[Scan]
initial_time=2016-01-18T22:29:29
final_time=2016-01-18T22:29:57
ip_count=19
run=1024
dataset=10
scan=726
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.81333E-6
ql1_vset=
ql1_vmon=-8.79996E1
ql1_imon=-1.15968E-9
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.43166E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-3.74953E-9
ql4_vset=
ql4_vmon=8.58307E-4
ql4_imon=1.62583E-8
mult1=-1.86848E-8
mult2=-2.76833E-9
rf_tmon=-2.61589E-3
rf_agc=3.64415E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.96583E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68425E0
bslens_imon=2.47557E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19874E1
lens5a_imon=2.00026E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53823E1
cs_ef1b_imon=2.75454E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02243E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04571E1
cs_ea1_imon=2.6013E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98846E0
lens1_imon=1.45009E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64811E1
os_ef1alow_imon=2.97175E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03401E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=2.90363E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.20942E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.27948E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1534E1
os_ea1_imon=2.42992E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63409E1
os_ef1bup_imon=3.06801E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23703E0
cs_ionrep_imon=1.17605E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93486E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02041E1
cs_anode1_imon=2.90537E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.93038E-8
tplens_vset=1.4E-1
tplens_vmon=1.68489E0
tplens_imon=-2.70635E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26756E1
iondef3_imon=1.48335E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.56469E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98179E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=9.43732E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29265E0
ionrepsh_imon=1.75797E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33536E1
lens5b_imon=2.14835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13369E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4346E0
os_ea2_imon=-7.53828E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00487E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7131E1
cs_ef2a_imon=3.16706E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05166E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73483E-1
os_ef2bup_imon=-5.30961E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11245E1
os_restr2_imon=3.38808E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.28225E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.23951E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72815E1
iondef1_imon=1.10409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68812E1
iondef4_imon=1.08851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.85524E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.24352E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15389E0
cs_ionaccel_imon=-1.71967E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47487E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56533E1
einzel_imon=7.72259E-6
window_vset=0.0E0
window_vmon=2.47225E-1
window_imon=-7.50074E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39108E-4
mask2_vset=0.0E0
mask2_vmon=-1.86379E1
mask2_imon=-6.70144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.6864E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.4593E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.06763E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2209E0
defgridb_imon=5.99696E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.42044E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07254E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62597E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30918E1
cs_fil1_imon=9.95435E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63021E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6335E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95396E-2
os_fil2_imon=-2.86032E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94132E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.80555E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34396E-1
