[Scan]
initial_time=2016-01-18T22:28:50
final_time=2016-01-18T22:29:18
ip_count=19
run=1024
dataset=10
scan=725
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.78226E-6
ql1_vset=
ql1_vmon=-8.79998E1
ql1_imon=-1.27345E-9
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.43453E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-4.01536E-9
ql4_vset=
ql4_vmon=5.96046E-4
ql4_imon=1.61706E-8
mult1=-2.41285E-8
mult2=-3.19354E-9
rf_tmon=2.13871E-3
rf_agc=4.13387E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.81527E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67635E0
bslens_imon=2.24936E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19604E1
lens5a_imon=1.99425E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=2.75529E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04874E1
cs_ea1_imon=2.59339E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96625E0
lens1_imon=1.53197E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.48919E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=2.89729E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.20875E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.29166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15216E1
os_ea1_imon=2.41531E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.19178E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.9364E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.90522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=3.92994E-8
tplens_vset=1.4E-1
tplens_vmon=1.63122E0
tplens_imon=-2.48877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27598E1
iondef3_imon=1.50253E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27245E1
iondef2_imon=1.54363E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98231E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=9.38559E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=1.73902E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33772E1
lens5b_imon=2.19072E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40591E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00673E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.16362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.00771E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.37914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.28162E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72848E1
iondef1_imon=1.0894E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67997E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.81515E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.26715E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.76536E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.70201E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86128E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92589E3
multa_neg_imon=7.22059E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.48518E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.33234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35946E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33326E1
os_fil1_imon=9.40366E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07245E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62351E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30928E1
cs_fil1_imon=9.95422E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63622E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.89915E-2
os_fil2_imon=-2.84617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.75252E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.27767E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21991E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35692E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.91127E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.861E3	0.0E0	1.47E2	4.1E1	-7.11597E-2	-8.79997E1	-4.76837E-5	-8.80012E1	6.19888E-4	4.48227E-3	9.52959E-2	2.73303E1	-3.26476E1	-3.26603E1	2.67986E1	1.20297E-7	2.52473E-3	2.52473E-3	6.34661E-3	3.01742E-1
2.0E0	9.926E4	8.0E1	3.16E2	1.6E2	-7.22418E-2	-8.79997E1	1.43051E-4	-8.80013E1	4.29153E-4	4.43459E-3	9.53674E-2	2.73496E1	-3.26248E1	-3.2617E1	2.68701E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00966E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.79999E1	1.19209E-4	-8.80012E1	7.15256E-5	4.673E-3	9.54151E-2	2.73159E1	-3.26669E1	-3.26158E1	2.6816E1	1.2035E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.00676E-1
4.0E0	2.1645E4	1.1E1	6.55E2	3.98E2	-7.24736E-2	-8.79996E1	0.0E0	-8.80011E1	4.76837E-4	4.17233E-3	9.51529E-2	2.72968E1	-3.26638E1	-3.26384E1	2.68667E1	1.19851E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.79993E1	-2.6226E-4	-8.80012E1	5.72205E-4	5.03063E-3	9.49144E-2	2.73033E1	-3.26861E1	-3.26176E1	2.68082E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.79995E1	-1.66893E-4	-8.80014E1	6.67572E-4	4.33922E-3	9.51529E-2	2.73144E1	-3.26637E1	-3.2615E1	2.68482E1	1.20435E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.79996E1	-7.15256E-5	-8.80011E1	4.29153E-4	4.48227E-3	9.48429E-2	2.73345E1	-3.26615E1	-3.26014E1	2.68375E1	1.20042E-7	2.52236E-3	2.52236E-3	6.31798E-3	3.01356E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.79996E1	-1.90735E-4	-8.80012E1	5.24521E-4	4.48227E-3	9.48429E-2	2.73225E1	-3.26206E1	-3.26026E1	2.68058E1	1.20137E-7	2.51136E-3	2.51136E-3	6.29624E-3	3.01209E-1
1.2E1	6.5E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.79996E1	-1.90735E-4	-8.80009E1	5.72205E-4	4.88758E-3	9.48906E-2	2.73431E1	-3.26823E1	-3.26174E1	2.68593E1	1.20069E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01085E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.79995E1	-3.33786E-4	-8.80013E1	9.53674E-4	4.86374E-3	9.52959E-2	2.73134E1	-3.26679E1	-3.26378E1	2.68105E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.4E1	3.279E3	0.0E0	5.66E2	3.82E2	-7.16233E-2	-8.79995E1	-3.57628E-4	-8.80011E1	1.00136E-3	4.57764E-3	9.52244E-2	2.73393E1	-3.26615E1	-3.26374E1	2.68316E1	1.20004E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.0071E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.79997E1	-2.6226E-4	-8.80013E1	6.4373E-4	4.62532E-3	9.50813E-2	2.73309E1	-3.26699E1	-3.26176E1	2.68388E1	1.20017E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.9952E-1
1.6E1	3.88E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.79994E1	-2.6226E-4	-8.80014E1	7.15256E-4	4.52995E-3	9.49383E-2	2.7334E1	-3.26561E1	-3.26284E1	2.68514E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.99E-1
1.7E1	8.2E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.79997E1	-1.66893E-4	-8.80013E1	7.62939E-4	4.45843E-3	9.50098E-2	2.73405E1	-3.26639E1	-3.26284E1	2.68178E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.98156E-1
1.8E1	3.172E3	3.0E0	7.27E2	5.0E2	-7.17779E-2	-8.79997E1	-2.38419E-4	-8.80014E1	6.91414E-4	4.81606E-3	9.4986E-2	2.7321E1	-3.26425E1	-3.26402E1	2.68638E1	1.19965E-7	2.52154E-3	2.52154E-3	6.31837E-3	2.9887E-1
1.9E1	1.862E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.79996E1	-2.38419E-5	-8.80011E1	3.57628E-4	4.79221E-3	9.48429E-2	2.73424E1	-3.26699E1	-3.25996E1	2.68144E1					
2.0E1	2.4774E4	1.4E1	8.08E2	5.58E2	-7.17779E-2	-8.79997E1	-2.14577E-4	-8.80012E1	2.38419E-4	4.57764E-3	9.49621E-2	2.73375E1	-3.26685E1	-3.26201E1	2.68227E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.79996E1	-3.8147E-4	-8.80013E1	5.00679E-4	4.88758E-3	9.48906E-2	2.73351E1	-3.26735E1	-3.26398E1	2.68346E1	1.2003E-7	2.51525E-3	2.51525E-3	6.29934E-3	3.00582E-1
2.2E1	1.8E3	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.79995E1	-2.86102E-4	-8.8001E1	7.86781E-4	4.69685E-3	9.50336E-2	2.72992E1	-3.26508E1	-3.26703E1	2.684E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.79998E1	-1.43051E-4	-8.80009E1	5.96046E-4	4.673E-3	9.51529E-2	2.72848E1	-3.27245E1	-3.27598E1	2.67997E1	1.20069E-7	2.51771E-3	2.51771E-3	6.35692E-3	3.01609E-1
