[Scan]
initial_time=2016-01-18T22:24:55
final_time=2016-01-18T22:25:14
ip_count=19
run=1024
dataset=9
scan=719
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-7.55835E-1
ql1_imon=1.39456E-8
ql2_vset=
ql2_vmon=-7.34711E-1
ql2_imon=1.9742E-9
ql3_vset=
ql3_vmon=-9.19545E0
ql3_imon=7.22408E-11
ql4_vset=
ql4_vmon=-9.19015E0
ql4_imon=-2.18999E-10
mult1=-9.18017E-9
mult2=-3.662E-9
rf_tmon=-1.02374E-2
rf_agc=2.74514E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.69241E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63023E0
bslens_imon=2.1787E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19618E1
lens5a_imon=1.99996E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.75205E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04734E1
cs_ea1_imon=2.59458E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35191E0
lens1_imon=2.70607E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65095E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.48533E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.90449E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.21079E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.27797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.42469E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62842E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26272E0
cs_ionrep_imon=1.18554E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93562E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.91242E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.20015E-8
tplens_vset=1.4E-1
tplens_vmon=1.68391E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25446E1
iondef3_imon=1.49984E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27918E1
iondef2_imon=1.55081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.9808E-4
ql6_vset=1.0E-1
ql6_vmon=9.47475E-2
ql6_imon=4.00118E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28218E0
ionrepsh_imon=1.72035E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34153E1
lens5b_imon=2.16454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45502E0
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04194E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67991E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1122E1
os_restr2_imon=3.38598E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.23524E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74715E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69007E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.7879E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.27416E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.57972E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-7.34629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-5.25599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.27191E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.59234E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.47365E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32583E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.40726E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07047E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62448E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.92653E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62864E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63382E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83841E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.87064E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37047E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21821E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19358E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=224
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-7.56288E-1	-7.34925E-1	-9.19485E0	-9.18984E0	4.673E-3	9.50098E-2	2.73451E1	-3.26556E1	-3.26312E1	2.67543E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00563E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-7.55978E-1	-7.34687E-1	-9.19487E0	-9.18972E0	4.72069E-3	9.50336E-2	2.7297E1	-3.26728E1	-3.26085E1	2.70316E1	1.19991E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.00852E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-7.56168E-1	-7.34782E-1	-9.19504E0	-9.18994E0	4.93526E-3	9.49383E-2	2.73196E1	-3.26816E1	-3.26277E1	2.69831E1	1.20154E-7	2.51838E-3	2.51838E-3	6.3131E-3	3.01609E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-7.56383E-1	-7.34878E-1	-9.19507E0	-9.18977E0	4.8399E-3	9.49383E-2	2.73315E1	-3.26302E1	-3.26134E1	2.6804E1	1.20243E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-7.5624E-1	-7.34782E-1	-9.19499E0	-9.19001E0	4.72069E-3	9.52005E-2	2.73345E1	-3.27011E1	-3.2641E1	2.68298E1	1.19913E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-7.56192E-1	-7.35211E-1	-9.19483E0	-9.18996E0	4.45843E-3	9.50336E-2	2.73616E1	-3.26807E1	-3.2638E1	2.68508E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-7.56335E-1	-7.34758E-1	-9.19514E0	-9.19008E0	4.43459E-3	9.48906E-2	2.73201E1	-3.26735E1	-3.2587E1	2.68269E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09333E0	-7.56335E-1	-7.35068E-1	-9.1949E0	-9.18972E0	4.52995E-3	9.50098E-2	2.73207E1	-3.26585E1	-3.26158E1	2.68354E1	1.19925E-7	2.51136E-3	2.51136E-3	6.29624E-3	2.99613E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-7.56001E-1	-7.34878E-1	-9.19528E0	-9.18968E0	4.48227E-3	9.51529E-2	2.73257E1	-3.26526E1	-3.25942E1	2.68334E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.98222E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.56121E-1	-7.34758E-1	-9.19538E0	-9.19001E0	4.72069E-3	9.47714E-2	2.7275E1	-3.26413E1	-3.26343E1	2.68448E1	1.20192E-7	2.51498E-3	2.51498E-3	6.29157E-3	2.99594E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-7.55835E-1	-7.34758E-1	-9.1954E0	-9.19025E0	4.673E-3	9.49621E-2	2.73315E1	-3.26488E1	-3.2644E1	2.68028E1	1.19913E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09309E0	-7.56097E-1	-7.34949E-1	-9.19552E0	-9.19018E0	4.74453E-3	9.50098E-2	2.73455E1	-3.26542E1	-3.25966E1	2.68526E1	1.2033E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09333E0	-7.56121E-1	-7.34806E-1	-9.19516E0	-9.18996E0	4.673E-3	9.48906E-2	2.73195E1	-3.26609E1	-3.26512E1	2.6828E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01209E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-7.56454E-1	-7.34901E-1	-9.19504E0	-9.19008E0	4.64916E-3	9.48429E-2	2.73429E1	-3.26524E1	-3.2593E1	2.68863E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99941E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-7.55954E-1	-7.3483E-1	-9.19507E0	-9.19013E0	4.33922E-3	9.4986E-2	2.73228E1	-3.26531E1	-3.26608E1	2.67828E1	1.20226E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.98481E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.56145E-1	-7.34591E-1	-9.19523E0	-9.19013E0	4.43459E-3	9.49144E-2	2.73646E1	-3.26681E1	-3.2635E1	2.68371E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-7.55906E-1	-7.34758E-1	-9.19507E0	-9.19018E0	4.69685E-3	9.46999E-2	2.73207E1	-3.26296E1	-3.26302E1	2.68382E1	1.19749E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.98665E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.55954E-1	-7.34782E-1	-9.19523E0	-9.19015E0	4.45843E-3	9.50336E-2	2.73116E1	-3.26915E1	-3.26472E1	2.6813E1	1.20297E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00676E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-7.55954E-1	-7.34901E-1	-9.1954E0	-9.19008E0	4.60148E-3	9.50098E-2	2.73772E1	-3.26597E1	-3.26603E1	2.68064E1	1.2026E-7	2.51632E-3	2.51632E-3	6.35059E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-7.55835E-1	-7.34711E-1	-9.19545E0	-9.19015E0	4.57764E-3	9.47475E-2	2.74715E1	-3.27918E1	-3.25446E1	2.69007E1	1.19902E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.0071E-1
