[Scan]
initial_time=2016-01-18T22:31:26
final_time=2016-01-18T22:31:54
ip_count=19
run=1024
dataset=10
scan=729
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.76031E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-1.04047E-9
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.46117E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-3.29993E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.61753E-8
mult1=-1.42195E-8
mult2=-2.51701E-9
rf_tmon=-6.36297E-3
rf_agc=3.10745E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.61237E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19298E1
lens5a_imon=1.98704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.0497E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=2.75493E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04598E1
cs_ea1_imon=2.58654E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0011E0
lens1_imon=1.60767E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.49568E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.9099E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.2071E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.27076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15023E1
os_ea1_imon=2.41675E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26231E0
cs_ionrep_imon=1.16511E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93561E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02091E1
cs_anode1_imon=2.90125E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.93447E-8
tplens_vset=1.4E-1
tplens_vmon=1.68109E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=9.29654E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28995E0
ionrepsh_imon=1.73145E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.1626E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44256E0
os_ea2_imon=-7.3915E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.15245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60784E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.37373E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23003E2
cs_ionfoca_imon=6.28847E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.22515E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7352E1
iondef1_imon=1.09012E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68665E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.85792E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=7.25071E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.44372E-1
window_imon=-8.06708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.60271E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.91056E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.41453E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07431E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62454E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.94521E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6296E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63388E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.99356E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22011E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40129E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.77912E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.794E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80003E1	0.0E0	-8.8001E1	4.05312E-4	4.62532E-3	9.50098E-2	2.73511E1	-3.26537E1	-3.26337E1	2.68331E1	1.20278E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.01085E-1
2.0E0	9.8893E4	8.4E1	3.16E2	1.6E2	-7.12368E-2	-8.80004E1	-1.90735E-4	-8.8001E1	8.82149E-4	4.673E-3	9.49621E-2	2.73295E1	-3.26724E1	-3.2604E1	2.68336E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.11597E-2	-8.80002E1	-2.14577E-4	-8.80014E1	6.19888E-4	4.36306E-3	9.49383E-2	2.73416E1	-3.26631E1	-3.26295E1	2.68418E1	1.19923E-7	2.5199E-3	2.5199E-3	6.32972E-3	3.01533E-1
4.0E0	2.1701E4	1.8E1	6.55E2	3.98E2	-7.17779E-2	-8.80002E1	-4.29153E-4	-8.80007E1	6.91414E-4	4.50611E-3	9.52721E-2	2.73529E1	-3.26655E1	-3.2593E1	2.6843E1	1.1974E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80005E1	-3.09944E-4	-8.80011E1	4.76837E-4	4.33922E-3	9.50098E-2	2.73141E1	-3.26837E1	-3.26428E1	2.68436E1	1.20363E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80007E1	-5.72205E-4	-8.80009E1	5.72205E-4	4.17233E-3	9.47952E-2	2.73147E1	-3.26687E1	-3.26512E1	2.67668E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80006E1	-9.53674E-5	-8.80014E1	4.76837E-5	4.22001E-3	9.4986E-2	2.73198E1	-3.26667E1	-3.2649E1	2.6819E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.09279E-2	-8.80003E1	-1.43051E-4	-8.80012E1	3.09944E-4	4.55379E-3	9.47714E-2	2.73496E1	-3.26518E1	-3.26266E1	2.68208E1	1.19851E-7	2.52169E-3	2.52169E-3	6.35059E-3	3.00197E-1
1.2E1	7.0E1	0.0E0	4.85E2	3.23E2	-7.09279E-2	-8.80004E1	-5.48363E-4	-8.80013E1	5.00679E-4	4.60148E-3	9.48429E-2	2.7324E1	-3.2649E1	-3.26537E1	2.68273E1	1.20174E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00302E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.09279E-2	-8.80004E1	-7.39098E-4	-8.8001E1	5.00679E-4	4.43459E-3	9.47237E-2	2.72861E1	-3.26664E1	-3.26634E1	2.68381E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
1.4E1	3.213E3	3.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80003E1	-5.24521E-4	-8.80011E1	2.14577E-4	4.43459E-3	9.48906E-2	2.73219E1	-3.26933E1	-3.26266E1	2.68076E1	1.19713E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00144E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80006E1	-5.24521E-4	-8.80009E1	2.86102E-4	4.43459E-3	9.50098E-2	2.73435E1	-3.26753E1	-3.26056E1	2.67668E1	1.19861E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.97963E-1
1.6E1	4.41E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80005E1	-5.96046E-4	-8.80009E1	4.76837E-4	4.55379E-3	9.51529E-2	2.72937E1	-3.26627E1	-3.26314E1	2.68376E1	1.19913E-7	2.52099E-3	2.52099E-3	6.28006E-3	2.97963E-1
1.7E1	7.67E2	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80005E1	-6.19888E-4	-8.8001E1	6.19888E-4	4.29153E-3	9.4986E-2	2.73045E1	-3.26739E1	-3.26123E1	2.68671E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.99E-1
1.8E1	3.111E3	2.0E0	7.27E2	5.0E2	-7.17007E-2	-8.80006E1	-3.8147E-4	-8.80011E1	5.72205E-4	4.52995E-3	9.50098E-2	2.73057E1	-3.26987E1	-3.25994E1	2.6814E1	1.20146E-7	2.52023E-3	2.52023E-3	6.31744E-3	3.01249E-1
1.9E1	1.873E3	0.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80008E1	-1.43051E-4	-8.80011E1	8.58307E-4	4.3869E-3	9.49383E-2	2.73135E1	-3.26482E1	-3.26951E1	2.68923E1	1.19907E-7	2.51911E-3	2.51911E-3	6.28377E-3	3.00761E-1
2.0E1	2.4692E4	1.3E1	8.08E2	5.58E2	-7.17007E-2	-8.80004E1	-3.57628E-4	-8.80011E1	5.72205E-4	4.36306E-3	9.51052E-2	2.73592E1	-3.26476E1	-3.26164E1	2.68442E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.03449E-1
2.1E1	4.2E1	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80006E1	-6.91414E-4	-8.80008E1	3.09944E-4	4.52995E-3	9.51529E-2	2.73387E1	-3.26977E1	-3.26528E1	2.68105E1	1.20017E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00302E-1
2.2E1	1.815E3	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80006E1	-8.34465E-4	-8.8001E1	6.4373E-4	4.673E-3	9.52244E-2	2.73429E1	-3.27191E1	-3.25936E1	2.68436E1	1.19979E-7	2.51783E-3	2.51783E-3	6.3074E-3	3.01733E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80006E1	-5.00679E-4	-8.80011E1	2.38419E-4	4.673E-3	9.49383E-2	2.7352E1	-3.26518E1	-3.26032E1	2.68665E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01085E-1
