[Scan]
initial_time=2016-01-18T22:28:10
final_time=2016-01-18T22:28:39
ip_count=19
run=1024
dataset=10
scan=724
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.07733E-2
qbias_imon=-3.77229E-6
ql1_vset=
ql1_vmon=-8.79992E1
ql1_imon=-1.26374E-9
ql2_vset=
ql2_vmon=1.43051E-4
ql2_imon=1.45518E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-4.31067E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.6314E-8
mult1=-1.66633E-8
mult2=-2.15295E-9
rf_tmon=-6.63902E-3
rf_agc=2.93863E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=6.11961E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68214E0
bslens_imon=2.33443E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19529E1
lens5a_imon=1.99536E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04863E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54339E1
cs_ef1b_imon=2.75142E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02029E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04746E1
cs_ea1_imon=2.59706E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97874E0
lens1_imon=1.52037E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64713E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03643E1
cs_ea2_imon=1.5094E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=2.90989E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.20835E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11401E1
os_restr1_imon=4.2708E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15471E1
os_ea1_imon=2.42434E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63184E1
os_ef1bup_imon=3.06732E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.18484E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91918E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=2.89564E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.93319E-8
tplens_vset=1.4E-1
tplens_vmon=1.65146E0
tplens_imon=-4.19227E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24998E1
iondef3_imon=1.48604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26201E1
iondef2_imon=1.55081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98187E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=9.45258E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30696E0
ionrepsh_imon=1.74866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.16101E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7453E1
cs_ef2b_imon=3.11771E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41963E0
os_ea2_imon=-8.08562E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71565E1
cs_ef2a_imon=3.16358E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04529E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89122E-1
os_ef2bup_imon=-5.24705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11291E1
os_restr2_imon=3.378E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.27026E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73806E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68007E1
iondef4_imon=1.08642E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.89552E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.24938E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14983E0
cs_ionaccel_imon=-1.7301E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.4748E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.45152E-6
window_vset=0.0E0
window_vmon=2.63443E-1
window_imon=-8.50857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39063E-4
mask2_vset=0.0E0
mask2_vmon=-1.86327E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.70726E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.79055E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.14803E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3967E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.41111E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07723E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62453E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3093E1
cs_fil1_imon=9.94039E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62551E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63551E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.6576E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.72004E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.32745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21929E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30182E-3