cs_fil2_imon=-2.37958E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08988E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22056E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.81216E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=196
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.891E3	3.0E0	1.47E2	4.1E1	-7.27053E-2	-8.79999E1	-1.43051E-4	-8.80012E1	4.29153E-4	4.52995E-3	9.47237E-2	2.73394E1	-3.26585E1	-3.26107E1	2.68226E1	1.19697E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.98156E-1
2.0E0	9.8186E4	9.7E1	3.16E2	1.6E2	-7.19325E-2	-8.80001E1	-2.14577E-4	-8.80011E1	3.8147E-4	4.69685E-3	9.50098E-2	2.73288E1	-3.26591E1	-3.26404E1	2.68494E1	1.20017E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.9978E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.10825E-2	-8.8E1	-2.86102E-4	-8.80015E1	5.00679E-4	4.3869E-3	9.4986E-2	2.73051E1	-3.26521E1	-3.2633E1	2.68204E1	1.20479E-7	2.51271E-3	2.51271E-3	6.3245E-3	3.01337E-1
4.0E0	2.1429E4	1.2E1	6.55E2	3.98E2	-7.06958E-2	-8.79998E1	-1.90735E-4	-8.80014E1	4.05312E-4	4.36306E-3	9.50336E-2	2.73438E1	-3.26579E1	-3.26237E1	2.68146E1	1.20042E-7	2.52659E-3	2.52659E-3	6.30212E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.10825E-2	-8.79995E1	-5.48363E-4	-8.8001E1	2.86102E-4	4.1008E-3	9.50336E-2	2.73153E1	-3.26645E1	-3.262E1	2.67962E1	1.1988E-7	2.51886E-3	2.51886E-3	6.3074E-3	2.99506E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.08504E-2	-8.79994E1	-2.86102E-4	-8.80012E1	6.4373E-4	3.98159E-3	9.5129E-2	2.72648E1	-3.26554E1	-3.26188E1	2.68514E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34588E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.0464E-2	-8.79997E1	-1.66893E-4	-8.80011E1	6.67572E-4	3.93391E-3	9.49383E-2	2.72925E1	-3.26338E1	-3.26446E1	2.68581E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.10825E-2	-8.79997E1	-2.38419E-4	-8.8001E1	5.24521E-4	4.19617E-3	9.50098E-2	2.7347E1	-3.26655E1	-3.26054E1	2.68233E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.01548E-2	-8.79997E1	-2.86102E-4	-8.8001E1	4.05312E-4	4.45843E-3	9.47237E-2	2.73249E1	-3.26573E1	-3.25852E1	2.68244E1	1.19851E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.0071E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.79995E1	-2.38419E-5	-8.80014E1	6.91414E-4	4.45843E-3	9.50813E-2	2.73099E1	-3.26585E1	-3.26446E1	2.6834E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1
1.4E1	3.192E3	3.0E0	5.66E2	3.82E2	-7.08504E-2	-8.79995E1	-1.43051E-4	-8.80013E1	4.76837E-4	4.50611E-3	9.47952E-2	2.73357E1	-3.26765E1	-3.2653E1	2.68088E1	1.20069E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9874E-1
1.5E1	8.4E1	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.79997E1	-3.8147E-4	-8.80017E1	4.76837E-4	4.673E-3	9.50575E-2	2.73598E1	-3.26963E1	-3.26116E1	2.68382E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9926E-1
1.6E1	4.52E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.79994E1	-2.86102E-4	-8.80013E1	7.39098E-4	4.60148E-3	9.47237E-2	2.73177E1	-3.26729E1	-3.26344E1	2.68725E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.7E1	7.54E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.79995E1	-9.53674E-5	-8.80012E1	6.4373E-4	4.57764E-3	9.44138E-2	2.73358E1	-3.26885E1	-3.26154E1	2.67758E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
1.8E1	3.057E3	2.0E0	7.27E2	5.0E2	-7.24736E-2	-8.79997E1	-9.53674E-5	-8.80014E1	4.52995E-4	4.57764E-3	9.48668E-2	2.73375E1	-3.26873E1	-3.26008E1	2.68923E1	1.20158E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0148E-1
1.9E1	1.889E3	1.0E0	7.68E2	5.29E2	-7.37103E-2	-8.79998E1	-2.14577E-4	-8.80012E1	5.48363E-4	4.64916E-3	9.50813E-2	2.73448E1	-3.26873E1	-3.26687E1	2.6786E1	1.20226E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.03185E-1
2.0E1	2.4819E4	1.3E1	8.08E2	5.58E2	-7.23964E-2	-8.79998E1	-3.8147E-4	-8.80012E1	5.96046E-4	4.76837E-3	9.52244E-2	2.73187E1	-3.2662E1	-3.25971E1	2.68743E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.0279E-1
2.1E1	4.6E1	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.79995E1	-3.09944E-4	-8.80014E1	7.86781E-4	4.52995E-3	9.51529E-2	2.73016E1	-3.26325E1	-3.26231E1	2.68302E1					
2.2E1	1.762E3	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.79995E1	-1.19209E-4	-8.80013E1	6.4373E-4	4.62532E-3	9.53436E-2	2.73147E1	-3.26753E1	-3.26284E1	2.68214E1	1.19891E-7	2.51498E-3	2.51498E-3	6.34982E-3	3.03383E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.79996E1	-4.76837E-4	-8.80015E1	8.58307E-4	4.62532E-3	9.4986E-2	2.72815E1	-3.2662E1	-3.26756E1	2.68812E1	1.19965E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01347E-1
