[Scan]
initial_time=2016-01-18T22:24:01
final_time=2016-01-18T22:24:21
ip_count=19
run=1024
dataset=9
scan=717
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-7.56264E-1
ql1_imon=1.40296E-8
ql2_vset=
ql2_vmon=-7.34901E-1
ql2_imon=2.00531E-9
ql3_vset=
ql3_vmon=-9.19511E0
ql3_imon=8.10027E-11
ql4_vset=
ql4_vmon=-9.18999E0
ql4_imon=-2.07555E-10
mult1=-1.28228E-8
mult2=-3.3893E-9
rf_tmon=-1.92489E-4
rf_agc=3.88011E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.67729E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68116E0
bslens_imon=2.3539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=2.00038E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.75169E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.0202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04447E1
cs_ea1_imon=2.60889E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30346E0
lens1_imon=2.76126E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.96144E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.47946E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.9099E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.20837E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11556E1
os_restr1_imon=4.27256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.41458E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63942E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21665E0
cs_ionrep_imon=1.16583E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91958E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.91386E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.2078E-8
tplens_vset=1.4E-1
tplens_vmon=1.65946E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26945E1
iondef3_imon=1.51154E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26957E1
iondef2_imon=1.56237E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98274E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.00008E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23708E0
ionrepsh_imon=1.73397E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33892E1
lens5b_imon=2.17197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44977E0
os_ea2_imon=-5.94952E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00392E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04014E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.39031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.27441E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.23488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73303E1
iondef1_imon=1.12473E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68761E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.78908E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.24031E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16678E0
cs_ionaccel_imon=-1.58877E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.78009E-1
window_imon=-8.1752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.86188E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=8.06775E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.651E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=6.73752E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16096E0
defgridb_imon=6.01653E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33331E1
os_fil1_imon=9.41315E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62264E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.952E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63351E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63551E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.96649E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22031E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99506E-1
chamber_ion_pmon=1.19979E-7
chamber_cvt_pmon=2.51575E-3
foreline_cvt_pmon=2.51575E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.04942E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-7.56001E-1	-7.34639E-1	-9.19528E0	-9.19013E0	4.74453E-3	9.49144E-2	2.73275E1	-3.26384E1	-3.26313E1	2.68267E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.55954E-1	-7.34687E-1	-9.19511E0	-9.18994E0	4.76837E-3	9.52244E-2	2.73682E1	-3.26585E1	-3.2635E1	2.6802E1	1.20055E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-7.56001E-1	-7.34472E-1	-9.19487E0	-9.18958E0	4.72069E-3	9.50336E-2	2.73399E1	-3.2682E1	-3.26349E1	2.68765E1	1.19913E-7	2.50898E-3	2.50898E-3	6.3074E-3	3.01609E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-7.56025E-1	-7.34496E-1	-9.19518E0	-9.18963E0	4.64916E-3	9.50813E-2	2.73105E1	-3.26735E1	-3.25894E1	2.68058E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-7.56168E-1	-7.34496E-1	-9.1953E0	-9.18975E0	4.673E-3	9.5129E-2	2.73118E1	-3.26814E1	-3.26232E1	2.68669E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.56288E-1	-7.34568E-1	-9.1954E0	-9.18989E0	4.88758E-3	9.49383E-2	2.73248E1	-3.26699E1	-3.26311E1	2.67686E1	1.20064E-7	2.52772E-3	2.52772E-3	6.32784E-3	3.00392E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-7.56216E-1	-7.34735E-1	-9.19511E0	-9.19015E0	4.45843E-3	9.52482E-2	2.73143E1	-3.26438E1	-3.26168E1	2.69457E1	1.19907E-7	2.51911E-3	2.51911E-3	6.34301E-3	2.99634E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-7.56216E-1	-7.34687E-1	-9.19499E0	-9.18968E0	4.45843E-3	9.50575E-2	2.73141E1	-3.26561E1	-3.26212E1	2.67698E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-7.56025E-1	-7.34997E-1	-9.1948E0	-9.18984E0	4.673E-3	9.49383E-2	2.73174E1	-3.26484E1	-3.25986E1	2.68429E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-7.56168E-1	-7.34806E-1	-9.19538E0	-9.18977E0	4.98295E-3	9.50336E-2	2.73417E1	-3.26795E1	-3.26194E1	2.68983E1	1.20016E-7	2.51752E-3	2.51752E-3	6.32784E-3	2.98696E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.56335E-1	-7.34806E-1	-9.19547E0	-9.18968E0	4.91142E-3	9.53674E-2	2.73577E1	-3.26438E1	-3.25985E1	2.67188E1	1.20174E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-7.56407E-1	-7.34782E-1	-9.19521E0	-9.19003E0	4.86374E-3	9.50575E-2	2.73562E1	-3.26807E1	-3.25809E1	2.69049E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.01475E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-7.56454E-1	-7.34878E-1	-9.19521E0	-9.18977E0	4.8399E-3	9.47475E-2	2.73051E1	-3.26832E1	-3.26207E1	2.684E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-7.56502E-1	-7.34973E-1	-9.19504E0	-9.18994E0	4.79221E-3	9.46999E-2	2.73387E1	-3.26374E1	-3.2641E1	2.69001E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.03545E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-7.56431E-1	-7.35092E-1	-9.19495E0	-9.1898E0	4.55379E-3	9.49621E-2	2.72997E1	-3.26777E1	-3.26422E1	2.68088E1	1.19809E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-7.5655E-1	-7.35068E-1	-9.19485E0	-9.18992E0	4.57764E-3	9.48906E-2	2.73303E1	-3.26506E1	-3.26026E1	2.68406E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9926E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.0934E0	-7.56454E-1	-7.34949E-1	-9.1948E0	-9.18989E0	4.26769E-3	9.47237E-2	2.73153E1	-3.2644E1	-3.26224E1	2.6819E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-7.56216E-1	-7.34687E-1	-9.19485E0	-9.18968E0	4.1008E-3	9.49383E-2	2.73255E1	-3.26512E1	-3.2605E1	2.68154E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-7.5624E-1	-7.34663E-1	-9.1949E0	-9.18999E0	4.64916E-3	9.51529E-2	2.73586E1	-3.26807E1	-3.25936E1	2.68188E1	1.19861E-7	2.50898E-3	2.50898E-3	6.29645E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-7.56264E-1	-7.34901E-1	-9.19511E0	-9.18999E0	4.52995E-3	9.49144E-2	2.73303E1	-3.26957E1	-3.26945E1	2.68761E1	1.19979E-7	2.51575E-3	2.51575E-3	6.3074E-3	2.99506E-1
