0	-9.18982E0	4.43459E-3	9.4986E-2	2.73364E1	-3.26691E1	-3.26508E1	2.68815E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09333E0	-7.56192E-1	-7.34711E-1	-9.19511E0	-9.18999E0	4.19617E-3	9.52005E-2	2.73393E1	-3.26705E1	-3.26368E1	2.68328E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-7.56288E-1	-7.34925E-1	-9.19521E0	-9.18972E0	4.26769E-3	9.50575E-2	2.73243E1	-3.26795E1	-3.26368E1	2.6807E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-7.56049E-1	-7.34806E-1	-9.19514E0	-9.18982E0	4.14848E-3	9.51052E-2	2.74144E1	-3.27474E1	-3.25665E1	2.68285E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-7.56216E-1	-7.3514E-1	-9.19485E0	-9.1898E0	4.33922E-3	9.52721E-2	2.737E1	-3.26703E1	-3.26331E1	2.68545E1	1.20278E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01609E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.56383E-1	-7.34901E-1	-9.19497E0	-9.1898E0	4.31538E-3	9.53197E-2	2.73243E1	-3.26585E1	-3.26272E1	2.68971E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-7.56216E-1	-7.35068E-1	-9.19538E0	-9.1897E0	4.07696E-3	9.5129E-2	2.73279E1	-3.26657E1	-3.26428E1	2.68142E1	1.20055E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.0071E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-7.56383E-1	-7.34806E-1	-9.19495E0	-9.19015E0	4.48227E-3	9.52721E-2	2.73198E1	-3.26756E1	-3.26154E1	2.68304E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-7.56431E-1	-7.34878E-1	-9.19499E0	-9.19032E0	4.3869E-3	9.51529E-2	2.73517E1	-3.26708E1	-3.26172E1	2.68366E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-7.56359E-1	-7.35188E-1	-9.19554E0	-9.18989E0	4.3869E-3	9.53674E-2	2.73451E1	-3.26469E1	-3.26747E1	2.67254E1	1.19902E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-7.56621E-1	-7.34949E-1	-9.19535E0	-9.1903E0	4.29153E-3	9.51529E-2	2.7321E1	-3.26578E1	-3.26285E1	2.69847E1	1.20293E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.99845E-1
