[Scan]
initial_time=2016-01-18T22:25:21
final_time=2016-01-18T22:25:48
ip_count=19
run=1024
dataset=9
scan=720
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08728E-4
ql1_vset=
ql1_vmon=-7.55858E-1
ql1_imon=1.40675E-8
ql2_vset=
ql2_vmon=-7.34758E-1
ql2_imon=2.02984E-9
ql3_vset=
ql3_vmon=-9.19538E0
ql3_imon=8.43763E-11
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-1.89161E-10
mult1=-1.21001E-8
mult2=-3.2524E-9
rf_tmon=-1.50103E-4
rf_agc=3.84943E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.686E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=2.75601E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=2.58762E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35514E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.95964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.48595E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84598E1
cs_ef1a_imon=2.90702E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.21021E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.26607E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15342E1
os_ea1_imon=2.42828E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6408E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24489E0
cs_ionrep_imon=1.17989E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.89873E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.20448E-8
tplens_vset=1.4E-1
tplens_vmon=1.64804E0
tplens_imon=-4.00285E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26844E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27145E1
iondef2_imon=1.55624E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98227E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.02409E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31278E0
ionrepsh_imon=1.73217E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33375E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42754E0
os_ea2_imon=-9.80682E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.1492E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04555E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.37301E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.27909E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73128E1
iondef1_imon=1.09085E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68448E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.77022E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.26373E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.28755E-1
window_imon=-8.96807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.13046E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.16651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44969E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33326E1
os_fil1_imon=9.41471E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06999E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62434E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.94996E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63051E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6364E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93784E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.81568E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21984E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.54797E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-7.55858E-1	-7.34806E-1	-9.19504E0	-9.18987E0	4.60148E-3	9.48191E-2	2.73246E1	-3.26673E1	-3.26378E1	2.68358E1	1.19713E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.98554E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09309E0	-7.55906E-1	-7.34639E-1	-9.1948E0	-9.18999E0	4.50611E-3	9.4533E-2	2.73088E1	-3.26438E1	-3.26566E1	2.68118E1	1.19991E-7	2.51077E-3	2.51077E-3	6.31798E-3	2.99594E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09286E0	-7.56145E-1	-7.34925E-1	-9.19507E0	-9.19015E0	4.60148E-3	9.46999E-2	2.73717E1	-3.26712E1	-3.26214E1	2.6801E1	1.20084E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.00942E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09294E0	-7.56145E-1	-7.34639E-1	-9.19526E0	-9.18996E0	4.55379E-3	9.48906E-2	2.73249E1	-3.26434E1	-3.26044E1	2.68833E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-7.56192E-1	-7.34758E-1	-9.19526E0	-9.18984E0	4.57764E-3	9.4986E-2	2.73315E1	-3.26741E1	-3.26494E1	2.68267E1	1.2014E-7	2.51538E-3	2.51538E-3	6.28843E-3	2.99088E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-7.56359E-1	-7.34782E-1	-9.19518E0	-9.18975E0	4.74453E-3	9.48191E-2	2.72967E1	-3.26494E1	-3.26284E1	2.68612E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-7.56121E-1	-7.34806E-1	-9.19495E0	-9.1897E0	4.64916E-3	9.49383E-2	2.73466E1	-3.26561E1	-3.26152E1	2.6846E1	1.19872E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-7.56192E-1	-7.34758E-1	-9.19528E0	-9.18999E0	4.64916E-3	9.50336E-2	2.73285E1	-3.26639E1	-3.26368E1	2.67403E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-7.56192E-1	-7.34878E-1	-9.19542E0	-9.19015E0	4.673E-3	9.50575E-2	2.73147E1	-3.26663E1	-3.26543E1	2.69211E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.56145E-1	-7.34711E-1	-9.19547E0	-9.18994E0	4.50611E-3	9.52005E-2	2.73285E1	-3.26536E1	-3.26014E1	2.67824E1	1.19757E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-7.56168E-1	-7.3514E-1	-9.19511E0	-9.18989E0	4.52995E-3	9.51052E-2	2.73363E1	-3.26783E1	-3.26356E1	2.68331E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-7.55978E-1	-7.34687E-1	-9.19528E0	-9.18982E0	4.3869E-3	9.47237E-2	2.73252E1	-3.26596E1	-3.26354E1	2.681E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-7.56025E-1	-7.34353E-1	-9.19509E0	-9.19001E0	4.41074E-3	9.47475E-2	2.73369E1	-3.26476E1	-3.26308E1	2.68208E1	1.20055E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.99941E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-7.56168E-1	-7.34353E-1	-9.1954E0	-9.18965E0	4.62532E-3	9.49144E-2	2.73169E1	-3.26773E1	-3.26166E1	2.68458E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01347E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09317E0	-7.56168E-1	-7.34782E-1	-9.19526E0	-9.18984E0	4.33922E-3	9.50813E-2	2.72961E1	-3.26326E1	-3.26236E1	2.68724E1	1.20363E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-7.55811E-1	-7.34496E-1	-9.1954E0	-9.18992E0	4.45843E-3	9.47237E-2	2.73394E1	-3.26585E1	-3.26064E1	2.68466E1	1.19809E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.01085E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-7.55692E-1	-7.34544E-1	-9.19538E0	-9.19011E0	4.57764E-3	9.4986E-2	2.73293E1	-3.26744E1	-3.26472E1	2.681E1	1.20122E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-7.55668E-1	-7.34425E-1	-9.19523E0	-9.18958E0	4.76837E-3	9.50813E-2	2.73141E1	-3.26512E1	-3.26104E1	2.68238E1	1.19913E-7	2.52757E-3	2.52757E-3	6.31837E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-7.55739E-1	-7.3452E-1	-9.19526E0	-9.18989E0	4.81606E-3	9.49621E-2	2.73234E1	-3.26461E1	-3.26172E1	2.68454E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-7.55858E-1	-7.34758E-1	-9.19538E0	-9.18987E0	4.8399E-3	9.51052E-2	2.73128E1	-3.27145E1	-3.26844E1	2.68448E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01738E-1