inlet_lpb_pmon=2.97762E-1
chamber_ion_pmon=1.20084E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.14607E-1
res40_imon=-2.45295E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.889E3	1.0E0	1.47E2	4.1E1	-7.17007E-2	-8.79995E1	-7.15256E-5	-8.80013E1	5.72205E-4	4.29153E-3	9.47714E-2	2.73562E1	-3.26699E1	-3.2617E1	2.68563E1	1.20004E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00197E-1
2.0E0	9.8534E4	1.0E2	3.16E2	1.6E2	-7.17779E-2	-8.79994E1	-9.53674E-5	-8.80013E1	2.86102E-4	4.24385E-3	9.50336E-2	2.73137E1	-3.26701E1	-3.26395E1	2.68307E1	1.19601E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.7999E1	-1.19209E-4	-8.80014E1	3.57628E-4	4.14848E-3	9.49383E-2	2.73312E1	-3.26417E1	-3.2626E1	2.68383E1	1.20137E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.99613E-1
4.0E0	2.1477E4	1.5E1	6.55E2	3.98E2	-7.19325E-2	-8.79994E1	-2.38419E-5	-8.80014E1	5.96046E-4	4.24385E-3	9.49144E-2	2.73175E1	-3.26378E1	-3.26101E1	2.68334E1	1.1979E-7	2.52236E-3	2.52236E-3	6.33388E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13915E-2	-8.79993E1	-1.66893E-4	-8.80013E1	6.67572E-4	4.3869E-3	9.52244E-2	2.72937E1	-3.26597E1	-3.26218E1	2.68496E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.79993E1	-2.14577E-4	-8.80013E1	5.48363E-4	4.33922E-3	9.54866E-2	2.73225E1	-3.26422E1	-3.2632E1	2.68165E1	1.20226E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10825E-2	-8.79991E1	-2.14577E-4	-8.80013E1	5.24521E-4	4.62532E-3	9.54628E-2	2.73057E1	-3.26679E1	-3.26437E1	2.68106E1	1.20226E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.11597E-2	-8.79993E1	-4.29153E-4	-8.80012E1	3.8147E-4	4.48227E-3	9.53674E-2	2.73205E1	-3.26533E1	-3.25833E1	2.68858E1	1.20363E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01223E-1
1.2E1	9.0E1	0.0E0	4.85E2	3.23E2	-7.13143E-2	-8.79993E1	-2.86102E-4	-8.80014E1	7.15256E-4	4.31538E-3	9.53436E-2	2.73233E1	-3.26539E1	-3.26455E1	2.683E1	1.1988E-7	2.51783E-3	2.51783E-3	6.33863E-3	3.01237E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.12368E-2	-8.79989E1	-1.43051E-4	-8.80012E1	6.91414E-4	4.8399E-3	9.49383E-2	2.73057E1	-3.26615E1	-3.26206E1	2.68448E1	1.1995E-7	2.52106E-3	2.52106E-3	6.32483E-3	3.0147E-1
1.4E1	3.215E3	4.0E0	5.66E2	3.82E2	-7.12368E-2	-8.79992E1	-4.05312E-4	-8.80014E1	7.62939E-4	4.62532E-3	9.52244E-2	2.73021E1	-3.26537E1	-3.26113E1	2.68502E1	1.20017E-7	2.50898E-3	2.50898E-3	6.31288E-3	3.00041E-1
1.5E1	9.0E1	1.0E0	6.06E2	4.11E2	-7.18554E-2	-8.79992E1	-2.6226E-4	-8.80014E1	6.67572E-4	4.69685E-3	9.50575E-2	2.72955E1	-3.26729E1	-3.2647E1	2.68208E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
1.6E1	4.11E2	0.0E0	6.47E2	4.41E2	-7.16233E-2	-8.79993E1	-1.43051E-4	-8.80015E1	4.29153E-4	4.57764E-3	9.4986E-2	2.73387E1	-3.26667E1	-3.26278E1	2.68571E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
1.7E1	7.46E2	1.0E0	6.87E2	4.7E2	-7.09279E-2	-8.79995E1	-1.66893E-4	-8.80009E1	5.24521E-4	4.72069E-3	9.52005E-2	2.73363E1	-3.26909E1	-3.26332E1	2.67858E1	1.20383E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.00041E-1
1.8E1	3.286E3	4.0E0	7.27E2	5.0E2	-7.09279E-2	-8.79993E1	-1.43051E-4	-8.80009E1	5.72205E-4	4.72069E-3	9.52005E-2	2.73321E1	-3.26903E1	-3.25882E1	2.68671E1	1.19851E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00197E-1
1.9E1	1.911E3	0.0E0	7.68E2	5.29E2	-7.12368E-2	-8.79994E1	-1.90735E-4	-8.80011E1	5.72205E-4	4.33922E-3	9.50098E-2	2.73309E1	-3.26567E1	-3.26272E1	2.68531E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01085E-1
2.0E1	2.4696E4	1.5E1	8.08E2	5.58E2	-7.18554E-2	-8.79991E1	-2.6226E-4	-8.80011E1	5.24521E-4	4.26769E-3	9.52005E-2	2.73411E1	-3.26891E1	-3.2608E1	2.68018E1	1.19978E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.00144E-1
2.1E1	6.5E1	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.7999E1	7.15256E-5	-8.80012E1	9.53674E-5	4.05312E-3	9.50813E-2	2.73252E1	-3.26974E1	-3.26337E1	2.68304E1	1.20106E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.98665E-1
2.2E1	1.775E3	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.79994E1	-7.15256E-5	-8.80011E1	4.29153E-4	4.1008E-3	9.50813E-2	2.73375E1	-3.26645E1	-3.26284E1	2.68665E1	1.20363E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.98665E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.07733E-2	-8.79992E1	1.43051E-4	-8.80011E1	5.24521E-4	4.57764E-3	9.51529E-2	2.73806E1	-3.26201E1	-3.24998E1	2.68007E1	1.20084E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.97762E-1
