[Scan]
initial_time=2016-01-18T22:30:47
final_time=2016-01-18T22:31:15
ip_count=19
run=1024
dataset=10
scan=728
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.73896E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-1.10894E-9
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.48085E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-3.50344E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.61897E-8
mult1=-2.29879E-8
mult2=-2.71542E-9
rf_tmon=-4.02576E-3
rf_agc=3.38577E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.66006E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6832E0
bslens_imon=2.49164E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19615E1
lens5a_imon=1.98281E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=2.75493E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04762E1
cs_ea1_imon=2.59546E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03655E0
lens1_imon=1.35302E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64993E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03984E1
cs_ea2_imon=1.49761E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.91026E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.20319E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=4.2913E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15355E1
os_ea1_imon=2.39014E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.06343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24169E0
cs_ionrep_imon=1.18357E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02121E1
cs_anode1_imon=2.90882E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.93731E-8
tplens_vset=1.4E-1
tplens_vmon=1.63837E0
tplens_imon=-6.84249E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26071E1
iondef3_imon=1.49393E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2672E1
iondef2_imon=1.56666E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98265E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=9.21988E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31454E0
ionrepsh_imon=1.73378E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33768E1
lens5b_imon=2.1525E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42473E0
os_ea2_imon=-6.70792E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00472E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03894E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51173E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.38346E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.27578E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72839E1
iondef1_imon=1.10019E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68472E1
iondef4_imon=1.10395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.85297E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.24984E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.7113E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.61191E-1
window_imon=-6.69758E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86098E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.31057E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.6825E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.53463E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32388E0
defgridb_imon=6.16828E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.41567E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07209E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6236E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3093E1
cs_fil1_imon=9.96173E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6224E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63407E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93589E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.91362E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.29879E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22078E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40053E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.71305E-1
res40_imon=-2.6159E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.741E3	1.0E0	1.47E2	4.1E1	-7.10825E-2	-8.8E1	-2.6226E-4	-8.80011E1	4.52995E-4	4.26769E-3	9.52244E-2	2.73417E1	-3.26514E1	-3.26301E1	2.68348E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9926E-1
2.0E0	9.842E4	1.0E2	3.16E2	1.6E2	-7.13143E-2	-8.80001E1	-3.57628E-4	-8.80011E1	1.90735E-4	4.33922E-3	9.52005E-2	2.73201E1	-3.26615E1	-3.26146E1	2.68388E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.98156E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80001E1	-4.29153E-4	-8.80012E1	2.14577E-4	4.48227E-3	9.47952E-2	2.73387E1	-3.26459E1	-3.26123E1	2.68435E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98222E-1
4.0E0	2.2024E4	1.7E1	6.55E2	3.98E2	-7.16233E-2	-8.8E1	-1.19209E-4	-8.80013E1	7.39098E-4	4.3869E-3	9.51767E-2	2.73586E1	-3.26591E1	-3.2599E1	2.68232E1	1.1988E-7	2.52509E-3	2.52509E-3	6.31779E-3	3.00494E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.8E1	-2.38419E-4	-8.80013E1	4.05312E-4	4.55379E-3	9.49383E-2	2.72886E1	-3.26603E1	-3.26591E1	2.68665E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.97704E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.12368E-2	-8.79999E1	-4.76837E-5	-8.80009E1	4.05312E-4	4.19617E-3	9.49621E-2	2.73446E1	-3.26803E1	-3.26231E1	2.67926E1	1.19925E-7	2.52809E-3	2.52809E-3	6.33538E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.79998E1	-3.33786E-4	-8.80009E1	4.29153E-4	4.43459E-3	9.47714E-2	2.73033E1	-3.26514E1	-3.26248E1	2.68178E1	1.19953E-7	2.51417E-3	2.51417E-3	6.28592E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80001E1	-2.6226E-4	-8.80008E1	4.52995E-4	4.3869E-3	9.48191E-2	2.73812E1	-3.26425E1	-3.26065E1	2.6869E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00197E-1
1.2E1	9.1E1	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80003E1	4.76837E-5	-8.80008E1	7.15256E-4	4.3869E-3	9.49383E-2	2.73129E1	-3.26681E1	-3.26392E1	2.68376E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1
1.3E1	9.0E0	1.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80001E1	2.38419E-5	-8.8001E1	5.48363E-4	4.07696E-3	9.48906E-2	2.73315E1	-3.26975E1	-3.26597E1	2.68719E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9874E-1
1.4E1	3.311E3	1.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80005E1	-2.6226E-4	-8.8001E1	6.19888E-4	4.81606E-3	9.50336E-2	2.73393E1	-3.26467E1	-3.25859E1	2.67879E1	1.19549E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.97963E-1
1.5E1	8.3E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80005E1	-3.09944E-4	-8.80011E1	7.15256E-4	4.64916E-3	9.50336E-2	2.73249E1	-3.26843E1	-3.2644E1	2.68331E1	1.198E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99175E-1
1.6E1	4.25E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80007E1	-3.57628E-4	-8.80009E1	4.76837E-4	4.31538E-3	9.49144E-2	2.73137E1	-3.26346E1	-3.26444E1	2.68809E1	1.20069E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9978E-1
1.7E1	7.89E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80004E1	-3.57628E-4	-8.80008E1	4.05312E-4	4.55379E-3	9.51529E-2	2.73464E1	-3.26826E1	-3.26089E1	2.6819E1	1.20137E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.00942E-1
1.8E1	3.204E3	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80006E1	-3.33786E-4	-8.80008E1	3.8147E-4	4.55379E-3	9.4986E-2	2.73454E1	-3.26446E1	-3.26242E1	2.68175E1	1.20004E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
1.9E1	1.91E3	4.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80005E1	-2.6226E-4	-8.80009E1	1.00136E-3	4.88758E-3	9.51052E-2	2.73171E1	-3.26729E1	-3.26284E1	2.68593E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01609E-1
2.0E1	2.5121E4	1.1E1	8.08E2	5.58E2	-7.23964E-2	-8.80004E1	-5.48363E-4	-8.80012E1	6.67572E-4	4.45843E-3	9.52244E-2	2.73428E1	-3.26642E1	-3.26191E1	2.68274E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01871E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80005E1	-2.38419E-4	-8.80011E1	6.67572E-4	4.48227E-3	9.5129E-2	2.72907E1	-3.26585E1	-3.26392E1	2.6825E1	1.19941E-7	2.52236E-3	2.52236E-3	6.32328E-3	3.00348E-1
2.2E1	1.774E3	1.0E0	8.89E2	6.17E2	-7.286E-2	-8.80005E1	-3.8147E-4	-8.8001E1	6.19888E-4	4.48227E-3	9.47952E-2	2.73246E1	-3.26891E1	-3.26402E1	2.68484E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80003E1	-4.76837E-4	-8.80011E1	7.86781E-4	4.64916E-3	9.49144E-2	2.72839E1	-3.2672E1	-3.26071E1	2.68472E1	1.198E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.98665E-1
