[Scan]
initial_time=2016-01-18T22:24:28
final_time=2016-01-18T22:24:48
ip_count=19
run=1024
dataset=9
scan=718
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08736E-4
ql1_vset=
ql1_vmon=-7.56121E-1
ql1_imon=1.40392E-8
ql2_vset=
ql2_vmon=-7.34711E-1
ql2_imon=2.01026E-9
ql3_vset=
ql3_vmon=-9.19552E0
ql3_imon=1.01137E-10
ql4_vset=
ql4_vmon=-9.19006E0
ql4_imon=-2.10822E-10
mult1=-1.30997E-8
mult2=-2.59685E-9
rf_tmon=-4.6286E-4
rf_agc=3.9474E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.7141E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19418E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04714E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54026E1
cs_ef1b_imon=2.74586E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.60024E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35033E0
lens1_imon=2.84417E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6473E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03834E1
cs_ea2_imon=1.49929E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84545E1
cs_ef1a_imon=2.90745E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.20697E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11309E1
os_restr1_imon=4.28644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.41278E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63409E1
os_ef1bup_imon=3.05967E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.17628E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01746E1
cs_anode1_imon=2.91753E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.21024E-8
tplens_vset=1.4E-1
tplens_vmon=1.61319E0
tplens_imon=-2.20037E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27858E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2599E1
iondef2_imon=1.54976E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98043E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.02848E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.323E0
ionrepsh_imon=1.73433E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33381E1
lens5b_imon=2.15611E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74576E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41372E0
os_ea2_imon=-7.5357E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.17123E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01807E0
os_ef2alow_imon=-2.63366E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74062E-1
os_ef2bup_imon=-5.18797E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11361E1
os_restr2_imon=3.39468E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.2336E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71837E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.09824E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=4.8283E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.27081E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14694E0
cs_ionaccel_imon=-1.70577E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47348E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5648E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=2.55914E-1
window_imon=-9.89867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39101E-4
mask2_vset=0.0E0
mask2_vmon=-1.86193E1
mask2_imon=-7.15322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.29269E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.74834E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.09802E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=5.91199E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.43607E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06901E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.96037E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62522E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63225E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00233E-2
os_fil2_imon=-2.79661E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.77314E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-2.71552E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21906E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.71949E-1
res40_imon=-2.63366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-7.56502E-1	-7.34806E-1	-9.19545E0	-9.19037E0	4.72069E-3	9.48906E-2	2.73263E1	-3.26667E1	-3.2606E1	2.68556E1	1.20055E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.9841E-1
2.0E0	3.3E1	1.0E0	3.16E2	1.6E2	-2.09464E0	-7.56526E-1	-7.34663E-1	-9.19564E0	-9.19018E0	4.72069E-3	9.51529E-2	2.73291E1	-3.26597E1	-3.26404E1	2.68226E1	1.19653E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.56621E-1	-7.34591E-1	-9.19514E0	-9.19023E0	4.76837E-3	9.52482E-2	2.73291E1	-3.26603E1	-3.26362E1	2.68208E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-7.56431E-1	-7.34568E-1	-9.19535E0	-9.19018E0	4.76837E-3	9.50813E-2	2.73237E1	-3.27023E1	-3.26681E1	2.68502E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9978E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-7.56359E-1	-7.34782E-1	-9.19557E0	-9.19018E0	5.07832E-3	9.48668E-2	2.73511E1	-3.26638E1	-3.26319E1	2.68001E1	1.20158E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-7.56145E-1	-7.34854E-1	-9.19526E0	-9.18984E0	4.93526E-3	9.49621E-2	2.73027E1	-3.2659E1	-3.26189E1	2.68508E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-7.56097E-1	-7.34568E-1	-9.19538E0	-9.19003E0	5.19753E-3	9.49383E-2	2.73541E1	-3.2675E1	-3.26189E1	2.68358E1	1.20158E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-7.56073E-1	-7.34758E-1	-9.19528E0	-9.1898E0	4.93526E-3	9.50575E-2	2.72979E1	-3.2623E1	-3.26302E1	2.68736E1	1.19851E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09364E0	-7.56192E-1	-7.34472E-1	-9.19535E0	-9.18975E0	4.98295E-3	9.47714E-2	2.73111E1	-3.26609E1	-3.26176E1	2.6825E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-7.56073E-1	-7.34758E-1	-9.19523E0	-9.18984E0	4.88758E-3	9.50575E-2	2.73442E1	-3.26633E1	-3.25695E1	2.68354E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-7.5624E-1	-7.34568E-1	-9.19504E0	-9.1898E0	4.74453E-3	9.50336E-2	2.72961E1	-3.26753E1	-3.26434E1	2.6819E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-7.56121E-1	-7.34425E-1	-9.19495E0	-9.18996E0	5.126E-3	9.49621E-2	2.73139E1	-3.26691E1	-3.2606E1	2.67944E1	1.19861E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-7.56335E-1	-7.34615E-1	-9.19507E0	-9.18992E0	4.72069E-3	9.50098E-2	2.73081E1	-3.26398E1	-3.26428E1	2.68713E1	1.20055E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-7.56311E-1	-7.34901E-1	-9.19526E0	-9.19001E0	4.60148E-3	9.52482E-2	2.73015E1	-3.26657E1	-3.26591E1	2.67902E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-7.56145E-1	-7.3452E-1	-9.19528E0	-9.18977E0	4.673E-3	9.50336E-2	2.73517E1	-3.2688E1	-3.26714E1	2.68215E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09333E0	-7.56168E-1	-7.34568E-1	-9.19516E0	-9.18977E0	5.05447E-3	9.52244E-2	2.7308E1	-3.26891E1	-3.25983E1	2.67776E1	1.19809E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9978E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-7.56311E-1	-7.34711E-1	-9.19528E0	-9.1898E0	4.673E-3	9.49383E-2	2.73284E1	-3.26854E1	-3.26321E1	2.68743E1	1.19749E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01995E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-7.5624E-1	-7.34639E-1	-9.19526E0	-9.18977E0	4.52995E-3	9.49144E-2	2.73505E1	-3.26602E1	-3.26496E1	2.6831E1	1.19978E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00676E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09325E0	-7.56121E-1	-7.34544E-1	-9.19549E0	-9.18987E0	4.69685E-3	9.49621E-2	2.73149E1	-3.26851E1	-3.26335E1	2.68441E1	1.20023E-7	2.51458E-3	2.51458E-3	6.31274E-3	3.0002E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-7.56121E-1	-7.34711E-1	-9.19552E0	-9.19006E0	4.76837E-3	9.51052E-2	2.71837E1	-3.2599E1	-3.27858E1	2.67968E1					
